JPH02163608A - Angular velocity meter - Google Patents

Abstract

PURPOSE:To obtain a stable vibration by a simple constitution by constituting a vibration driving part by assembling a first piezoelectric converting element for driving the vibration and a second piezoelectric converting element for detecting the driven vibration to a first base substance, and assembling a third piezoelectric converting element for detecting its deformation to a second base substance. CONSTITUTION:As for a vibration mechanism 11, a vibration driving part 14 being a first base substance as a substrate for a vibration driving part, and vibrating reeds 15a, 15b being a pair of second substrates as a substrate for the vibrating reed are formed as one body. To the surface of the driving part 14, a vibration driving use first piezoelectric converting element 14a for giving vibration of a bend deformation to the driving part 14 is stuck, and to the reverse side, a second piezoelectric converting element 14b for detecting the driven vibration which is generated is stuck, and by allowing them to connect electrically to a control circuit, the driving part 14 is maintained in a stable vibrating state. Also, to the vibrating reeds 15a, 15b, third piezoelectric converting elements 16a, 16b are stuck so that a distortion of the vibrating reeds 15a, 15b can be detected.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an angular velocity meter used as a vibration detection device for equipment that receives relatively low frequency vibrations, and specifically relates to an angular velocity meter that is mounted on, for example, a camera, The present invention relates to an angular velocity meter that is suitably used in a system that detects vibrations (angular velocity) with a frequency of about IHz to 12Hz and uses the detected information to prevent image blur caused by the vibrations.

[Prior Art] The conventional technology to which the present invention is applied will be described below, taking the case of a camera as an example.

In modern cameras, important tasks such as exposure determination and focus adjustment are automated in many cases, and the possibility of a photographic failure even by an inexperienced camera operator is extremely low. In addition, it has been said that it is difficult to automate the deterioration of captured images and failures in photography due to camera shake, but recently, cameras that solve the above problems such as failures in photography due to camera shake have been researched, and in particular, Research and development are underway to prevent shooting failures due to camera shake by the photographer. "Camera shake", which is a problem in cameras, is usually a vibration with a frequency of about 1) 1Z to 12Hz.

In order to be able to take pictures without image blur even if such hand shake occurs at the time of camera shutter release, it is necessary to detect the vibration of the camera due to the above-mentioned hand shake, and to respond to the detected value. In principle, this can be achieved by displacing a correction lens disposed in the photographic optical system to keep the image on the film apparently still.

Therefore, in order to be able to take photographs that do not cause image blur even when such camera shake occurs, it is first necessary to accurately detect the vibrations occurring in the camera.

If we think about camera shake detection, in principle this involves a vibration sensor that detects angular acceleration, angular velocity, etc. caused by camera shake, and a signal from this sensor that is electrically integrated to output a signal of angular displacement. This can be done by installing a camera shake detection system on the camera.

An example of an image blur prevention system constructed using an angular velocity meter based on the above idea will be outlined with reference to FIG.

The example shown in FIG. 6 detects vertical camera shake (pitching) 81F and horizontal camera shake (yawing) 61y caused by the photographing optical axis indicated by the arrow 61 in the figure, and prevents image blur at the image plane 69. FIG. 2 is a diagram of a system designed to prevent

In FIG. 6, 62 is a lens barrel, 63P and 63Y are angular velocity meters that detect the vertical camera shake angular velocity and camera horizontal shake angular velocity, respectively, and 64P and 8
It is shown as 4Y. 65P and 65Y are known analog integration circuits which integrate the signal from the angular velocity meter 63P53Y and convert it into a camera shake angular displacement signal. Based on this angular displacement signal, the correction optical system 66 such as a lens arranged as a part of the photographing optical system is driven by the drive parts 67P and 67Y provided corresponding to the vibration directions detected as described above, to Y as shown in the figure. Moved in the X direction. Note that 68P and 68Y are position detection sensors of the correction optical system 66, and the correction optical system δ
The above movement is performed accurately while detecting the position of 6.

