JPH02150718A - Moving quantity detector - Google Patents

Moving quantity detector

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Publication number
JPH02150718A
JPH02150718A JP30566288A JP30566288A JPH02150718A JP H02150718 A JPH02150718 A JP H02150718A JP 30566288 A JP30566288 A JP 30566288A JP 30566288 A JP30566288 A JP 30566288A JP H02150718 A JPH02150718 A JP H02150718A
Authority
JP
Japan
Prior art keywords
signal
detection
primary coil
coil
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30566288A
Other languages
Japanese (ja)
Other versions
JPH0774741B2 (en
Inventor
Takashi Takebayashi
竹林 隆
Nobuhiro Fujiwara
伸広 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP63305662A priority Critical patent/JPH0774741B2/en
Publication of JPH02150718A publication Critical patent/JPH02150718A/en
Publication of JPH0774741B2 publication Critical patent/JPH0774741B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To cause the title device to favorably act against a disturbance with a simple constitution by providing a signal detector incorporating plural detection coils and forming a signal indicating the relative moving quantity between a detecting signal generating member and the detector. CONSTITUTION:A detecting signal corresponding to the movement of a moving body is sent from a detecting section 10 as the moving body moves and the moving quantity and moving speed of the moving body are calculated at a signal processing system 15. The detecting section 10 is provided with a detecting signal generating member 24 and signal detector 29 and the detector 29 is formed by inserting the member 24 through a box body 28. When a high-frequency signal S1 is inputted, the member 24 is inserted into a primary coil 30 and detection coils 32 and 34. In the course of the relative movement, an envelope signal section having a phase difference of 90 deg. is formed of the coils 32 and 34. Then the same detecting signal as the signal S1 is led out and sine-wave and cosine-wave signals are extracted from led-out two-wave modulated signals. A moving quantity detecting signal S10 indicating the relative moving quantity between the member 24 and detector 10 is outputted from the sine- and cosine-wave signals. Therefore, this detecting device can favorably act against a disturbance with such simple constitution.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は移動量検出装置に関し、−層詳細には、高周波
信号が供給される励磁用の1次コイルと電磁誘導状態に
配列された二組の検知コイルからなる信号検知器と、前
記1次コイルおよび検知コイル内に配置された検知信号
発生用部材との協働のもとに、前記二組の検知コイルか
ら導出される夫々の信号に基づき、前記検知信号発生用
部材と信号検知器との間の相対移動量、相対速度等を比
較的簡単な構成において検出可能とした移動量検出装置
に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a movement amount detection device. Respective signals derived from the two sets of detection coils under the cooperation of a signal detector consisting of a pair of detection coils and a detection signal generation member disposed within the primary coil and the detection coil. Based on the above, the present invention relates to a movement amount detection device capable of detecting the relative movement amount, relative speed, etc. between the detection signal generating member and the signal detector with a relatively simple configuration.

[発明の背景] 近時、移動体の長さ、速度あるいは回転体の回転速度、
回転角等、所謂、相対移動量を測定する際に、種々の変
位センサが採用された移動量検出装置が多用される。当
該変位センサはその移動に伴い磁束密度または光量等を
変化せしめるように、作用の異なる検知信号発生用機能
部が交互に連設された検知信号発生用部材と、前記の変
化の量を検知して信号を導出する検知素子等を含む。
[Background of the invention] Recently, the length and speed of a moving body or the rotational speed of a rotating body,
When measuring a so-called relative movement amount such as a rotation angle, a movement amount detection device employing various displacement sensors is often used. The displacement sensor includes a detection signal generation member in which detection signal generation functional units having different functions are arranged alternately so as to change the magnetic flux density or light intensity as the displacement sensor moves, and a detection signal generation member that detects the amount of the change. It includes a sensing element etc. that derives a signal.

当該移動量検出装置では、移動体の長さ、あるいは速度
の測定にリニア型変位センサが採用され、また回転体の
回転速度、あるいは回転角の測定にはロークリ型変位セ
ンサが採用されている。例えば、リニア型、且つ前記の
検知信号発生用機能部としての磁気式の変位センサが採
用される検知手段では同一幅のS極性およびN極性の磁
石あるいは磁化部分が交互に配列された前記検知信号発
生部材としての磁気スケールが移動体に固着される。そ
して、前記磁気検知素子から磁気スケールの移動に相応
した信号が導出されると共に、前記導出された信号から
移動体の速度等を算出するように構成されている。
In this movement amount detection device, a linear displacement sensor is used to measure the length or speed of a moving body, and a Rochley displacement sensor is used to measure the rotational speed or rotation angle of a rotating body. For example, in a linear type detection means that employs a magnetic displacement sensor as the detection signal generation function section, the detection signal is generated by alternately arranging S-polarity and N-polarity magnets or magnetized portions of the same width. A magnetic scale as a generating member is fixed to the moving body. A signal corresponding to the movement of the magnetic scale is derived from the magnetic sensing element, and the velocity of the moving object and the like are calculated from the derived signal.

