JPH0216285U - - Google Patents

Info

Publication number
JPH0216285U
JPH0216285U JP1988090901U JP9090188U JPH0216285U JP H0216285 U JPH0216285 U JP H0216285U JP 1988090901 U JP1988090901 U JP 1988090901U JP 9090188 U JP9090188 U JP 9090188U JP H0216285 U JPH0216285 U JP H0216285U
Authority
JP
Japan
Prior art keywords
contact
focus control
workpiece
contact member
protective layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988090901U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988090901U priority Critical patent/JPH0216285U/ja
Publication of JPH0216285U publication Critical patent/JPH0216285U/ja
Pending legal-status Critical Current

Links

JP1988090901U 1988-07-11 1988-07-11 Pending JPH0216285U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988090901U JPH0216285U (enrdf_load_stackoverflow) 1988-07-11 1988-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988090901U JPH0216285U (enrdf_load_stackoverflow) 1988-07-11 1988-07-11

Publications (1)

Publication Number Publication Date
JPH0216285U true JPH0216285U (enrdf_load_stackoverflow) 1990-02-01

Family

ID=31315408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988090901U Pending JPH0216285U (enrdf_load_stackoverflow) 1988-07-11 1988-07-11

Country Status (1)

Country Link
JP (1) JPH0216285U (enrdf_load_stackoverflow)

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