JPH0215862U - - Google Patents

Info

Publication number

JPH0215862U

JPH0215862U JP9389288U JP9389288U JPH0215862U JP H0215862 U JPH0215862 U JP H0215862U JP 9389288 U JP9389288 U JP 9389288U JP 9389288 U JP9389288 U JP 9389288U JP H0215862 U JPH0215862 U JP H0215862U

Authority

JP

Japan

Prior art keywords

polishing

holder

semiconductor substrates

water

plate

Prior art date

1988-07-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005498 polishing Methods 0.000 claims description 10
• 239000000758 substrate Substances 0.000 claims description 5
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1