JPH02155418A - Semiconductor-manufacturing apparatus - Google Patents

Semiconductor-manufacturing apparatus

Info

Publication number
JPH02155418A
JPH02155418A JP30857588A JP30857588A JPH02155418A JP H02155418 A JPH02155418 A JP H02155418A JP 30857588 A JP30857588 A JP 30857588A JP 30857588 A JP30857588 A JP 30857588A JP H02155418 A JPH02155418 A JP H02155418A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
voltage
applied
input
load
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30857588A
Inventor
Yutaka Yamahira
Original Assignee
Teru Kyushu Kk
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To prevent an apparatus form suffering damage by providing means for detecting a voltage different from a specified input voltage, when said voltage is applied to said apparatus, and means for automatically breaking an input-applying circuit.
CONSTITUTION: When a voltage higher than a desired input voltage is applied to a terminal 21, a relay 22 for detecting an input voltage is operated to turn ON a contact switch 23. The terminal 26 of a breaker 25 is brought to a short circuit state to break input and output power terminals 21, 27. Thus, no overvoltage is applied to a load 24, so that said load 24 can be protected from damage.
COPYRIGHT: (C)1990,JPO&Japio
JP30857588A 1988-12-06 1988-12-06 Semiconductor-manufacturing apparatus Pending JPH02155418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30857588A JPH02155418A (en) 1988-12-06 1988-12-06 Semiconductor-manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30857588A JPH02155418A (en) 1988-12-06 1988-12-06 Semiconductor-manufacturing apparatus

Publications (1)

Publication Number Publication Date
JPH02155418A true true JPH02155418A (en) 1990-06-14

Family

ID=17982681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30857588A Pending JPH02155418A (en) 1988-12-06 1988-12-06 Semiconductor-manufacturing apparatus

Country Status (1)

Country Link
JP (1) JPH02155418A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6028755A (en) * 1995-08-11 2000-02-22 Fujitsu Limited DC-to-DC converter capable of preventing overvoltages

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6028755A (en) * 1995-08-11 2000-02-22 Fujitsu Limited DC-to-DC converter capable of preventing overvoltages
US6046896A (en) * 1995-08-11 2000-04-04 Fijitsu Limited DC-to-DC converter capable of preventing overvoltage
US6204648B1 (en) 1995-08-11 2001-03-20 Fujitsu Limited DC-to-DC converter capable of preventing overvoltage

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