この種の変位センサが採用された移動量検出装置におい
て、例えば、受発光素子が用いられる変位センサにあっ
ては、外部からの強光による悪影響を生じ、また、受発
光素子が塵芥等の付着により経時的な検知能力の低下を
伴う。また、磁石および磁気検知素子が利用される変位
センサにあっては、経時的な磁力の低下を生起する等の
夫々の不都合を有している。
In a movement amount detection device that employs this type of displacement sensor, for example, in a displacement sensor that uses a light receiving and emitting element, strong light from the outside may have an adverse effect, and the receiving and emitting element may be covered with dust, etc. This is accompanied by a decline in detection ability over time. Furthermore, displacement sensors that utilize magnets and magnetic sensing elements have their own disadvantages, such as a decrease in magnetic force over time.

[発明の目的] 本発明は前記の不都合を克服するためになされたもので
あって、同一幅の磁性および非磁性の環状体が交互に配
列された検知信号発生用部材と、高周波信号が入力され
る励磁用の1次コイルと当該1次コイルを挟み、且つ電
磁誘導状態をとる信号導出用の二組の検知コイルとを含
む信号検知器を備え、前記検知信号発生用部材が1次コ
イルと二組の検知コイルに挿通されると共に、その相対
移動において二組の検知コイルから90”位相差包路線
信号部が形成された前記高周波信号(以下、2波の変調
信号という)と同一周波数の検知信号を導出し、導出さ
れた2波の変調信号から正弦波および余弦波信号を抽出
すると共に、当該正弦波および余弦波信号から前記検知
信号発生部材と前記検知器との相対移動量を示す移動量
検知信号を形成せしめるように構成し、これにより比較
的簡単な構成のもとに、相対移動の検知においては接触
部材を有することなく、光、磁界、振動等の外乱に比較
的有利に作用する移動量検出装置を提供することを目的
とする。
[Object of the Invention] The present invention has been made to overcome the above-mentioned disadvantages, and includes a detection signal generating member in which magnetic and non-magnetic annular bodies of the same width are alternately arranged, and a high-frequency signal input. The signal detector includes a primary coil for excitation, and two sets of detection coils sandwiching the primary coil and for deriving signals that take an electromagnetic induction state, and the detection signal generation member is the primary coil. and the same frequency as the high frequency signal (hereinafter referred to as the two-wave modulation signal) which is passed through two sets of detection coils, and a 90" phase difference envelope line signal section is formed from the two sets of detection coils during their relative movement. derive a detection signal, extract a sine wave and a cosine wave signal from the derived two-wave modulation signal, and calculate the relative movement amount between the detection signal generating member and the detector from the sine wave and cosine wave signals. The structure is configured to form a movement amount detection signal that indicates the amount of movement, and thereby, based on a relatively simple structure, there is no need for a contact member in detecting relative movement, and it is relatively advantageous for disturbances such as light, magnetic fields, vibrations, etc. An object of the present invention is to provide a movement amount detection device that acts on the following.

[目的を達成するための手段] 前記の目的を達成するために、本発明は検知信号発生用
部材、一次コイルおよび複数の検知コイルを含む信号検
知器、当該信号検知器に高周波信号を送出する共に導出
される信号から前記検知信号発生用部材と前記信号検知
器との間の相対移動量を検出する信号処理系とからなる
移動量検出装置であって、同一幅の磁性および非磁性の
環状体が外周面に交互に配列された検知信号発生用部材
と、当該検知信号発生用部材に挿通されると共に高周波
信号が供給される少なくとも1以上の励磁用の1次コイ
ルと、当該1次コイルと電磁誘導状態をとり且つ前記検
知信号発生用部材に挿通されると共に前記検知信号発生
用部材との相対移動において正弦波の包路線信号部が生
成される第1の信号を送出するように前記1次コイルの
一方の面の近傍に配設される少なくとも1以上の第1の
検知コイルと、前記′1次コイルと電磁誘導状態をとり
且つ前記検知信号発生用部材に挿通されると共に前記検
知信号発生用部材との相対移動において余弦波の包絡線
信号部が生成される第2の信号を送出するように前記1
次コイルの他方の面の近傍に配設される少なくとも1以
上の第2の検知コイルと、前記励磁用の1次コイルに搬
送波信号を供給せしめる高周波信号発生手段と、前記第
1の信号および第2の信号から抽出した正弦波信号およ
び余弦波信号をもって前記検知信号発生用部材と前記信
号検知器との間の相対移動量を示す検出信号を導出する
移動量検出信号生成手段とを具備することを特徴とする
[Means for Achieving the Object] In order to achieve the above object, the present invention provides a signal detector including a detection signal generating member, a primary coil and a plurality of detection coils, and a signal detector that sends a high frequency signal to the signal detector. A movement amount detection device comprising a signal processing system that detects the relative movement amount between the detection signal generation member and the signal detector from signals derived together, the movement amount detection device comprising magnetic and non-magnetic annular members having the same width. A detection signal generation member whose bodies are arranged alternately on the outer peripheral surface, at least one primary coil for excitation that is inserted through the detection signal generation member and to which a high frequency signal is supplied, and the primary coil. and is in an electromagnetic induction state and is inserted into the detection signal generation member and transmits a first signal in which an envelope signal portion of a sine wave is generated upon relative movement with the detection signal generation member. at least one first detection coil disposed near one surface of the primary coil, which is in an electromagnetic induction state with the primary coil and inserted into the detection signal generating member; Said 1 so as to send out a second signal in which a cosine wave envelope signal portion is generated upon relative movement with the signal generating member.
at least one second detection coil disposed near the other surface of the primary coil; high-frequency signal generating means for supplying a carrier wave signal to the excitation primary coil; movement amount detection signal generation means for deriving a detection signal indicating the relative movement amount between the detection signal generation member and the signal detector using the sine wave signal and cosine wave signal extracted from the signal of step 2. It is characterized by

