JPH02164086A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPH02164086A JPH02164086A JP31998888A JP31998888A JPH02164086A JP H02164086 A JPH02164086 A JP H02164086A JP 31998888 A JP31998888 A JP 31998888A JP 31998888 A JP31998888 A JP 31998888A JP H02164086 A JPH02164086 A JP H02164086A
- Authority
- JP
- Japan
- Prior art keywords
- reflection mirror
- oscillator
- laser medium
- gas
- box body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 15
- 238000012423 maintenance Methods 0.000 abstract description 4
- 230000010355 oscillation Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Cleaning In General (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、レーザ光を出力するレーザ発振器に係り、
特に、共摂ミラーの保護fこ関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a laser oscillator that outputs laser light,
In particular, it concerns the protection of the co-feeding mirror.
質を高速循環させるブロア、(3)はレーザ媒質を励起
させるための放電を行う一対の″[[、(4)は全反射
鏡、(5月よ部分反射鏡、(6)は全反射!m1(4)
および部分反射* (5)を保持するミラーホルダー、
(7)はレーザ発振器から出力されたレーザ光、(8)
は真空ボンデ、(9)は排出口、α0はレーザ媒質を封
入するレーザ媒質通路、(1la)は例えばN2等の置
換ガスを封入する置換ガス通路、■は弁である。(3) is a pair of "[[]" that generates a discharge to excite the laser medium, (4) is a total reflection mirror, ((6) is a total reflection mirror, and (6) is a total reflection mirror. m1 (4)
and a mirror holder holding partial reflection* (5);
(7) is the laser beam output from the laser oscillator, (8)
(9) is a vacuum bonder, (9) is an exhaust port, α0 is a laser medium passage for sealing a laser medium, (1la) is a replacement gas passage for filling a replacement gas such as N2, and (2) is a valve.
次に動作につbで説明する。発振器筐体(1)内にはレ
ーザ媒質が所定の圧力で封じ込められている。Next, the operation will be explained in section b. A laser medium is sealed within the oscillator housing (1) under a predetermined pressure.
このレーザ媒質をブロア(2)に工り発振器筐体(1)
内で高速#i環させつつ、電極(3)間の放電にエリ励
起させることでミラーホルダー(6)に保持されている
全反射鏡(4)と部分反射fit(5)の間におhて光
の増幅が行われ、部分反射1m(5)からレーザ光(7
)が出力される。This laser medium is made into a blower (2) and an oscillator housing (1)
By exciting the electric discharge between the electrodes (3) while rotating at high speed within the mirror holder (6), a h The light is amplified, and the laser beam (7) is partially reflected from 1m (5).
) is output.
しかし、ある一定時間レーザ光(7)の発振が行われる
とV−ザ媒質が劣化するので、定期的にレーザ媒質を交
換する必要が生じてくる。このため、まず、真空ポンプ
(8)に工りレーザ媒質を吸引して排出口(9)から排
出し、つぎに発振器筐体(1)内が真空になった後に、
レーザ謀質途路qQより新しいレーザ媒質を所定の圧力
に至るまで入れる。これによって、劣化したレーザ媒質
が新しいレーザ媒質と交換されることになり、再び好適
なレーザ発振が行われることになる。However, if the laser beam (7) is oscillated for a certain period of time, the V-laser medium deteriorates, so it becomes necessary to periodically replace the laser medium. For this reason, first, the vacuum pump (8) is designed to suck the laser medium and discharge it from the discharge port (9), and then, after the inside of the oscillator housing (1) is evacuated,
A new laser medium is introduced into the laser injection path qQ until a predetermined pressure is reached. As a result, the deteriorated laser medium is replaced with a new laser medium, and suitable laser oscillation is performed again.
期
また、長#間運転していると余り器篭体(1)円で発生
したI!JNが全反射鏡(4)と部分反射鏡(5)に付
着するため、各反射i’1(4) 、 (5)の定期的
なりリーニングが必要となるが、その場合、まず、真空
ポンプ(8)lζ工ってレーザ媒質を排出後、発振器筐
体(1)内の結露や、大気中の塵埃等の進入を防ぐため
に宜ガ
換≠ス通路(lla) !すN!等の清浄なガスを大気
圧まで入れる。そして、全反射鏡(4)と部分反射鏡(
5)をそれぞれホルダー(う)ごと取り外してクリーニ
ングをlip!施オる。Also, when I was driving for a long time, an I! Since JN adheres to the total reflection mirror (4) and the partial reflection mirror (5), periodic re-leaning of each reflection i'1 (4) and (5) is required. (8) After ejecting the laser medium by machining, replace the gas passage (lla) to prevent condensation inside the oscillator housing (1) and to prevent dust from entering the atmosphere. N! Inject clean gas such as to atmospheric pressure. Then, a total reflection mirror (4) and a partial reflection mirror (
5) Remove each holder (U) and clean it with a lip! It's done.
