JPH02152756A - Detecting device for tool contact of ultrasonic machine - Google Patents
Detecting device for tool contact of ultrasonic machineInfo
- Publication number
- JPH02152756A JPH02152756A JP63306628A JP30662888A JPH02152756A JP H02152756 A JPH02152756 A JP H02152756A JP 63306628 A JP63306628 A JP 63306628A JP 30662888 A JP30662888 A JP 30662888A JP H02152756 A JPH02152756 A JP H02152756A
- Authority
- JP
- Japan
- Prior art keywords
- tool
- ultrasonic
- oscillation
- output
- oscillation frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims abstract description 47
- 238000001514 detection method Methods 0.000 claims description 19
- 238000012544 monitoring process Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005553 drilling Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
- B23Q17/2233—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the tool relative to the workpiece
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は工具に超音波振動を加えて研削加工を行う超音
波加工機に関し、その工具が工作物に接触したことを検
出する装置に関する。DETAILED DESCRIPTION OF THE INVENTION "Industrial Application Field" The present invention relates to an ultrasonic processing machine that performs grinding by applying ultrasonic vibration to a tool, and to a device that detects when the tool comes into contact with a workpiece.
「従来の技術」
研削加工で高精度の加工を行うためには工具寸法を正確
に把握する必要がある。しかし、研削工具は摩耗により
加工ごとに工具寸法が変化するため、その測定は面倒で
ある。そこで、工作物への接触を直接検出する鋭敏な工
具接触検出装置が望まれる。``Conventional technology'' In order to perform high-precision grinding, it is necessary to accurately grasp the tool dimensions. However, since the dimensions of the grinding tool change with each machining process due to wear, it is troublesome to measure it. Therefore, a sensitive tool contact detection device that directly detects contact with a workpiece is desired.
従来のこの種の装置には、研削工具が工作物に接触した
ことにより生ずる駆動用モータの電流変化を電流変成器
（ＣＴ）により検出するもの、工具が工作物に接触した
ときに発生する振動波を超音波振動検出器（ＡＥセンサ
）又は歪ゲージ等により検出するものなどがある。Conventional devices of this type include those that use a current transformer (CT) to detect current changes in the drive motor that occur when the grinding tool contacts the workpiece, and those that detect vibrations that occur when the tool contacts the workpiece. There are devices that detect waves using an ultrasonic vibration detector (AE sensor) or a strain gauge.
「発明が解決しようとする課題」
しかしながら、前者の装置は接触検出が鋭敏でなく、工
具の位置決めに用いるには感度が不足するという問題点
があった。また、後者の装置は工作物又は工作物取付台
に特別の検出器を取付けなければならず、取扱いが面倒
であるという問題点があった。``Problem to be Solved by the Invention'' However, the former device has a problem in that contact detection is not sensitive and the sensitivity is insufficient for use in positioning a tool. In addition, the latter device requires a special detector to be attached to the workpiece or workpiece mount, making it difficult to handle.
本発明は、上記の問題点に鑑みなされたものであり、そ
の目的とするところは、超音波加工機において工作物に
特別の検出器を取付けることなく、鋭敏に工具接触を検
出できる装置を提供することにある。The present invention was made in view of the above-mentioned problems, and its purpose is to provide a device that can acutely detect tool contact in an ultrasonic processing machine without installing a special detector on the workpiece. It's about doing.
「課題を解決するための手段」
上記の目的を達成するため、実施例図面である第１図に
示す様に、本発明では、一端に工具２７を有し該工具２
７に超音波を付与するための超音波振動子２５を備えた
超音波加工機において、超音波振動子２５を励振する超
音波発振器２２の発振周波数又は発振出力を検出する出
力検出手段１と、その出力検出手段１で検出された発振
周波数又は発振出力の変化量が所定しきい値を超えたこ
とを判別する変化量判別手段２とを備え、その変化量判
別手段□の出力により工具の工作物への接触を検出する
ようにした超音波加工機の工具接触検出装置、３が提供
される。"Means for Solving the Problem" In order to achieve the above object, as shown in FIG. 1, which is an embodiment drawing, the present invention has a tool 27 at one end.