[実施態様] 次に、本発明に係る移動量検出装置について好適な一実
施態様を掲げ、添付図面を参照しながら以下詳細に説明
する。なお、文中の煩瑣を避けるため、同一の構成体に
は同一の参照符号を付し、また重複した説明は省略する
[Embodiment] Next, a preferred embodiment of the movement amount detection device according to the present invention will be described in detail below with reference to the accompanying drawings. In order to avoid clutter in the text, the same components are given the same reference numerals, and duplicate explanations will be omitted.

第1図に示される当該移動1検出装置は移動体の移動に
伴い、相応した検知信号を送出する検知部10と当該検
知部10から導出された検知信号を基に、移動体の移動
量あるいは移動速度を算出する信号処理系15とで概略
構成されている。
The movement 1 detection device shown in FIG. 1 detects the movement amount of the moving body or It is roughly configured with a signal processing system 15 that calculates the moving speed.

検知部lOは移動体22に取着された検知信号発生用部
材24と、固定装置26に取着されたシールドを兼ねる
金属性の框体28内に前記検知信号発生用部材24が挿
通された信号検知器29を有している。当該信号検知器
29は、図から諒解されるように、高周波信号S、が入
力される励磁用の1次コイル30と、当該1次コイル3
0を挟み、且つ円心線を同一として配置される第1検知
コイル32および第2検知コイル34とを含む。この場
合、1次コイル30、第1検知コイル32、第2検知コ
イル34は夫々にボビン部材30a、32aおよび34
aに輪線が統一した巻き方向をもって、例えば、右巻き
に形成されて装着され、框体28内に図示しない取着部
材を介在して固着されている。そして、第1検知コイル
32および第2検知コイル34からは検知信号発生用部
材24の方向VlあるいはV、の移動において発生せし
められた検知信号S2およびS、が送出され、この検知
信号S2およびS、は信号処理系15に入力される。
The detection unit IO includes a detection signal generation member 24 attached to a moving body 22 and a metal frame 28 attached to a fixed device 26 that also serves as a shield, with the detection signal generation member 24 inserted through it. It has a signal detector 29. As can be understood from the figure, the signal detector 29 includes a primary coil 30 for excitation to which a high frequency signal S is input, and a primary coil 30 for excitation.
It includes a first sensing coil 32 and a second sensing coil 34 that are placed on both sides of 0 and have the same center line. In this case, the primary coil 30, the first sensing coil 32, and the second sensing coil 34 are connected to the bobbin members 30a, 32a, and 34, respectively.
The ring wires are formed in a uniform winding direction, for example, right-handed, and are installed in the frame body 28 through an attachment member (not shown). Then, the first detection coil 32 and the second detection coil 34 send out detection signals S2 and S generated when the detection signal generation member 24 moves in the direction Vl or V. , are input to the signal processing system 15.

ここで信号処理系15を説明する。第2図に信号処理系
15の要部ブロックの構成を示す。
The signal processing system 15 will now be explained. FIG. 2 shows the configuration of main blocks of the signal processing system 15.

当該信号処理系15は、例えば、100KHzの搬送波
の高周波信号S1を発振して前記1次コイル30に印加
する発振手段38を含む。さらに、第1検知コイル32
から導出される検知信号S2が入力される整流回路42
と、当該整流回路42で半波整流された整流信号S4が
供給され、所定の値に増幅した増幅信号S6を送出する
直流増幅器44を備えている。さらに、第2の検知コイ
ル34から導出される検知信号S、が入力される整流回
路46と、当該整流回路46で半波整流された整流信号
S、が供給され所定の値に増幅せしめられた増幅信号S
、を送出する直流増幅器48とを有している。そして、
前記増幅信号S6およびS、が夫々供給される位相分割
回路50とを備える。
The signal processing system 15 includes an oscillation means 38 that oscillates a high frequency signal S1 of a carrier wave of 100 KHz and applies it to the primary coil 30, for example. Furthermore, the first detection coil 32
A rectifier circuit 42 to which the detection signal S2 derived from the
A DC amplifier 44 is provided to which a rectified signal S4 half-wave rectified by the rectifier circuit 42 is supplied, and which sends out an amplified signal S6 amplified to a predetermined value. Further, a rectifier circuit 46 to which the detection signal S derived from the second detection coil 34 is input, and a rectification signal S half-wave rectified by the rectifier circuit 46 are supplied and amplified to a predetermined value. Amplified signal S
, and a DC amplifier 48 that sends out. and,
A phase dividing circuit 50 is provided to which the amplified signals S6 and S are respectively supplied.

ここで前記検知信号発生用部材24を説明する。Here, the detection signal generating member 24 will be explained.