従来のレーザ発振器は以上のように構成されているので
、特に、発振器筐体(1)内で発生する塵埃が徐々に蓄
積されて次第にその量が多くなったとき、全反射fRc
4>と部分反射鏡(5)に付著する!I埃の数も大する
こと1となる。このため、レーザ光の熱によって各反射
鏡(4) 、 (5) lこ焼付が生じ、各反射鏡(4
) 、 (5)の寿命が著しく低下するとともに出力さ
れるレーザモードの品質に悪影響を与える。また、!I
埃を除去するための呆守点検や各反射鏡(4) 、 (
5)のクリーニングをR繁に行うことが必要であるなど
の問題点があった。Since the conventional laser oscillator is configured as described above, especially when the amount of dust generated in the oscillator housing (1) gradually accumulates and increases, the total reflection fRc
Add a note to 4> and partial reflecting mirror (5)! The number of I dust is also largely 1. Therefore, the heat of the laser beam causes burn-in on each of the reflecting mirrors (4) and (5).
), the life of (5) is significantly reduced and the quality of the output laser mode is adversely affected. Also,! I
Inspect the guard to remove dust and each reflector (4), (
There were problems such as the need to perform cleaning (5) frequently.
この発明は上記のような問題点を解消するためになされ
たもので、全反射鏡および部分反射鏡への塵埃の付着を
大幅に低減して野分を向上させるとともに、メンテナン
ス等に要する費用の削減を図ることができるレーザ発振
器を得ることを目的とする。This invention was made to solve the above-mentioned problems, and it greatly reduces the adhesion of dust to the total reflection mirror and the partial reflection mirror, improves the field efficiency, and reduces the cost required for maintenance etc. The purpose is to obtain a laser oscillator that can reduce the amount of energy used.
この発明に係るレーザ発振器は、電極、レーザ媒質循環
用ブロアおよび全反射鏡と部分反射鏡を備えた発振器筐
体と、この発振器筐体にレーザ媒質を供給する通路と、
この通路を介してレーザ媒質を吸引・排出する真空ボン
デと、上記通路とは別に設けられ、発振器筺体内にパー
ジ用ガスを供給する通路と、それぞれの通路上に設けら
れ1こ弁とから構成されるものである。A laser oscillator according to the present invention includes an oscillator housing including an electrode, a laser medium circulation blower, a total reflection mirror, and a partial reflection mirror, and a path for supplying a laser medium to the oscillator housing.
It consists of a vacuum bonder that sucks and exhausts the laser medium through this passage, a passage that is provided separately from the above passage and supplies purge gas into the oscillator housing, and one valve that is provided on each passage. It is something that will be done.
この発明においては、パージ用ガス通路から発振器筺体
内に供給されたパージ用ガスが、ブロアに工り発振器筺
体内部でW1環され、真空ポンプにより吸引されて発振
器筐体外へ排出される。In this invention, the purge gas supplied into the oscillator housing from the purge gas passage is circulated by a blower inside the oscillator housing, is sucked by a vacuum pump, and is discharged to the outside of the oscillator housing.
以下、この発明の一実施例を図について説明する。第1
図において、(1it))は発振器筐体(1)内に例え
ばN2等の清浄なガスを送り込むパージ用ガス通路であ
り、レーザ媒質封入経路および真空ボンデ(8)による
発振器筐体(1)内ガス吸引排出経路とは別に設けられ
て^る。An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, (1it)) is a purge gas passage for feeding clean gas such as N2 into the oscillator housing (1), and the inside of the oscillator housing (1) by the laser medium sealing path and the vacuum bonder (8). It is provided separately from the gas suction and discharge route.
なお、上記以外の構成は従来のレーザ発振器を示すWc
2図と同一であるので説明を省略する。Note that configurations other than the above are Wc, which indicates a conventional laser oscillator.
Since it is the same as FIG. 2, the explanation will be omitted.