In an ultrasonic processing machine equipped with an ultrasonic vibrator 25 for applying an ultrasonic wave to an ultrasonic transducer 7, an output detection means 1 detects the oscillation frequency or oscillation output of an ultrasonic oscillator 22 that excites the ultrasonic vibrator 25; change amount determination means 2 for determining whether the amount of change in the oscillation frequency or oscillation output detected by the output detection means 1 exceeds a predetermined threshold; A tool contact detection device 3 for an ultrasonic processing machine is provided that detects contact with an object.
「作用」
本発明は、超音波振動子２５により加振される工具２７
が工作物Ｗに接触すると、超音波振動子２５を励振する
超音波発振器２２の発振周波数ｆ及び発振出力Ｗが変化
するという知見に基づいている。第３図は種々の材質か
らなる工作物について加工抵抗（ｆｕｒ）と発振周波数
（ＫＨｚ）の変化量との関係を測定したグラフ図である
。材質にかかわらず加工抵抗の増加に伴い発振周波数ｆ
が高くなることが示されている。また、第４図は加工抵
抗（ｋ［Ｆ）と発振出力（Ｗａｔｔ）の変化量との関係
を実測したグラフ図である。工作物の材質にかかわらず
加工抵抗の増加に伴い発振出力Ｗが増加することが示さ
れている。従って、超音波振動する工具２７が工作物Ｗ
に接触し負荷すなわち加工抵抗が加われば発振器２２の
発振周波数では上昇し、発振出力Ｗは増加する。"Operation" The present invention provides a tool 27 that is excited by an ultrasonic vibrator 25.
This is based on the knowledge that when the ultrasonic oscillator 22 contacts the workpiece W, the oscillation frequency f and the oscillation output W of the ultrasonic oscillator 22 that excites the ultrasonic vibrator 25 change. FIG. 3 is a graph showing the relationship between machining resistance (fur) and variation in oscillation frequency (KHz) for workpieces made of various materials. Regardless of the material, the oscillation frequency f increases as the machining resistance increases.
has been shown to increase. Further, FIG. 4 is a graph showing the relationship between the machining resistance (k[F) and the amount of change in the oscillation output (Watt). It has been shown that the oscillation output W increases as the machining resistance increases, regardless of the material of the workpiece. Therefore, the ultrasonically vibrating tool 27
When the oscillator 22 comes in contact with a load, that is, machining resistance, the oscillation frequency of the oscillator 22 increases, and the oscillation output W increases.
上記の知見に基づき、前記本発明の工具接触検出装置で
は、超音波発振器の発振周波数ｆ又は発振出力Ｗがモニ
タリングされ、その変化量が所定しきい値を超えたこと
により工具２７の工作物Ｗへの接触が検出される。Based on the above findings, in the tool contact detection device of the present invention, the oscillation frequency f or oscillation output W of the ultrasonic oscillator is monitored, and when the amount of change exceeds a predetermined threshold, the workpiece W of the tool 27 is detected. contact is detected.
「実施例」 本発明の実施例について図面を讐照し説明する。"Example" Embodiments of the present invention will be described with reference to the drawings.
第２図は超音波加工機の正面図であり、主軸台を一部破
断して示している。FIG. 2 is a front view of the ultrasonic processing machine, with the headstock partially cut away.
ベツド１０上には工作物Ｗがｎ置される加工テーブル１
１が水平面内で移動可能に設けられている。ベツド１０
上の加工テーブル１１ｆ＆方にはコラム１２が直立して
設けられ、コラム１２上に主軸台１３が昇降可能に設け
られている。主軸台１３には、筒形状をした主軸１５が
軸受１６，１７により回転自在に支承され、カップリン
グ１８により主軸モータ１９の出力軸に連結されている
。A processing table 1 on which a workpiece W is placed on a bed 10
1 is provided movably within a horizontal plane. bed 10
A column 12 is provided upright on the upper processing table 11f, and a headstock 13 is provided on the column 12 so as to be movable up and down. A cylindrical main shaft 15 is rotatably supported on the head stock 13 by bearings 16 and 17, and is connected to an output shaft of a main shaft motor 19 by a coupling 18.
