JPH02150185U - - Google Patents

Info

Publication number
JPH02150185U
JPH02150185U JP5719289U JP5719289U JPH02150185U JP H02150185 U JPH02150185 U JP H02150185U JP 5719289 U JP5719289 U JP 5719289U JP 5719289 U JP5719289 U JP 5719289U JP H02150185 U JPH02150185 U JP H02150185U
Authority
JP
Japan
Prior art keywords
article
clamping
clamps
bringing
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5719289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5719289U priority Critical patent/JPH02150185U/ja
Publication of JPH02150185U publication Critical patent/JPH02150185U/ja
Pending legal-status Critical Current

Links

JP5719289U 1989-05-18 1989-05-18 Pending JPH02150185U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5719289U JPH02150185U (OSRAM) 1989-05-18 1989-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5719289U JPH02150185U (OSRAM) 1989-05-18 1989-05-18

Publications (1)

Publication Number Publication Date
JPH02150185U true JPH02150185U (OSRAM) 1990-12-25

Family

ID=31581684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5719289U Pending JPH02150185U (OSRAM) 1989-05-18 1989-05-18

Country Status (1)

Country Link
JP (1) JPH02150185U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020072105A (ja) * 2018-10-29 2020-05-07 キヤノントッキ株式会社 搬送装置、成膜装置、有機ｅｌ素子の製造システム、および有機ｅｌ素子の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020072105A (ja) * 2018-10-29 2020-05-07 キヤノントッキ株式会社 搬送装置、成膜装置、有機ｅｌ素子の製造システム、および有機ｅｌ素子の製造方法

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