JPH02150471U - - Google Patents

Info

Publication number
JPH02150471U
JPH02150471U JP5775889U JP5775889U JPH02150471U JP H02150471 U JPH02150471 U JP H02150471U JP 5775889 U JP5775889 U JP 5775889U JP 5775889 U JP5775889 U JP 5775889U JP H02150471 U JPH02150471 U JP H02150471U
Authority
JP
Japan
Prior art keywords
manifold
upstream
downstream
mating surface
digital valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5775889U
Other languages
English (en)
Japanese (ja)
Other versions
JP2506121Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989057758U priority Critical patent/JP2506121Y2/ja
Publication of JPH02150471U publication Critical patent/JPH02150471U/ja
Application granted granted Critical
Publication of JP2506121Y2 publication Critical patent/JP2506121Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
JP1989057758U 1989-05-19 1989-05-19 ディジタルバルブ Expired - Lifetime JP2506121Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989057758U JP2506121Y2 (ja) 1989-05-19 1989-05-19 ディジタルバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989057758U JP2506121Y2 (ja) 1989-05-19 1989-05-19 ディジタルバルブ

Publications (2)

Publication Number Publication Date
JPH02150471U true JPH02150471U (en, 2012) 1990-12-26
JP2506121Y2 JP2506121Y2 (ja) 1996-08-07

Family

ID=31582762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989057758U Expired - Lifetime JP2506121Y2 (ja) 1989-05-19 1989-05-19 ディジタルバルブ

Country Status (1)

Country Link
JP (1) JP2506121Y2 (en, 2012)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011226497A (ja) * 2010-04-15 2011-11-10 Tdk Corp 逆流防止弁
WO2012038287A1 (de) * 2010-09-20 2012-03-29 BSH Bosch und Siemens Hausgeräte GmbH Aufbau einer gasventileinheit
JP2012528279A (ja) * 2009-05-29 2012-11-12 メッツォ ペーパー インコーポレイテッド デジタル液圧制御装置
JP2017015167A (ja) * 2015-06-30 2017-01-19 株式会社フジキン ブロックバルブ、ブロックバルブを有する流体制御装置、及びブロックバルブを用いたチャンバの洗浄方法
KR102388872B1 (ko) * 2020-10-26 2022-04-21 한국정밀기계(주) 일체형의 유체 흐름 및 속도 제어 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4986440U (en, 2012) * 1972-11-15 1974-07-26
JPS5045320A (en, 2012) * 1973-08-29 1975-04-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4986440U (en, 2012) * 1972-11-15 1974-07-26
JPS5045320A (en, 2012) * 1973-08-29 1975-04-23

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012528279A (ja) * 2009-05-29 2012-11-12 メッツォ ペーパー インコーポレイテッド デジタル液圧制御装置
JP2011226497A (ja) * 2010-04-15 2011-11-10 Tdk Corp 逆流防止弁
WO2012038287A1 (de) * 2010-09-20 2012-03-29 BSH Bosch und Siemens Hausgeräte GmbH Aufbau einer gasventileinheit
US8881769B2 (en) 2010-09-20 2014-11-11 Bsh Bosch Und Siemens Hausgeraete Gmbh Structure of a gas-valve unit
JP2017015167A (ja) * 2015-06-30 2017-01-19 株式会社フジキン ブロックバルブ、ブロックバルブを有する流体制御装置、及びブロックバルブを用いたチャンバの洗浄方法
KR102388872B1 (ko) * 2020-10-26 2022-04-21 한국정밀기계(주) 일체형의 유체 흐름 및 속도 제어 장치

Also Published As

Publication number Publication date
JP2506121Y2 (ja) 1996-08-07

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