As a result of the above, the image on the image plane 69 is maintained in an apparently stationary state. Note that by providing the optical correction mechanism itself with a mechanical integration function, the analog integration circuit 65P,
85Y can also be omitted.

FIG. 5(a) shows the structure of an example of a vibrating gyroscope which is an angular velocity meter suitable for the above purpose.

This vibrating gyroscope includes a vibrating mechanism 51 and a vibrating mechanism 5.
1 to a fixed base 52 such as a lens barrel via a beam member 52a, and a control circuit 53 electrically connected to the vibration mechanism 51.

The vibration mechanism 51 in this illustrated example includes a vibration drive section 54 formed in a substantially U-shape of a tuning fork shape, and a vibration drive section 54 that extends from the tip of each arm of the tuning fork shape and extends in a direction perpendicular to the vibration surface. A pair of vibrating pieces 55a arranged such that the rigidity of
, 55b, a first piezoelectric transducer 54a for vibration driving is fixed to one arm of the vibration drive section 54, and a second piezoelectric transducer 54a for detecting drive vibration is fixed to the other arm. 5
4b is fixed, and when an excitation signal is manually applied from the control circuit 53 to the first piezoelectric transducer 54a, the vibration driving section 54 and the vibrating piece 55a formed integrally therewith are activated.
, 55b are vibrated in opposite directions to each other in the direction of arrow 57. The second piezoelectric transducer 54b is for detecting drive vibration as described above, and detects the vibration generated in this vibration drive section and outputs it to the control circuit 53.

Concentrated masses 58a, 58 are provided at the tips of the vibrating pieces 55a, 55b.
b is assembled, and has an alternating speed in the direction indicated by the reference numeral 57 in the figure given by the vibration of the vibration drive section 54. In this state, if an input angular velocity Ω is now applied around the axis 59 of the vibration mechanism 51, the concentrated masses 58a, 58b,
Coriolis force Fc determined by the product of alternating speed 1 human force angular velocity Ω
is applied in the direction of arrows 510a and 510b. arrow 51
The directions of 0a and 510b are opposite to each other because the pair of vibrating pieces 55a and 55b vibrate in opposite directions.

Here, if the alternating speed is always maintained at a constant amplitude by the control circuit 53, the concentrated masses 58a and 58b will not be displaced, and the Coriolis force Fc can be obtained as one that changes in proportion to the human angular velocity Ω. can.

Now, due to the above movement, the vibrating pieces 55a and 55b are distorted by the Coriolis force Fc, so the vibrating pieces 55a and 55b are distorted by the Coriolis force Fc.
Distortion is detected by third piezoelectric transducers 56a and 56b fixed in advance so as to detect the direction of distortion of 5a and 55b, and this output is processed by the control circuit 53 to obtain the magnitude of the human angular velocity Ω. Can be done.

The terminal outputs of the second piezoelectric transducer 54b and the third piezoelectric transducers 56a and 56b are connected to the resistors 511 and 56b, respectively.
512 and then input to non-inverting amplifiers 513 and 514 to generate an amplified detection voltage, and a phase shift circuit 515 shifts its phase by 90 degrees in response to the amplified detection voltage from the non-inverting amplifier 513. It is designed to generate a phase-shifted voltage.

The role of this phase shift circuit 515 will be described below. The vibration mechanism U vibrates in response to an excitation signal that is manually applied to the first piezoelectric transducer 54a. It is better to vibrate at the resonant frequency of the vibration mechanism 51. However, in a resonant state,
The phase of the actual vibration is delayed by 90° with respect to the excitation signal input to the first piezoelectric transducer 54a. Therefore, the second
The amplified detection voltage from the non-inverting amplifier 513 via the piezoelectric transducer 54b is delayed in phase by 90° with respect to the excitation signal input to the piezoelectric transducer 54a. Therefore, the phase is advanced by 90 degrees using the phase shift circuit 515 to align the phase with the excitation signal, and this phase aligned signal is input to the first piezoelectric transducer 54a to configure a so-called positive feedback circuit. The amplification detection voltage of the non-inverting amplifier 513 is made larger than the signal voltage to cause the vibration mechanism 51 to vibrate.