主軸１５の上方には２つのスリップリング２０が設けら
れ、ブラシ２１を経由して超音波発振器２２からの電圧
を主軸１５内の超音波振動子２５に印加できるようにさ
れている。筒形状をした主軸１５の内部には、超音波振
動子２５が結合された超音波ホーン２６が組み込まれ、
主軸１５と一体に回転する。超音波ホーン２６の先端に
は研削加工を行う工具２７が取付けられる。また、主軸
台１３の下面には加工液供給アダプタ２８が取付けられ
、加工液供給装置２ｃ）からの加工液を工具２７内に供
給できるようにされている。Two slip rings 20 are provided above the main shaft 15 so that voltage from an ultrasonic oscillator 22 can be applied to the ultrasonic vibrator 25 in the main shaft 15 via a brush 21. An ultrasonic horn 26 to which an ultrasonic vibrator 25 is coupled is installed inside the cylindrical main shaft 15.
It rotates together with the main shaft 15. A tool 27 for grinding is attached to the tip of the ultrasonic horn 26. Further, a machining fluid supply adapter 28 is attached to the lower surface of the headstock 13 so that machining fluid from the machining fluid supply device 2c) can be supplied into the tool 27.
加工テーブル１１及び主軸台１３は図示しない送りモー
タにより移動されＮＣ装置によりその送りを制御される
。The processing table 11 and the headstock 13 are moved by a feed motor (not shown), and their feed is controlled by an NC device.
第１図は工具接触検出装置を示す構成図である。FIG. 1 is a configuration diagram showing a tool contact detection device.
略軸形状をした超音波ホーン２６は、上下に２つの支持
フランジ部３３．３４を有し、上端に；歪素子からなる
超音波振動子２５が固定されている。また、下端には工
具２７が取付けられ着脱可能である。超音波ホーン２６
の下端付近は超音波振動を増幅するため縮径されている
。そして、上記支持フランジ部３３．３４は、超音波ホ
ーン２６に工具２７を取付は超音波振動子２５で励振し
た際の軸方向の振動振幅の最も小さい節（ノード〉とな
る上下２つの位置にそれぞれ形成されている。上方に形
成された上支持フランジ部３３の周面は円筒面に形成さ
れ、下方に形成された下支持フランジ部３４の周面はテ
ーパ形状に形成されている。The substantially axially shaped ultrasonic horn 26 has two upper and lower support flange parts 33 and 34, and an ultrasonic vibrator 25 made of a strain element is fixed to the upper end. Further, a tool 27 is attached to the lower end and is detachable. Ultrasonic horn 26
The diameter is reduced near the lower end to amplify ultrasonic vibrations. The support flange portions 33 and 34 are attached to the ultrasonic horn 26 at two upper and lower positions where the vibration amplitude in the axial direction is the smallest when excited by the ultrasonic vibrator 25. The circumferential surface of the upper support flange portion 33 formed on the upper side is formed into a cylindrical surface, and the circumferential surface of the lower support flange portion 34 formed on the lower side is formed in a tapered shape.
超音波振動子２５が結合された超音波ホーン２６は、そ
の上支持フランジ部３３の円筒面が主軸１５の内径面３
１に摺接し、下支持フランジ部３４のテーバ面がテーバ
孔面３２に摺接嵌合するように主軸１５の内径部に組み
込まれる。そして、下支持フランジ部３４の端面が原板
形状をしたフランジ押え板３５により調性リング３６を
介して上方に押し込まれて固定される。フランジ押え板
３５はボルト３７．３８により主軸１５端面に締着され
る。The ultrasonic horn 26 to which the ultrasonic vibrator 25 is coupled has the cylindrical surface of the support flange portion 33 aligned with the inner diameter surface 3 of the main shaft 15.
1 , and the lower support flange portion 34 is incorporated into the inner diameter portion of the main shaft 15 so that the tapered surface of the lower support flange portion 34 is slidably fitted into the tapered hole surface 32 . Then, the end face of the lower support flange portion 34 is pushed upward by a flange presser plate 35 in the shape of an original plate through a tuning ring 36 and fixed. The flange holding plate 35 is fastened to the end surface of the main shaft 15 with bolts 37 and 38.
