JPH02150657U - - Google Patents

Info

Publication number
JPH02150657U
JPH02150657U JP5984789U JP5984789U JPH02150657U JP H02150657 U JPH02150657 U JP H02150657U JP 5984789 U JP5984789 U JP 5984789U JP 5984789 U JP5984789 U JP 5984789U JP H02150657 U JPH02150657 U JP H02150657U
Authority
JP
Japan
Prior art keywords
sample holder
electron beam
cylindrical shape
generally cylindrical
beam irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5984789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5984789U priority Critical patent/JPH02150657U/ja
Publication of JPH02150657U publication Critical patent/JPH02150657U/ja
Pending legal-status Critical Current

Links

JP5984789U 1989-05-24 1989-05-24 Pending JPH02150657U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5984789U JPH02150657U (zh) 1989-05-24 1989-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5984789U JPH02150657U (zh) 1989-05-24 1989-05-24

Publications (1)

Publication Number Publication Date
JPH02150657U true JPH02150657U (zh) 1990-12-27

Family

ID=31586705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5984789U Pending JPH02150657U (zh) 1989-05-24 1989-05-24

Country Status (1)

Country Link
JP (1) JPH02150657U (zh)

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