第3図に当該検知信号発生用部材24の一部断面を示す
。この検知信号発生用部材24は、−例として、第3図
Aから諒解されるように、545C(炭素wA)を用い
、その表層部に磁性体部(N、 、N2 、N3 ・N
n)と非磁性体部(P、、P2 、Ps・・・P、、)
が同一幅lをもって交互に配列されている。そして、磁
性体部は345Cの素材部であり、また非磁性体部は次
の手段で形成される。先ず、素材の表層部の非磁性体部
分となる部分の表層部を所定の深さで削除して交互に溝
を形成する。次に、非磁性のクロムメツキを施して前記
の溝を埋めると共に表面を研磨する。このようにして磁
性体部(N+ 、N2、N、 ・N、 )と非磁性体部
(Pt SF3 、P3・・・P、)が交互に形成され
た検知信号発生用部材24が作成される。次の例として
、第3図Bに示される例では、先ず、345Cの丸棒等
の部材の表面に、例えば、コーティングの処理を施し、
さらに磁性体のメツキ、例えば、クロムメツキの積層処
理を施す。さらに、幅βで交互にエッチング処理を施し
て前記メツキの層を除去する。
FIG. 3 shows a partial cross section of the detection signal generating member 24. As shown in FIG. This detection signal generating member 24 is made of 545C (carbon wA) as an example, as can be understood from FIG.
n) and the non-magnetic part (P,, P2, Ps...P,,)
are arranged alternately with the same width l. The magnetic part is made of 345C material, and the non-magnetic part is formed by the following method. First, grooves are formed alternately by removing a portion of the surface layer of the material that will become the non-magnetic material portion to a predetermined depth. Next, non-magnetic chrome plating is applied to fill the grooves and polish the surface. In this way, a detection signal generating member 24 is created in which magnetic parts (N+, N2, N, . . . N, ) and non-magnetic parts (Pt SF3, P3...P,) are alternately formed. . As a next example, in the example shown in FIG. 3B, first, the surface of a member such as a 345C round bar is subjected to a coating process,
Furthermore, a layering process of magnetic material plating, for example, chrome plating is performed. Further, the plating layer is removed by performing an etching process alternately with a width β.

さらに、非磁性のクロムメツキ等を行い前記エツチング
で除去された溝を埋めると共に、最後に表面研磨を行う
。このようにして磁性体部(N、 、N2 、Nl−N
、 )と非磁性体部(P、、P2 、P、・・・P、、
)が交互に形成された検知信号発生用部材24が作成さ
れる。
Furthermore, non-magnetic chrome plating or the like is performed to fill in the grooves removed by the etching, and finally the surface is polished. In this way, the magnetic part (N, , N2, Nl-N
) and the non-magnetic part (P,,P2,P,...P,,
) is formed alternately on the detection signal generating member 24.

次に、第4図を参照して1次コイル30および第1検′
知コイル32、第2検知コイル34と磁性体部(Nl 
−N2 、Ns・・・N、)と非磁性体部(P+ 、P
2、P3・・・P、) との配置関係を説明する。
Next, referring to FIG. 4, the primary coil 30 and the first
The detection coil 32, the second detection coil 34 and the magnetic body part (Nl
-N2, Ns...N,) and non-magnetic parts (P+, P
2, P3...P,) will be explained.

框体2B内の1次コイル30および第1検知コイル32
、第2検知コイル34の幅d(厚さ)は磁性体部および
非磁性体部の幅lと路間−に形成されている。第1検知
コイル32は厚さを部分した場合の中心線aが磁性体部
P2の幅lを部分した中心線aと同一に配置されている
。また、第2検知コイル32はその厚さにおける中心線
すが非磁性体部P、および磁性体部N、の接合線すと路
間−となるべく配置されている。当該第1検知コイル3
2と第2検知コイル340間には1次コイル30が取着
されている。このように配置されることにより、第1検
知コイル32および第2検知コイル34には磁性体部(
Nl 、N2、N、・・・Nh)と対向した場合に最大
値の信号が得られる。また非磁性体部(P+ 、P’2
 、P3・・・P、) と対向した場合に最小値の信号
が導出され、さらに夫々の間に跨がる位置においては相
応した信号が導出される。また第1右よび第2の検知コ
イル32および34から導出される信号には90゛位相
差信号を含んで送出されることになる。
Primary coil 30 and first detection coil 32 in frame 2B
The width d (thickness) of the second sensing coil 34 is formed between the width l of the magnetic material portion and the non-magnetic material portion. The first sensing coil 32 is arranged such that the center line a when the thickness is divided is the same as the center line a when the width l of the magnetic body portion P2 is divided. Further, the second sensing coil 32 is arranged so that its center line in its thickness is as close as possible to the junction line between the non-magnetic portion P and the magnetic portion N. The first detection coil 3
The primary coil 30 is attached between the primary coil 2 and the second sensing coil 340. With this arrangement, the first sensing coil 32 and the second sensing coil 34 have magnetic parts (
The maximum value of the signal is obtained when the signals are opposed to each other (Nl, N2, N, . . . Nh). Also, non-magnetic parts (P+, P'2
, P3...P,), a signal with the minimum value is derived, and a corresponding signal is derived at a position straddling between them. Further, the signals derived from the first right and second detection coils 32 and 34 include a 90° phase difference signal and are sent out.