超音波振動子２５を励振する超音波発振器２２には工具
接触信号装Ｒ３が接続されている。工具接触検出装置３
は出力検出手段１と変化量判別手段２を備える。出力検
出手段１は超音波発振器２２の発振周波数ｆ、又は、電
圧Ｖ電流Ｉから発振出力Ｗを検出する手段であり、変化
量判別手段２は発振周波数ｆ又は発振出力Ｗの変化量が
所定しきい値を超えたことを判別する手段である。A tool contact signal device R3 is connected to the ultrasonic oscillator 22 that excites the ultrasonic vibrator 25. Tool contact detection device 3
comprises an output detecting means 1 and a change amount determining means 2. The output detection means 1 is a means for detecting the oscillation frequency f of the ultrasonic oscillator 22 or the oscillation output W from the voltage V and the current I, and the variation determination means 2 detects the oscillation frequency f or the oscillation output W from the voltage V and the current I. This is a means of determining that the threshold has been exceeded.
第５図は工具接触検出装置３の具体的構成を示すブロッ
ク図である。工具接触検出装置３はＣＰＵ４１．−メモ
リ（ＲＯＭ／ＲＡＭ）４２．インタフェース（Ｉｌｏ＞
４３等からなるマイクロコンピュータと周波数電圧変換
器（Ｆ／Ｖ変換器）４４及びＡ／Ｄ変換器４５を備える
。超音波発振器２２の発振周波数ｆはＦ／Ｖ変換器４４
及びＡ／Ｄ変換器４５を用いて、発振出力ＷはＡ／Ｄ変
換器４５を用いてそれぞれ測定されＣＰＵ４’ｌに読込
まれる。また、ｌ１０４３を介して超音波加工機本体の
送りモータ４７，４８．４９を制御するＮＣ装置４６が
接続され、ＮＣ装置４６との間で信号の授受を行う。FIG. 5 is a block diagram showing a specific configuration of the tool contact detection device 3. As shown in FIG. The tool contact detection device 3 is operated by the CPU 41. -Memory (ROM/RAM) 42. Interface (Ilo>
43, a frequency-voltage converter (F/V converter) 44, and an A/D converter 45. The oscillation frequency f of the ultrasonic oscillator 22 is determined by the F/V converter 44.
The oscillation output W is measured using the A/D converter 45 and the A/D converter 45, and is read into the CPU 4'l. Further, an NC device 46 that controls the feed motors 47, 48, and 49 of the ultrasonic processing machine main body is connected via l1043, and signals are exchanged with the NC device 46.
第６図はＣＰＵでの処理を示すフローチャートである。FIG. 6 is a flowchart showing processing by the CPU.
処理１００が開始されると、まず、非接触状態での発振
周波数ｆ０又は発振出力Ｗ、の読取りを行いメモリ（Ｒ
ＡＭ）４２に一旦記憶する（ステップ１０１）、次いで
、ＮＣ装Ｗ４６に指令を与え、送りモータ４７〜４９に
よる送りを開始する（ステップ１０２）、送りを開始す
ると共に、発振周波数ｆ、又は発振出力Ｗ１を逐次読取
り、初期状態からの変化量Δｆ ＝ ｆ ＋ ｆ ｏ
、６ｗ ＝ ｗ 、 −ｗｏを算出する（ステップ１
０３，１０４）、ステップ１０５では、その変化量Δｆ
、ΔＷが所定のしきい値Ａ、Ｂを超えたか否かを判別す
る。しきい値を超えていなければ工具２７は未だアプロ
ーチ中であるのでステップ１０３に戻り上記の処理。When the process 100 is started, first, the oscillation frequency f0 or the oscillation output W in a non-contact state is read and stored in the memory (R
AM) 42 (step 101), and then gives a command to the NC unit W46 to start feeding by the feed motors 47 to 49 (step 102).At the same time as starting feeding, the oscillation frequency f or oscillation output Read W1 sequentially, change amount from the initial state Δf = f + f o
, 6w = w, -wo (step 1
03, 104), and in step 105, the amount of change Δf
, ΔW exceed predetermined thresholds A and B. If the threshold value has not been exceeded, the tool 27 is still approaching, so the process returns to step 103 and the above processing is performed.
