JPH02146838U - - Google Patents

Info

Publication number
JPH02146838U
JPH02146838U JP5333989U JP5333989U JPH02146838U JP H02146838 U JPH02146838 U JP H02146838U JP 5333989 U JP5333989 U JP 5333989U JP 5333989 U JP5333989 U JP 5333989U JP H02146838 U JPH02146838 U JP H02146838U
Authority
JP
Japan
Prior art keywords
wafer
ventilation
suction
hoses
air intake
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5333989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5333989U priority Critical patent/JPH02146838U/ja
Publication of JPH02146838U publication Critical patent/JPH02146838U/ja
Pending legal-status Critical Current

Links

JP5333989U 1989-05-08 1989-05-08 Pending JPH02146838U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5333989U JPH02146838U (enrdf_load_stackoverflow) 1989-05-08 1989-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5333989U JPH02146838U (enrdf_load_stackoverflow) 1989-05-08 1989-05-08

Publications (1)

Publication Number Publication Date
JPH02146838U true JPH02146838U (enrdf_load_stackoverflow) 1990-12-13

Family

ID=31574440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5333989U Pending JPH02146838U (enrdf_load_stackoverflow) 1989-05-08 1989-05-08

Country Status (1)

Country Link
JP (1) JPH02146838U (enrdf_load_stackoverflow)

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