本発明に係る移動量検出装置は基本的には以上のように
構成されるものであり、次に本実施態様における作用並
びに効果について説明する。
The movement amount detection device according to the present invention is basically configured as described above, and the operation and effects of this embodiment will be explained next.

1次コイル30に発振手段38から、例えば、100に
&の励磁用の高周波信号Slが印加されると第1および
第2検知コイル32および34には電磁誘導により高周
波信号Sl と同一の周波数で誘起された電圧(以下、
誘起電圧という)を生起する。当該誘起電圧は夫々検知
信号S2およびS、として導出されることになる。
When a high frequency signal Sl for excitation of, for example, induced voltage (hereinafter referred to as
(called induced voltage). The induced voltages are derived as detection signals S2 and S, respectively.

このように誘起電圧が第1よび第2検知コイル32およ
び34に生起する状態において、移動体22の方向v1
またはvmへの移動、すなわち、検知信号発生用部材2
4が方向V+またはV、に移動せしめられると、当該検
知信号発生用部材24に形成された磁性体部(N3、N
2、N、・・・N、)と非磁性体a (p、 、 P2
、ps ・P、)とにより透磁率が変化して、第5囚人
に示されるように、高周波信号S1の搬送波に対して、
その移動に伴う変調が、施された検知信号S2およびS
、が導出される二当該検知信号S2およびSsの正弦波
包路線部S□および余弦波包絡線部Ss、lの間は90
°の位相差が形成されている。
In this state where induced voltage is generated in the first and second sensing coils 32 and 34, the direction v1 of the moving body 22 is
or movement to vm, that is, detection signal generation member 2
4 is moved in the direction V+ or V, the magnetic material portions (N3, N
2, N,...N,) and non-magnetic material a (p, , P2
, ps ・P,), and as shown in the fifth prisoner, for the carrier wave of the high frequency signal S1,
Detection signals S2 and S are modulated as they move.
, is derived. The distance between the sine wave envelope part S□ and the cosine wave envelope part Ss, l of the detection signals S2 and Ss is 90
A phase difference of ° is formed.

次に、検知信号S、は整流回路42で整流が行われて、
変調が施された検知信号S、から、第5図Bに示される
ように、正弦波包絡線部S2゜が整流信号S、として抽
出される。当該整流信号S4は、直流増幅器44で所定
の値に増幅され、第5図Cに示されるように、正弦波の
増幅信号S6が導出される。
Next, the detection signal S is rectified by the rectifier circuit 42,
As shown in FIG. 5B, a sine wave envelope portion S2° is extracted from the modulated detection signal S as a rectified signal S. The rectified signal S4 is amplified to a predetermined value by the DC amplifier 44, and a sinusoidal amplified signal S6 is derived as shown in FIG. 5C.

一方、検知信号Ss も同様に整流回路46で整流が施
されて、変調が行われた検知信号S、から、第5図Bに
示されるように、余弦波包絡線部SSMが整流信号S7
として抽出される一当該整流信号S、は直流増幅器4・
8で所定の値に増幅が行われ、第5図Cに示されるよう
に余弦波の増幅信号S、が導出される。
On the other hand, the detection signal Ss is similarly rectified by the rectifier circuit 46, and from the modulated detection signal S, as shown in FIG.
The rectified signal S extracted as
8, amplification is performed to a predetermined value, and a cosine wave amplified signal S is derived as shown in FIG. 5C.

このようにして導出された正弦波および余弦波の増幅信
号S、およびS、は位相分割回路50に夫々供給される
。ここでは正弦波および余弦波の増幅信号S6およびS
、の1周期を等分割し、それに相応したパルス信号に形
成された出力信号S1゜を生成して出力端子54に導出
する。
The sine wave and cosine wave amplified signals S and S derived in this way are supplied to the phase division circuit 50, respectively. Here, sine wave and cosine wave amplified signals S6 and S
, and generates an output signal S1° formed into a pulse signal corresponding to the period, and outputs it to the output terminal 54.

当該出力信号S、。は、例えば、計数器において、その
パルス数を時曲軸上で計数せしめ、検知信号発生用部材
24と検知部10との相対移動堡、すなわち、移動体2
2の方向v1あるいはvlの移動量を算出する。
The output signal S,. For example, in a counter, the number of pulses is counted on the time curve axis, and the relative movement of the detection signal generation member 24 and the detection unit 10, that is, the moving body 2
The amount of movement in the direction v1 or vl of the second direction is calculated.

次に、第6図乃至第8図を用いて信号検出部の変形例を
説明する。
Next, modified examples of the signal detection section will be explained using FIGS. 6 to 8.

当該変形例はいずれも前記検知部10に相当する二組の
検知部が利用される。この目的とするところは、検知信
号S2およびS、の出力レベルの増大にある。
In both of these modified examples, two sets of detection units corresponding to the detection unit 10 are used. The aim is to increase the output level of the sensing signals S2 and S.