Note that the rectifier circuit 516 in the control circuit is the phase shift circuit 5.
In response to the phase-shifted voltage from 15, the phase-shifted voltage is rectified to generate a rectified voltage. The reference signal circuit 517 generates a reference voltage for controlling the excitation signal to the first piezoelectric transducer 548 in order to keep the amplified detection signal from the non-inverting amplifier 513 constant.

The differential amplifier 518 generates a differential amplified voltage by amplifying the difference between the rectified voltage from the rectifier circuit 516 and the reference voltage from the reference signal circuit 517. The multiplier circuit 519 multiplies the phase shift voltage from the phase shift circuit 515 by the differential amplification voltage from the differential amplifier 518, and applies this multiplication result to a feedback voltage corresponding to the excitation signal to the first piezoelectric transducer 54a. shall be.

By doing so, the vibration mechanism 51 stably vibrates with a constant amplitude. That is, as mentioned above, when the amplification detection voltage of the non-inverting amplifier 513 is made larger than the excitation signal voltage, the vibration mechanism U starts to vibrate, but if this continues, the vibration will gradually increase and will eventually be limited by the power supply voltage. This results in unstable vibrations with distorted waveforms.

However, when the amplified detection signal from the non-inverting amplifier 513 is rectified by the rectifier circuit 516 and the difference from the reference signal circuit 517 is multiplied by the feedback, the vibration increases and the rectified voltage increases, and when it approaches the reference voltage, the multiplication occurs. The multiplication result of the circuit 519 becomes smaller, and the ratio of the excitation signal voltage to the amplified voltage of the non-inverting amplifier 513 becomes smaller. In other words, the amplification factor of the positive feedback circuit is controlled by the vibration amplitude and the reference signal, and the vibration mechanism 51 performs stable vibration with a constant width.

On the other hand, regarding the output of the non-inverting amplifier 514, this is a bandpass circuit 520 that passes only the vibration frequency component.
First, a disturbance signal in an extremely low frequency band compared to the vibration frequency to be detected (for example, the vibrating pieces 55a, 55b are distorted due to gravitational acceleration, and the distortion is transferred to the third piezoelectric transducer 56a, 56b). (acceleration signal generated by detection) is removed. and synchronous detection circuit 521
In response to the phase shift voltage from the phase shift circuit 515, the band amplified detection voltage from the bandpass circuit 520 is synchronously detected in relation to this phase shift voltage, and the synchronous detection result is used as the synchronous detection voltage. Occur.

FIG. 5(b) is a diagram illustrating the state of the synchronous detection as described above. In contrast to the vibration 522 of the vibration mechanism 51 shown by the solid line in this diagram, the alternating speed is as shown by the dashed line 523. , the phase is advanced by 90''.Then, the detection axis 59
As a result of the surrounding human force angular velocity Ω acting on this system, the outputs of the third piezoelectric transducers 56a, 55b are in phase with the alternating velocity, as shown by the two-dot chain line 524 in the figure.

Note that the broken line indicates the output 525 of the second piezoelectric transducer 54b that detects the vibration of the vibration mechanism 51, and the output 525 is advanced by 90 degrees by the phase shift circuit 515 to produce a phase-shifted voltage that is applied to the third piezoelectric transducer 58a, The output 524 of 56b is synchronously detected.

FIG. 5(C) shows the synchronous detection voltage obtained in the above manner, and the area represented by this diagonal line is calculated by the smoothing circuit 52.
By integrating by 6, an angular velocity voltage representing the input angular velocity Ω is obtained.

