JPH02149880U - - Google Patents
Info
- Publication number
- JPH02149880U JPH02149880U JP5948989U JP5948989U JPH02149880U JP H02149880 U JPH02149880 U JP H02149880U JP 5948989 U JP5948989 U JP 5948989U JP 5948989 U JP5948989 U JP 5948989U JP H02149880 U JPH02149880 U JP H02149880U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm body
- elastic member
- piezoelectric element
- piezoelectric
- contact surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5948989U JPH02149880U (US07655688-20100202-C00548.png) | 1989-05-23 | 1989-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5948989U JPH02149880U (US07655688-20100202-C00548.png) | 1989-05-23 | 1989-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02149880U true JPH02149880U (US07655688-20100202-C00548.png) | 1990-12-21 |
Family
ID=31586028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5948989U Pending JPH02149880U (US07655688-20100202-C00548.png) | 1989-05-23 | 1989-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02149880U (US07655688-20100202-C00548.png) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04137284U (ja) * | 1991-06-18 | 1992-12-21 | 株式会社三鈴エリー | 高吐出圧用圧電ポンプ |
| WO2007055136A1 (ja) * | 2005-11-09 | 2007-05-18 | Nitto Kohki Co., Ltd. | ユニモルフ振動板を用いたポンプ |
| JP2008303774A (ja) * | 2007-06-07 | 2008-12-18 | Alps Electric Co Ltd | ダイヤフラムポンプ |
| WO2009072261A1 (ja) * | 2007-12-05 | 2009-06-11 | Star Micronics Co., Ltd. | ポンプ |
| JP5494801B2 (ja) * | 2010-05-21 | 2014-05-21 | 株式会社村田製作所 | 流体ポンプ |
| JP2015064059A (ja) * | 2013-09-25 | 2015-04-09 | 株式会社ジェイテクト | 可変絞り形静圧軸受 |
-
1989
- 1989-05-23 JP JP5948989U patent/JPH02149880U/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04137284U (ja) * | 1991-06-18 | 1992-12-21 | 株式会社三鈴エリー | 高吐出圧用圧電ポンプ |
| WO2007055136A1 (ja) * | 2005-11-09 | 2007-05-18 | Nitto Kohki Co., Ltd. | ユニモルフ振動板を用いたポンプ |
| JP2007132252A (ja) * | 2005-11-09 | 2007-05-31 | Nitto Kohki Co Ltd | ユニモルフ振動板を用いたポンプ |
| JP2008303774A (ja) * | 2007-06-07 | 2008-12-18 | Alps Electric Co Ltd | ダイヤフラムポンプ |
| WO2009072261A1 (ja) * | 2007-12-05 | 2009-06-11 | Star Micronics Co., Ltd. | ポンプ |
| JP5494801B2 (ja) * | 2010-05-21 | 2014-05-21 | 株式会社村田製作所 | 流体ポンプ |
| JP2014098396A (ja) * | 2010-05-21 | 2014-05-29 | Murata Mfg Co Ltd | 流体ポンプ |
| US8747080B2 (en) | 2010-05-21 | 2014-06-10 | Murata Manufacturing Co., Ltd. | Fluid pump |
| JP2015064059A (ja) * | 2013-09-25 | 2015-04-09 | 株式会社ジェイテクト | 可変絞り形静圧軸受 |