第6図にあっては、第1検知部70と第2検知部75で
構成され、シールドを兼ねた框体78内に1次コイル8
0と、当該1次コイル80を挟んで円心線を同一とした
第1および第2検知コイル82および84とを有してい
る。一方、第2検知部75も同様にして1次コイル90
、第1および第2検知コイル92および94を備える。
In FIG. 6, the primary coil 8 is composed of a first detection section 70 and a second detection section 75, and is housed in a frame 78 that also serves as a shield.
0, and first and second sensing coils 82 and 84 having the same circular center line with the primary coil 80 in between. On the other hand, the second detection unit 75 also uses the primary coil 90 in the same manner.
, first and second sensing coils 92 and 94.

ここで検知信号発生用部材24に形成された磁性体部(
Nl 、N2 、N5−N、 )と非磁性体部(P、、
P2、P、・・・P、、)と1次コイル80.90およ
び第1検知コイル82および92、さらに、第2検知コ
イル84および94との配置状態を説明する。
Here, the magnetic material portion (
Nl, N2, N5-N, ) and the non-magnetic part (P,,
P2, P, .

この場合、前記各コイルは同一の幅dで形成されており
、また、この幅dと同一の幅βで磁性体部(N、 、N
2、N3・・・N、)と非磁性体部(P+ 、P2 、
P3・・・P、、)が配列されている。
In this case, each of the coils is formed with the same width d, and the magnetic body portions (N, , N
2, N3...N,) and the non-magnetic part (P+, P2,
P3...P,,) are arranged.

第1検知コイル82は非磁性体部P2の中心線Cを同一
として、また、第2検知コイル84は磁性体部N1 と
夫々の中心線eを同一として配置されている。さらに、
第1検知コイル92の中心線fは非磁性体部P、と磁性
体部N6との接合線と同一に配置されている。第2検知
コイル94の中心線gは磁性体部N、と非磁性体部P、
との接合線と同一に配置されている。このように配置さ
れることにり、先ず、発信手段38より高周波信号S1
が1次コイル80および90に供給されると共に検知信
号発生用部材24がVIあるいはv、、に移動せしめら
れる。これにより、第1および第2検知コイル92およ
び94からは高周波信号S1の搬送波に変調が施された
検知信号が導出される。そして、検知信号は形成される
包絡線部の間が90°の位相差を有した略正弦波および
余弦波信号を含む。但し、第1検知コイル82と第2検
知コイル84の検知信号は逆位相となる。そこで、図示
されるように、予め第2検知コイル84の接続線を逆転
して結線しておくようにする。なお、第1検知コイル9
2と第2検知コイル94も同様である。
The first sensing coil 82 is arranged so that the center line C of the non-magnetic part P2 is the same, and the second sensing coil 84 is arranged so that the center line e of the non-magnetic part P2 is the same as that of the magnetic part N1. moreover,
The center line f of the first sensing coil 92 is arranged on the same line as the joining line between the non-magnetic part P and the magnetic part N6. The center line g of the second sensing coil 94 is a magnetic part N, a non-magnetic part P,
It is located on the same line as the joining line. By being arranged in this way, first, the high frequency signal S1 is transmitted from the transmitting means 38.
is supplied to the primary coils 80 and 90, and the detection signal generating member 24 is moved to VI or v. As a result, the first and second detection coils 92 and 94 derive detection signals in which the carrier wave of the high-frequency signal S1 is modulated. The detection signal includes substantially sine wave and cosine wave signals having a phase difference of 90° between the formed envelope portions. However, the detection signals of the first detection coil 82 and the second detection coil 84 have opposite phases. Therefore, as shown in the figure, the connection wires of the second sensing coil 84 are connected in reverse in advance. Note that the first detection coil 9
The same applies to the second detection coil 2 and the second detection coil 94.

従って、得られる検知信号S2bは第1検知コイル82
と第2検知コイル84の検出信号、すなわち誘起電圧が
同位相をもって重畳加算された信号の値となる。また検
知信号Sobも同様に第1検知コイル92と第2検知コ
イル94の誘起電圧が同位相をもって重畳加算された信
号の値となる。
Therefore, the obtained detection signal S2b is
and the detection signal of the second detection coil 84, that is, the value of the signal obtained by superimposing and adding the induced voltages with the same phase. Similarly, the detection signal Sob has a value obtained by superimposing and adding the induced voltages of the first detection coil 92 and the second detection coil 94 with the same phase.

このように構成されることにより、例えば、遠隔操作が
採用される際に検知信号S2bおよびSSbを比較的遠
隔地に送出する場合、すなわち、伝送損失が比較的大き
い場合に有利に作用する。
This configuration is advantageous, for example, when remote control is employed and the detection signals S2b and SSb are sent to a relatively remote location, that is, when transmission loss is relatively large.

また、第7図においては、第1検知コイル82と第2検
出コイル84が同位相であり、また、第1検知コイル9
2と第2検知コイル94も同位相となる。
Further, in FIG. 7, the first detection coil 82 and the second detection coil 84 are in the same phase, and the first detection coil 9
2 and the second detection coil 94 are also in the same phase.

