JPH0214662U - - Google Patents
Info
- Publication number
- JPH0214662U JPH0214662U JP9072488U JP9072488U JPH0214662U JP H0214662 U JPH0214662 U JP H0214662U JP 9072488 U JP9072488 U JP 9072488U JP 9072488 U JP9072488 U JP 9072488U JP H0214662 U JPH0214662 U JP H0214662U
- Authority
- JP
- Japan
- Prior art keywords
- electron
- evaporation source
- electron gun
- evaporation
- hit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9072488U JPH0214662U (ro) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9072488U JPH0214662U (ro) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214662U true JPH0214662U (ro) | 1990-01-30 |
Family
ID=31315237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9072488U Pending JPH0214662U (ro) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214662U (ro) |
-
1988
- 1988-07-08 JP JP9072488U patent/JPH0214662U/ja active Pending