JPH02146423U - - Google Patents
Info
- Publication number
- JPH02146423U JPH02146423U JP5620889U JP5620889U JPH02146423U JP H02146423 U JPH02146423 U JP H02146423U JP 5620889 U JP5620889 U JP 5620889U JP 5620889 U JP5620889 U JP 5620889U JP H02146423 U JPH02146423 U JP H02146423U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- susceptor
- flow
- vapor phase
- inner diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5620889U JPH02146423U (de) | 1989-05-16 | 1989-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5620889U JPH02146423U (de) | 1989-05-16 | 1989-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146423U true JPH02146423U (de) | 1990-12-12 |
Family
ID=31579831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5620889U Pending JPH02146423U (de) | 1989-05-16 | 1989-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146423U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003048413A1 (fr) * | 2001-12-03 | 2003-06-12 | Ulvac, Inc. | Melangeur, dispositif et procede de fabrication d'un film mince |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63192228A (ja) * | 1987-02-04 | 1988-08-09 | Mitsubishi Electric Corp | 半導体薄膜形成装置 |
-
1989
- 1989-05-16 JP JP5620889U patent/JPH02146423U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63192228A (ja) * | 1987-02-04 | 1988-08-09 | Mitsubishi Electric Corp | 半導体薄膜形成装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003048413A1 (fr) * | 2001-12-03 | 2003-06-12 | Ulvac, Inc. | Melangeur, dispositif et procede de fabrication d'un film mince |
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