さらに、第8図の例は1次コイル80a、90aおよび
第1検知コイル80 a 、、90 aがまた第2検知
コイル84a、94aの幅βが前記の第4図、第6図お
よび第7図より大きく形成されており、例えば、その出
力電圧を増大して導出せしめる構成の例である。第7図
、第8図の夫々の作用等は第6図に示される例と基本的
に同様であり、その重複した説明は省略する。
Further, in the example of FIG. 8, the width β of the primary coils 80a, 90a and the first sensing coils 80a, 90a and the second sensing coils 84a, 94a is the same as that of FIGS. 4, 6 and 7. It is formed larger than in the figure, and is an example of a configuration in which the output voltage is increased and derived, for example. The functions and the like in FIGS. 7 and 8 are basically the same as those in the example shown in FIG. 6, and a redundant explanation thereof will be omitted.

[発明の効果コ 以上のように、本発明によれば、同一幅の磁性および非
磁性の環状体が外周面に交互に配列された検知信号発生
用部材と、高周波信号が人力される励磁用の1次コイル
と当該1次コイルを挟み、且つ電磁誘導状態をとる信号
導出用の二組の検知コイルとを含む信号検知器を備え、
前記検知信号発生用部材が1次コイルと二組の検知コイ
ルに挿通されると共に、その相対移動において、二組の
検知コイルから90°位相差の包絡線信号部が形成され
た前記高周波信号と同−周波数の検知信号を導出し、導
出された2波の変調信号から正弦波および余弦波信号を
抽出すると共に、当該正弦波および余弦波信号から前記
検知信号発生部材と前記検知器との相対移動量を示す移
動量検知信号を形成せしめるように構成し、これにより
比較的簡単な構成となり、且つ、移動の検知が接触部材
を必要としないため、部材の磨耗を生起することなく、
また光、磁界、振動等の外乱に比較的有利に作用し、さ
らに経時的な検知能力の低下が有効に阻止出来る効果を
奏する。
[Effects of the Invention] As described above, according to the present invention, there is provided a detection signal generating member in which magnetic and non-magnetic annular bodies of the same width are alternately arranged on the outer peripheral surface, and an excitation member in which a high frequency signal is manually applied. A signal detector including a primary coil and two sets of detection coils sandwiching the primary coil and for deriving signals that take an electromagnetic induction state,
The detection signal generating member is inserted through the primary coil and the two sets of detection coils, and during its relative movement, the high frequency signal is generated from the two sets of detection coils, in which an envelope signal portion with a phase difference of 90° is formed. A detection signal of the same frequency is derived, a sine wave and a cosine wave signal are extracted from the derived two-wave modulation signal, and a relative relationship between the detection signal generating member and the detector is extracted from the sine wave and cosine wave signals. The structure is configured to generate a movement amount detection signal indicating the amount of movement, which results in a relatively simple structure, and since detection of movement does not require a contact member, wear of the member does not occur.
It also has a relatively advantageous effect on disturbances such as light, magnetic fields, and vibrations, and has the effect of effectively preventing deterioration in detection ability over time.

以上、本発明について好適な実施態様を挙げて説明した
が、本発明はこの実施態様に限定されるものではなく、
本発明の要旨を逸脱しない範囲において種々の改良並び
に設計の変更ゆ(可能なことは勿論である。
Although the present invention has been described above with reference to preferred embodiments, the present invention is not limited to these embodiments.
It goes without saying that various improvements and changes in design are possible without departing from the spirit of the invention.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る移動量検出装置の一実施態様を示
す概略斜視図、 第2図は第1図に示される移動量検出装置の信号処理系
の要部を示す回路ブロック図、第3図は第1図に示され
る移動量検出装置の一実施態様における検知信号発生用
部材の構成を示す一部断面図、 第4図は第1図に示される移動量検出装置の一実施態様
における検知部の構成を示す一部断面図、 第5図は第1図に示される移動量検出装置の一実施態様
の信号処理系における処理波形図、第6図は第1図に示
される検知部の変形例の構成を示す断面図、 第7図は第1図に示される検知部の他の変形例の構成を
示す断面図、 第8図は第1図に示される検知部のさらに他の変形例の
構成を示す断面図である。 10・・・検知部       15・・・信号処理系
22・・・移動体 24・・・検知信号発生用部材 26・・・固定装置2
9・・・信号検知器30・・・1次コイル32・・・第
1検知コイル   34・・・第2検知コイルS1・・
・励磁用の高周波信号 S2・・・第1検知コイルからの検知信号S5・・・第
2検知コイルからの検知信号31G・・・出力信号 FIG、5
FIG. 1 is a schematic perspective view showing an embodiment of the movement amount detection device according to the present invention, FIG. 2 is a circuit block diagram showing the main part of the signal processing system of the movement amount detection device shown in FIG. 3 is a partial sectional view showing the configuration of a detection signal generating member in an embodiment of the movement amount detection device shown in FIG. 1, and FIG. 4 is an embodiment of the movement amount detection device shown in FIG. 1. 5 is a processing waveform diagram in a signal processing system of an embodiment of the movement amount detection device shown in FIG. 1, and FIG. FIG. 7 is a cross-sectional view showing the configuration of another modification of the sensing portion shown in FIG. 1; FIG. 8 is a further modification of the sensing portion shown in FIG. 1; It is a sectional view showing the composition of the modification. 10... Detection unit 15... Signal processing system 22... Moving body 24... Detection signal generation member 26... Fixing device 2
9... Signal detector 30... Primary coil 32... First detection coil 34... Second detection coil S1...
- High frequency signal for excitation S2...Detection signal S5 from the first detection coil...Detection signal 31G from the second detection coil...Output signal FIG, 5