[The invention attempts to solve i! ! ! [Problem] By the way, the conventional device that performs the above operations has an extremely complicated shape as shown in the vibration mechanism 51 in FIG. In addition to the difficulty of mass production as a consumer device such as an anti-shake camera, which was the original purpose, and the complexity of its shape,
There are also problems in that it is difficult to control accuracy, the performance as an angular velocity meter tends to vary between products, and it is difficult to supply a large quantity of products with stable overall accuracy.

In order to deal with this problem, an angular velocity meter with a simple shape as shown in FIG. 4 has also been proposed.

The angular velocity meter shown in FIG.
More specifically, the vibration mechanism 41 includes a flexible rectangular vibration driving section 44 that constitutes a bimorph with a piezoelectric transducer, and a length of this vibration driving section 44. A pair of vibrating pieces 45a45b, which also constitute a bimorph using a piezoelectric transducer, are bonded to both ends in the axial direction.

By inputting an excitation signal from an oscillator (not shown) to the vibration drive unit 44, this angular velocity meter starts to flexurally vibrate in the direction of arrows 47' and 47'' in the figure.

The vibration of the vibration drive unit 44 causes the vibrating piece 45a45b to vibrate in the direction of the arrow 47.47, and when an input angular velocity Ω around the shaft 49 acts on it, the vibrating piece 45a vibrates.

The alternating speed of 45b, the mass of vibrating pieces 45a and 45b,
A Coriolis force Fc is generated in relation to the human force angular velocity Ω around the detection axis. This is detected by the bimorph, which is the vibrating element 45a45b, and is detected by the control circuit as a signal indicating the angular velocity value, as in the prior art example shown in FIG. 5 described above.

However, although such a configuration has the advantages that the vibration mechanism 41 is easy to process and compact,
There are two problems that arise as shown below.

The first problem is that the vibration drive section 44 has a
) is not provided with the second piezoelectric transducer 54b for detecting cantering vibration in the vibration drive unit 54, the vibration is only driven by human power from the oscillator, and as shown in FIG.
) There is also no means to keep the vibration constant like the control circuit 53 of. Therefore.

When the characteristics of the bimorph change due to changes in the external environment (temperature, humidity, aging, etc.), the amplitude of the vibration changes, and the vibrating piece 45
The alternating speeds of a and 45b change, resulting in an error in the detected angular velocity.

The second problem is that although the support member 42 is bonded to the vibration drive section 44, it is not always bonded to the center of the vibration drive section 44. In other words, the bonding position of the support member 42 to the vibration drive unit 44 is
As shown by the broken line 42'' in the figure, the adhesive position shifts (
offset), and it is generally difficult to manage a bonded state that accurately matches the center in a strict sense across a large number of products without variation. When the bonding position is offset as shown above, the vibration amplitudes of the arrows 47'' and 47'' naturally differ, resulting in a difference in the alternating speed of the pair of vibrating pieces 45a and 45b, making it impossible to accurately detect the angular velocity. It ends up.

Due to the above-mentioned problems, the accuracy of angular velocity detection in the angular velocity meter with the configuration shown in Figure 4 deteriorates significantly, and there is a large possibility that accurate shake (vibration) detection cannot be performed. There is.

The present invention is intended to solve the various problems described above, and its purpose is to provide a device that has a simple structure, is therefore easy to manufacture, and is capable of obtaining stable vibrations. It is an object of the present invention to provide an angular velocity meter capable of detecting the angular velocity of a constituent ring based on the present invention.

