JPH0216285U - - Google Patents
Info
- Publication number
- JPH0216285U JPH0216285U JP1988090901U JP9090188U JPH0216285U JP H0216285 U JPH0216285 U JP H0216285U JP 1988090901 U JP1988090901 U JP 1988090901U JP 9090188 U JP9090188 U JP 9090188U JP H0216285 U JPH0216285 U JP H0216285U
- Authority
- JP
- Japan
- Prior art keywords
- contact
- focus control
- workpiece
- contact member
- protective layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011241 protective layer Substances 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988090901U JPH0216285U (enrdf_load_html_response) | 1988-07-11 | 1988-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988090901U JPH0216285U (enrdf_load_html_response) | 1988-07-11 | 1988-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0216285U true JPH0216285U (enrdf_load_html_response) | 1990-02-01 |
Family
ID=31315408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988090901U Pending JPH0216285U (enrdf_load_html_response) | 1988-07-11 | 1988-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0216285U (enrdf_load_html_response) |
-
1988
- 1988-07-11 JP JP1988090901U patent/JPH0216285U/ja active Pending
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