Claims (1)

【特許請求の範囲】[Claims] (1)検知信号発生用部材、一次コイルおよび複数の検
知コイルを含む信号検知器、当該信号検知器に高周波信
号を送出する共に導出される信号から前記検知信号発生
用部材と前記信号検知器との間の相対移動量を検出する
信号処理系とからなる移動量検出装置であって、同一幅
の磁性および非磁性の環状体が外周面に交互に配列され
た検知信号発生用部材と、当該検知信号発生用部材に挿
通されると共に高周波信号が供給される少なくとも1以
上の励磁用の1次コイルと、当該1次コイルと電磁誘導
状態をとり且つ前記検知信号発生用部材に挿通されると
共に前記検知信号発生用部材との相対移動において正弦
波の包絡線信号部が生成される第1の信号を送出するよ
うに前記1次コイルの一方の面の近傍に配設される少な
くとも1以上の第1の検知コイルと、前記1次コイルと
電磁誘導状態をとり且つ前記検知信号発生用部材に挿通
されると共に前記検知信号発生用部材との相対移動にお
いて余弦波の包絡線信号部が生成される第2の信号を送
出するように前記1次コイルの他方の面の近傍に配設さ
れる少なくとも1以上の第2の検知コイルと、前記励磁
用の1次コイルに搬送波信号を供給せしめる高周波信号
発生手段と、前記第1の信号および第2の信号から抽出
した正弦波信号および余弦波信号をもって前記検知信号
発生用部材と前記信号検知器との間の相対移動量を示す
検出信号を導出する移動量検出信号生成手段とを具備す
ることを特徴とする移動量検出装置。
(1) A signal detector including a detection signal generation member, a primary coil, and a plurality of detection coils, which transmits a high frequency signal to the signal detector and connects the detection signal generation member and the signal detector from the derived signal. A movement amount detection device consisting of a signal processing system that detects the relative movement amount between at least one primary coil for excitation that is inserted through the detection signal generation member and supplied with a high frequency signal; and at least one primary coil for excitation that is in an electromagnetic induction state with the primary coil and inserted through the detection signal generation member. At least one coil disposed near one surface of the primary coil so as to transmit a first signal in which a sinusoidal envelope signal portion is generated upon relative movement with the detection signal generating member. A cosine envelope signal portion is generated when the first sensing coil is in an electromagnetic induction state with the primary coil, is inserted into the sensing signal generating member, and is moved relative to the sensing signal generating member. at least one or more second detection coils disposed near the other surface of the primary coil so as to send out a second signal, and a high frequency wave that supplies a carrier wave signal to the excitation primary coil. Deriving a detection signal indicating a relative movement amount between the detection signal generation member and the signal detector using a signal generation means and a sine wave signal and a cosine wave signal extracted from the first signal and the second signal. A movement amount detection device comprising a movement amount detection signal generating means.
JP63305662A 1988-12-01 1988-12-01 Moving amount detector Expired - Lifetime JPH0774741B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63305662A JPH0774741B2 (en) 1988-12-01 1988-12-01 Moving amount detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63305662A JPH0774741B2 (en) 1988-12-01 1988-12-01 Moving amount detector

Publications (2)

Publication Number Publication Date
JPH02150718A true JPH02150718A (en) 1990-06-11
JPH0774741B2 JPH0774741B2 (en) 1995-08-09

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Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04174321A (en) * 1990-11-07 1992-06-22 Toyota Motor Corp Detecting apparatus for displacement of moving member

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6365824B2 (en) * 2014-05-27 2018-08-01 村田機械株式会社 Magnetic displacement sensor and displacement detection method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53112160U (en) * 1977-02-15 1978-09-07
JPS5788317A (en) * 1980-11-25 1982-06-02 S G:Kk Rotation angle detecting device
JPS5972119A (en) * 1982-10-19 1984-04-24 Saburo Nakagoori Differential transformer and differential transformer device
JPS60168017A (en) * 1984-02-10 1985-08-31 S G:Kk Linear position detecting device
JPH07269183A (en) * 1994-03-31 1995-10-17 Toto Ltd Latch receiving tool
JP3033162U (en) * 1996-07-03 1997-01-21 有限会社メイコー Double stage aquarium

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53112160U (en) * 1977-02-15 1978-09-07
JPS5788317A (en) * 1980-11-25 1982-06-02 S G:Kk Rotation angle detecting device
JPS5972119A (en) * 1982-10-19 1984-04-24 Saburo Nakagoori Differential transformer and differential transformer device
JPS60168017A (en) * 1984-02-10 1985-08-31 S G:Kk Linear position detecting device
JPH07269183A (en) * 1994-03-31 1995-10-17 Toto Ltd Latch receiving tool
JP3033162U (en) * 1996-07-03 1997-01-21 有限会社メイコー Double stage aquarium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04174321A (en) * 1990-11-07 1992-06-22 Toyota Motor Corp Detecting apparatus for displacement of moving member

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