[Means for Solving the Problems] A feature of the angular velocity meter according to the present invention, which has been made to achieve the above object, is that it is elongated in one direction and can be bent and deformed in a direction perpendicular to the one direction. In addition, a first vibration drive unit that vibrates by excitation of the piezoelectric transducer described below
and a pair of base bodies extending in the vertical direction from both ends of the first base body, and arranged so as to have low rigidity in a second direction perpendicular to the longitudinal direction and the vertical direction. a second base body, and a support body extending in the second direction from the central side edge of the first base body to support the first and second base bodies on a fixed base; A first piezoelectric transducer for vibration driving that causes deflection deformation and a second piezoelectric transducer for detecting drive vibration are assembled on the first base body to constitute a vibration driving section, and further the second piezoelectric transducer A third piezoelectric transducer for detecting the deformation of the second base body occurring in the second direction is attached to the base body, and a vibrating piece for detecting the human angular velocity Ω is configured. It's everywhere.

In the above configuration, it is exemplified as a preferable embodiment that the first base body and the support body, or furthermore, the second base body are formed as an integral part. These bases are generally formed by punching out a metal plate or cutting them out, but they can also be formed separately and then integrated by soldering, etc. It may be something. Further, a preferred embodiment of the second base body may be one formed by bending or twisting a part of the first base body.

In addition, the vibration mechanism composed of the first base body and the second base body has a structure in which the second base body extends from the first base body to one side in the vertical direction. It may be of a type in which it extends from one base member to both sides in the vertical direction to form an H-shape as a whole.

[Function] According to the present invention, by assembling the first piezoelectric transducer for vibration driving on the first base body and also assembling the second piezoelectric transducer for detecting the generated drive vibration, It is possible to stably vibrate the vibration drive unit and therefore the vibrating piece while detecting the generated vibrations, and further, by making the support body, the first base body of the vibration drive unit, and furthermore the second base body integrally molded, the support can be improved. It is possible to detect the human angular velocity Ω with high accuracy while satisfying the high positional accuracy of the body, etc.

[Example] FIG. 1 is a diagram for explaining Example 1 of the present invention,
The illustration of the control circuit and the like is omitted, and only the vibration mechanism 11 is illustrated.

In FIG. 1, the vibration mechanism 11 has, as its base structure, a vibration drive unit 14 which is a first base serving as a substrate for a vibration drive unit, and a pair of N2 base bodies serving as substrates for a vibrating element. Piece 15a.

15b, which are integrally molded by machining from a phosphor bronze rod.

The vibration drive unit 14 has a rectangular flat plate shape, and is arranged in a position in which the rigidity around the detection axis 19 is reduced in a direction perpendicular to the plate surface of the vibration drive unit 14 from both ends of one surface of the plate surface. The vibrating pieces 15a and 15b are provided as shown.

Further, from both sides of the center portion in the longitudinal direction of the vibration drive unit 14,
Support beams 12a and 12b with a narrow width are formed to extend,
It is connected and fixed to the base 12. This base 12 corresponds to a fixed part of a camera lens barrel, etc.

Due to the configuration of the base structure supported by the base as described above, the vibration drive unit 14 has both ends thereof easily flexible and deformable in the direction perpendicular to the rectangular flat plate surface, and the vibration pieces 15a, 15
b has a structural feature of low rigidity around the axis 19. On the surface of the vibration drive unit 14,
A first piezoelectric transducer 14a for vibration driving to give a vibration of deflection deformation to the vibration drive unit 14 is attached, and a second piezoelectric transducer 14b for detecting the generated drive vibration is attached on the back side ( (In Figure 42, it is on the back side of the vibration drive unit, so it is not shown) are glued, and by electrically connecting these to the control circuit shown in Figure 5 mentioned above, the vibration drive unit can be stabilized. maintain the vibration state.

Further, third piezoelectric transducers 15a and 16b are bonded to the vibrating pieces 15aj5b as shown in the figure, so that the distortion of the vibrating pieces +5a and 1.5b caused by the Coriolis force can be detected.

