JPH0215867U - - Google Patents

Info

Publication number
JPH0215867U
JPH0215867U JP9219388U JP9219388U JPH0215867U JP H0215867 U JPH0215867 U JP H0215867U JP 9219388 U JP9219388 U JP 9219388U JP 9219388 U JP9219388 U JP 9219388U JP H0215867 U JPH0215867 U JP H0215867U
Authority
JP
Japan
Prior art keywords
circular substrate
polishing machine
center
axis
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9219388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9219388U priority Critical patent/JPH0215867U/ja
Publication of JPH0215867U publication Critical patent/JPH0215867U/ja
Pending legal-status Critical Current

Links

JP9219388U 1988-07-12 1988-07-12 Pending JPH0215867U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9219388U JPH0215867U (US20100223739A1-20100909-C00005.png) 1988-07-12 1988-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9219388U JPH0215867U (US20100223739A1-20100909-C00005.png) 1988-07-12 1988-07-12

Publications (1)

Publication Number Publication Date
JPH0215867U true JPH0215867U (US20100223739A1-20100909-C00005.png) 1990-01-31

Family

ID=31316647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9219388U Pending JPH0215867U (US20100223739A1-20100909-C00005.png) 1988-07-12 1988-07-12

Country Status (1)

Country Link
JP (1) JPH0215867U (US20100223739A1-20100909-C00005.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0192064A (ja) * 1987-09-30 1989-04-11 Toshiba Mach Co Ltd 片面研磨装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0192064A (ja) * 1987-09-30 1989-04-11 Toshiba Mach Co Ltd 片面研磨装置

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