を繰り返す、しきい値を超えたことが判別されると、直
ちにその時点の機械位置座標をＮＣ装置４６から読取る
と共に、送りモータ４７〜４９を止め送りを停止する（
ステップ１０６，１０７＞。When it is determined that the threshold value has been exceeded, the machine position coordinates at that point are immediately read from the NC device 46, and the feed motors 47 to 49 are stopped to stop feeding (
Steps 106, 107>.
読取られた機械位置が工具２７が工作物Ｗに接触した位
置である。Ｆ／Ｖ変換器４４．Ａ／ＤｙＲ損器４５及び
ステップ１０１．１０３の処理は出力検出手段１を構成
し、ステップ１０４，１０５の処理は変化量判別手段２
を構成する。The read machine position is the position where the tool 27 contacts the workpiece W. F/V converter 44. The A/DyR loss unit 45 and the processing in steps 101 and 103 constitute the output detection means 1, and the processing in steps 104 and 105 constitute the change amount determination means 2.
Configure.
前記実施例では、発振周波数ｆの変化量Δｆと発振出力
Ｗの変化量ΔＷの両者を用いたが、発振周波数ｆの変化
が比較的鋭敏であり、発振周波数ｆの検出のみで十分工
具２７の接触を検出できる。In the above embodiment, both the amount of change Δf in the oscillation frequency f and the amount of change ΔW in the oscillation output W are used, but since the change in the oscillation frequency f is relatively sharp, detection of the oscillation frequency f alone is sufficient to detect the change in the tool 27. Contact can be detected.
また、前記実施例では発振周波数ｆ等の変化量Δｆを送
りを開始する前の初期状態の値ｆ０との差Δｆ＝ｆ、−
ｆ、により評価したが、所定サンプリング周期毎に常時
発振周波数を読み込み、前回読込まれた発振周波数ｆ、
−２と今回読込んだ発振周波数ｆ、との差Δｆ＝ｆ、−
ｆ、、により評価し、工具接触信号をＮＣ＠置装６に出
力するようにしてもよい。Further, in the above embodiment, the difference Δf between the amount of change Δf in the oscillation frequency f, etc. and the value f0 in the initial state before the start of sending is Δf=f, -
f, but the oscillation frequency is constantly read at every predetermined sampling period, and the oscillation frequency f, which was read last time, is evaluated.
-2 and the oscillation frequency f read this time, Δf=f, -
The tool contact signal may be output to the NC@device 6 after evaluation is performed using f.
さらに、工具接触検出により工作物Ｗの位置を正確に検
出することができるから、たとえば穴明は加工において
、工具接触を検出した時点がらの経過時間及び工具送り
速度から加工長さを測定し、穴明は加工の加工の深さを
制御することも可能である。Furthermore, since the position of the workpiece W can be accurately detected by tool contact detection, for example, in drilling, the machining length can be measured from the elapsed time and tool feed rate from the time when tool contact is detected, It is also possible to control the depth of drilling.
「発明の効果」
本発明は、以上説明したように構成され超音波発振器の
発振周波数又は発振出力の変化により工具の工作物への
接触を検出するものであるから、工作物に特別の検出器
を取付けることなく工具接触を鋭敏に検出できるという
優れた効果がある。"Effects of the Invention" Since the present invention is configured as described above and detects the contact of a tool with a workpiece by a change in the oscillation frequency or oscillation output of an ultrasonic oscillator, a special detector is installed on the workpiece. This has the excellent effect of allowing tool contact to be detected sensitively without the need for mounting.