次に動作について説明する。発振器筐体(1)Iこ封入
されたレーザ媒質をブロア(2)にて高速循環させつつ
、一対の電極(3)間に放電を発生させることで全反射
Wl(4)と部分反射鏡(5)間でレーザ発振が起り、
部分反射鏡(5)からレーザ光(7)が出力される。ま
た、るる一定期間レーザ発振を行うとレーザ媒質が劣化
するので定期的にレーザ媒質の交換が必要になることは
前述のとおりである。Next, the operation will be explained. While the laser medium enclosed in the oscillator housing (1) is circulated at high speed by the blower (2), a discharge is generated between the pair of electrodes (3), resulting in total reflection Wl (4) and partial reflection mirror ( 5) Laser oscillation occurs between
Laser light (7) is output from the partially reflecting mirror (5). Further, as described above, the laser medium deteriorates when laser oscillation is performed for a certain period of time, so that the laser medium needs to be replaced periodically.
つぎに、発振器筐体(1)内に蓄積されr′−塵埃の除
去動作について説明する。Next, the operation of removing r'-dust accumulated in the oscillator housing (1) will be explained.
まず、パージ用ガス通路(11b)から、 N2等の清
浄なガスを発振器筐体(1)内に送り込みつつレーハ
これにより発振器筐体(1)内に蓄積されf′S塵埃お
よび全反射g(4)や部分反射fN (5)表面fこ付
着した塵埃は浮遊して、送り込まれたN2ガスと共に発
振器筐体(1)内部を循環する。First, clean gas such as N2 is fed into the oscillator housing (1) from the purge gas passage (11b), and as a result, f'S dust and total reflection g( 4) and partial reflection fN (5) The dust adhering to the surface f floats and circulates inside the oscillator housing (1) together with the injected N2 gas.
このとき、真空ポンプ(8)を作動することによう“C
1発振器筐体(1)内を循環している塵埃とN2ガスは
真空ポンプ(8)に吸引され、排覧口(9)から発振器
筐体(1)外−\排出されることになる。そして、上記
動作を一定時間行うことにより、発振器筒体(1)内の
塵埃は、そのほとんどが除去されろ1こめに発振器筐体
(1)内はクリーンな状態になるが、数回繰返せば更に
クリーンな状態が得られる。なお、全反射fit(,4
)と部分反射鏡(5)のクリーニングは上記によってほ
とんど不要となるが、必要であれば従来と同様にして行
えばよい。At this time, the vacuum pump (8) is operated so that "C"
1 Dust and N2 gas circulating within the oscillator housing (1) are sucked into the vacuum pump (8) and are discharged from the oscillator housing (1) through the exhaust port (9). By performing the above operation for a certain period of time, most of the dust inside the oscillator cylinder (1) will be removed and the inside of the oscillator housing (1) will be in a clean state, but if you repeat it several times. An even cleaner condition can be obtained. Note that total reflection fit(,4
) and the partial reflecting mirror (5) are almost unnecessary due to the above, but if necessary, they can be performed in the same manner as in the past.
ところで、塵埃の排出動作の過程においては、発振器筐
体(1)内に封入されているレーザ媒質も、塵埃やN2
ガスと一諸に排出されることになるので新規なレーザ媒
質を封入することが必要となる。By the way, in the process of dust discharge operation, the laser medium enclosed in the oscillator housing (1) is also exposed to dust and N2.
Since it will be discharged together with the gas, it is necessary to seal in a new laser medium.
この動作は従来と同様にして行われるが、新規のレーザ
媒質を封入するに際しては、レーザ媒質通路αQの池に
パージ用ガス岐路(111))から入れてもよい。This operation is performed in the same manner as in the past, but when sealing a new laser medium, it may be introduced into the pond of the laser medium passage αQ from the purge gas branch (111).
以上のようにして行われる発振器筐体(1)内の塵埃除
去においては、レーザ媒質の封入訃よび排出経路とは別
IこN2ガスの封入経路を配設すればよく、新規な構成
を必要としない。したがって、既存の装置がそのまま使
用でき、レーザ発振器の大形化やコストアップを招くこ
となく精度の高いレーザ@拶器が得られることになる。In removing dust inside the oscillator housing (1) as described above, it is sufficient to provide a N2 gas filling path separate from the laser medium filling and exhaust path, and a new configuration is required. I don't. Therefore, the existing device can be used as is, and a highly accurate laser speaker can be obtained without increasing the size or cost of the laser oscillator.