As described above, in this example, by forming the support beams 12a and 12b extending from the vibration drive unit 14 on the same plane, the back surface of the vibration drive unit 14 has a ! J2 piezoelectric transducer 14b can be provided, and even in the vibration mechanism 11 having an MA structure as shown in the figure, the stability of the vibration driving section is determined based on the vibration detected by this second piezoelectric transducer 14b. This has the advantage of ensuring high vibration.

In addition, in this example, the vibration drive unit] 4, the support beam 12a,
12b are made of the same material, extremely high positional accuracy can be achieved, and there is no problem of unbalanced vibrations or decreased output accuracy of input angular velocity due to discrepancies in positional accuracy. Furthermore, it is possible to obtain higher support rigidity than when the support beam is fixed to the vibration drive part by adhesive etc., so the vibration mechanism shell can be reliably supported, and it is reliable and resistant to external shocks. Another effect is that it is possible to obtain a high angular velocity shape.

In the above configuration, the vibration drive unit 14 and the base of the vibrating piece are formed by cutting out a single rod-shaped material, but this is an example in which the base bodies of the vibration driving unit 14 and the vibrating piece are formed by cutting out a single bar-shaped material. They may be joined by other means, and in this case, there is an advantage that the machining process is simpler than machining.

FIGS. 2(a) to 2(d) are for explaining Embodiment 2 of the present invention, and the example shown in these figures shows the base body constituting the substrate of the vibration drive unit 14 and the vibration Piece 15a, I
The substrate structure of the substrate 5b is formed by bending or bending two metal plates, for example. Its structure is substantially the same as that of the first embodiment, and therefore, for convenience of explanation, the same members are given the same reference numerals as those of the first embodiment, and the explanation thereof is omitted.

Each side in FIGS. 2(a) to 2(d) above is the same as in Example 1 except that the connection relationship between the vibration driving unit 14 and the vibrating pieces 15a and 15b is different. c), (c)
Regarding the example l), since the structure is designed so that the vibration surfaces of the pair of vibrating pieces 15a15b are located on the same plane, the couple force around the detection axis 19 that may occur when the vibration surfaces do not match is reduced. Moreover, this coincident vibration plane is
Since it can be set to include the axis 22 perpendicular to the extension axis of the support beam 12a12b, the axis 22 due to vibration vibration can be
It is possible to perform vibration while suppressing the generation of surrounding force couples, and as a result, there is an effect that stable vibration can be ensured.

Furthermore, the bending and curving processes described above can be easily and quickly carried out by the press working method, which has the advantage that an angular velocity meter with high productivity and high positional accuracy can be manufactured.

FIG. 3 is for explaining Embodiment 3 of the present invention, and common members are given the same reference numerals as in Embodiment 1 with 20 added. Of these, FIG. 3(a) shows the vibration mechanism 1 of Example 1.
] For the vibrating piece 35a35b, the vibration drive unit
A symmetrical vibrating piece 35c is placed on the opposite side (lower side of the figure) across 4.
, 3Sd are formed to form the vibration mechanism 31 as a whole in an H-shape. Third piezoelectric transducers 36c and 36d are bonded to the vibrating pieces 35c and 35d symmetrically with the third piezoelectric transducers 3fia and 36b, and the other configurations are the same as in the first embodiment.

Further, the example of FIG. 3(b) is based on the structure shown in FIG. 2(C) of Embodiment 2 on the opposite side with the vibration drive unit 34 in between, as in the case of the example of FIG. 3(a) above. A symmetrical vibrating piece 35
An example is shown in which 35d and 35d are formed.In addition, in this example, as shown in the dotted lines in the figure, adhesive is attached to the bent part of the base to improve the rigidity of the bent part after processing. It is configured to allow The other configurations are substantially the same as in the second embodiment.

By configuring the vibration mechanism 31 in the H-shape as described above, in addition to the effects described in the above-mentioned embodiment 1.2, this example also has the following advantages.