図面は本発明の実施例を示し、第１図は工具接触検出装
置の構成を示す図、第２図は超音波加工機の正面図、第
３図及び第４図は発振周波数及び発振出力の変化を実測
したグラフ図、第５図は、工具接触検出装置のブロック
図、第６図はＣＰＵでの処理を示すフローチャートであ
る。
１００．出力検出手段、 ２００．変化及判別手段、３
１１．工具接触検出装置、 ２２．、、超音波発振器、
２５ 、、、超音波振動子、 ２６ 、、、超音波ホー
ン、２７、、、工具、 Ｗｌｌ、工作物。
○
加工抵抗（ｋｇ）
Ｑ
加工抵抗（ｋｇ）The drawings show an embodiment of the present invention, with Fig. 1 showing the configuration of a tool contact detection device, Fig. 2 a front view of the ultrasonic processing machine, and Figs. 3 and 4 showing the oscillation frequency and oscillation output. A graph showing the actual measurement of changes, FIG. 5 is a block diagram of the tool contact detection device, and FIG. 6 is a flowchart showing processing by the CPU. 100. Output detection means, 200. Change and discrimination means, 3
11. Tool contact detection device, 22. ,,ultrasonic oscillator,
25., Ultrasonic vibrator, 26., Ultrasonic horn, 27., Tool, Wll, Workpiece. ○ Machining resistance (kg) Q Machining resistance (kg)
Claims (1)
波振動子を備えた超音波加工機において、超音波振動子
を励振する超音波発振器の発振周波数又は発振出力を検
出する出力検出手段と、その出力検出手段で検出された
発振周波数又は発振出力の変化量が所定しきい値を超え
たことを判別する変化量判別手段とを備え、 その変化量判別手段の出力により工具の工作物への接触
を検出するようにした超音波加工機の工具接触検出装置
。[Claims] In an ultrasonic processing machine that has a tool at one end and is equipped with an ultrasonic vibrator for applying ultrasonic waves to the tool, the oscillation frequency or oscillation of an ultrasonic oscillator that excites the ultrasonic vibrator The change amount determining means includes an output detecting means for detecting the output, and a change amount determining means for determining whether the amount of change in the oscillation frequency or the oscillation output detected by the output detecting means exceeds a predetermined threshold. A tool contact detection device for an ultrasonic processing machine that detects the contact of a tool with a workpiece by the output of
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63306628A JPH02152756A (en) | 1988-12-02 | 1988-12-02 | Detecting device for tool contact of ultrasonic machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63306628A JPH02152756A (en) | 1988-12-02 | 1988-12-02 | Detecting device for tool contact of ultrasonic machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02152756A true JPH02152756A (en) | 1990-06-12 |
Family
ID=17959378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63306628A Pending JPH02152756A (en) | 1988-12-02 | 1988-12-02 | Detecting device for tool contact of ultrasonic machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02152756A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010207971A (en) * | 2009-03-11 | 2010-09-24 | Masahiko Jin | Contact detection method, spindle device system, spindle device, and machine tool system |
| JP2017087363A (en) * | 2015-11-12 | 2017-05-25 | 株式会社ソノテック | Ultrasonic polishing device and ultrasonic polishing method |
| CN111032258A (en) * | 2017-08-29 | 2020-04-17 | 国立大学法人名古屋大学 | Vibration cutting device and contact detection program |
| WO2021246126A1 (en) * | 2020-06-01 | 2021-12-09 | 株式会社ソノテック | Ultrasonic processing device |
-
1988
- 1988-12-02 JP JP63306628A patent/JPH02152756A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010207971A (en) * | 2009-03-11 | 2010-09-24 | Masahiko Jin | Contact detection method, spindle device system, spindle device, and machine tool system |
| JP2017087363A (en) * | 2015-11-12 | 2017-05-25 | 株式会社ソノテック | Ultrasonic polishing device and ultrasonic polishing method |
| CN111032258A (en) * | 2017-08-29 | 2020-04-17 | 国立大学法人名古屋大学 | Vibration cutting device and contact detection program |
| JPWO2019044911A1 (en) * | 2017-08-29 | 2020-07-02 | 国立大学法人東海国立大学機構 | Vibration cutting device and contact detection program |
| CN111032258B (en) * | 2017-08-29 | 2022-06-03 | 国立大学法人名古屋大学 | Vibration cutting device and contact detection program |
| WO2021246126A1 (en) * | 2020-06-01 | 2021-12-09 | 株式会社ソノテック | Ultrasonic processing device |
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