なお、上記実施例では、発振器筒体(1)内に送り込ま
れるガスの青と、真空ポンプにより排出されるガスの量
とのバランスは特に考慮して囚ないが、発振器筐体(1
)内の圧力をモニターし、発振器筐体(1)内に送り込
まれるガスの量と、真空ポンプ(8)により排出される
ガスの量が等しくなるように、ガス送り量或いは排出量
をフィードバック制御するようにしてもよい。In the above embodiment, the balance between the blue gas fed into the oscillator casing (1) and the amount of gas discharged by the vacuum pump is not particularly taken into account;
), and feedback controls the amount of gas fed or discharged so that the amount of gas sent into the oscillator housing (1) is equal to the amount of gas exhausted by the vacuum pump (8). You may also do so.
また、上記実施例ではN!等の清浄なガスを送り込むよ
うにしているが、パージ用ガス通路(lit))(こフ
ィルターを設けて乾燥mを送り込むようにしても′よい
。Furthermore, in the above embodiment, N! Although the purging gas passage (lit) (purging gas passage (lit)) (a purging gas passage (lit)), a filter may be provided to send in dry gas.
以上のようにこの発明によれば、発振器筺体内にパージ
用ガス通路からパージ用ガスを供給するとともに、真空
ポンプにて吸引・排出するように構成したので、全反射
腕と部分反射鏡に付着する塵埃の数を著しく低減でき、
各反射鏡の長寿命化、出力されるレーザモードの高品質
化お工びメンテナンス費用の大幅な削減を図ることがで
きるという効果がある。As described above, according to the present invention, since the purge gas is supplied from the purge gas passage into the oscillator housing and is suctioned and discharged by the vacuum pump, it adheres to the total reflection arm and the partial reflection mirror. The amount of dust generated can be significantly reduced.
This has the effect of extending the lifespan of each reflecting mirror, increasing the quality of the output laser mode, and significantly reducing maintenance costs.
第1図はこの発明の一実施例Iこよるレーザ発振器を示
す断面図、第2図は従来のレーザ発振器を示す断面図で
ある。
図において、(1)は発振器筐体、(2)はブロア、(
3)は電極、(4)は全反射鏡、(5)は部分反射鏡、
(8)は真空ポンプ、αQはレーザ媒質通路、(ill
))はパージ用ガス通路、(2)は弁である。
なお、図中、同一符号は同一、又は相当部分を示す。FIG. 1 is a sectional view showing a laser oscillator according to an embodiment I of the present invention, and FIG. 2 is a sectional view showing a conventional laser oscillator. In the figure, (1) is the oscillator housing, (2) is the blower, (
3) is an electrode, (4) is a total reflection mirror, (5) is a partial reflection mirror,
(8) is a vacuum pump, αQ is a laser medium path, (ill
)) is a purge gas passage, and (2) is a valve. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
高速循環するブロア、および光軸上に対向配置された全
反射鏡と部分反射鏡を備えた発振器筺体と、この発振器
筺体内に上記レーザ媒質を供給するレーザ媒質通路と、
このレーザ媒質通路を介して発振器筐体内に封入された
レーザ媒質を吸引・排出する真空ポンプと、上記レーザ
媒質通路とは別に設けられ、上記発振器筐体内にパージ
用ガスを供給するパージ用ガス通路と、このパージ用ガ
ス通路および上記レーザ媒質通路のそれぞれの通路上に
設けられた弁とを備えて成ることを特徴とするレーザ発
振器。An oscillator housing comprising a pair of opposing electrodes, a blower that circulates a laser medium between the electrodes at high speed, and a total reflection mirror and a partial reflection mirror placed opposite each other on the optical axis; a laser medium path for supplying a medium;
A vacuum pump that sucks and exhausts the laser medium sealed in the oscillator housing through this laser medium passage, and a purge gas passage that is provided separately from the laser medium passage and supplies purge gas into the oscillator housing. and a valve provided on each of the purge gas passage and the laser medium passage.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31998888A JPH02164086A (en) | 1988-12-19 | 1988-12-19 | Laser oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31998888A JPH02164086A (en) | 1988-12-19 | 1988-12-19 | Laser oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02164086A true JPH02164086A (en) | 1990-06-25 |
Family
ID=18116493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31998888A Pending JPH02164086A (en) | 1988-12-19 | 1988-12-19 | Laser oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02164086A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6627843B2 (en) * | 2000-10-06 | 2003-09-30 | Arms Komatsu Ltd. | Casing for laser device, production method and cleaning method of the same |
-
1988
- 1988-12-19 JP JP31998888A patent/JPH02164086A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6627843B2 (en) * | 2000-10-06 | 2003-09-30 | Arms Komatsu Ltd. | Casing for laser device, production method and cleaning method of the same |
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