In other words, simply doubling the number of piezoelectric transducers for detecting the input angular velocity Ω has the advantage of increasing output accuracy.In addition, the vibration mechanism 31 is H-shaped and symmetrical vertically and horizontally. Therefore, the support beams 12a, 12
The support point b and the center of gravity of the vibration mechanism can be made to coincide with each other, thereby making it possible to stably detect the input angular velocity Ω without the occurrence of an external impact force or a couple due to gravity. In particular, changes in internal stress and strain caused by the generation of this force couple sensitively affect the vibration propagating through the mechanism, changing its amplitude and phase, so measures were taken to prevent this effect. The structure of this example has great effects.

[Effects of the Invention] As explained above, the angular velocity meter having the configuration of the present invention has a structure that allows a piezoelectric transducer for detecting drive vibrations to be attached to the vibration drive unit to keep vibrations stable. It has the advantage that it can be provided as a simple structure with excellent productivity, that the positional accuracy of each part of the mechanism is high, and that stable vibration can be obtained.

In addition, since it can be configured as a molded product that integrates the vibration drive unit, support body, and, if necessary, the vibrating element, the joint rigidity of each part is high and reliability is ensured against external shocks. Another advantage is that it is possible to provide an angular velocity meter that is suitable for mass production and has no variation between products.

Furthermore, even when the vibration mechanism is configured in an H-shape as a whole, the vibration mechanism with the base structure of this example maintains the characteristics of the H-shape while ensuring high positional accuracy of each part of the base structure. It also has the advantage of ensuring high rigidity against external impacts and the like.

[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a perspective view of a vibration mechanism for explaining the angular velocity meter according to the first embodiment of the present invention, and FIGS. A perspective view of a vibration mechanism for explaining the angular velocity meter of Example 2, and FIGS. 3(a) and 3(b) are perspective views of a vibration mechanism for explaining the angular velocity meter of Example 2, similar to Example 1. It is. FIG. 4 is a perspective view showing an example of the vibration mechanism of a conventional angular velocity meter;
Figures 5(a), (b), and (c) are diagrams for explaining other conventional angular velocity meters, and Figure 6 is for explaining an overview of a camera image blur prevention system to which the angular velocity meter is applied. This is a diagram. 11, 31... Vibration mechanism 12.32... Base 12a, 12b... Support beam 14.34... Vibration drive unit 15a, 15b, 35a, 35b - Vibration piece 1
[1a, 16b, 38a, 36b - Third piezoelectric transducer 19.39...Detection shaft 51...Vibration mechanism 52...Base 52a, 52b...Support beam 54...Vibration drive unit 55a, 55b...
- Vibration pieces 56a, 56b...Third piezoelectric conversion element 59
...Detection axis 35c Fig. 3(b)

Claims (1)

[Scope of Claims] 1. A first base body which is elongated in one direction and can be flexibly deformed in a direction perpendicular to the one direction, and a pair of base bodies extending in the perpendicular direction from each end of the first base body. a second base body that extends from the side edge of the central part of the first base body and is arranged so that the rigidity in a second direction perpendicular to the longitudinal direction and the vertical direction is low; These first and second
a support for supporting the base body on a fixed base, a piezoelectric transducer for vibration driving to cause the deflection deformation in the first base body, and a piezoelectric transducer for detecting the deflection deformation generated thereby. An angular velocity meter characterized in that a piezoelectric transducer is assembled to the second base, and further a piezoelectric transducer is assembled to the second base for detecting deformation of the second base that occurs in the second direction. 2. The angular velocity meter according to claim 1, wherein the first base and the support are integrally molded. 3 The first base, the second base, and the support,
The angular velocity meter according to claim 1, characterized in that it is an integrally molded product. 4. The angular velocity meter according to claim 3, wherein the second base body is formed by bending or twisting the first base body. 5. Claims 1 to 4, wherein the second base body extends from the first base body on both sides in the vertical direction, and the first base body and the second base body form an H-shape as a whole.
An angular velocity meter listed in any of the above.