JPH02146366U - - Google Patents

Info

Publication number

JPH02146366U

JPH02146366U JP5580989U JP5580989U JPH02146366U JP H02146366 U JPH02146366 U JP H02146366U JP 5580989 U JP5580989 U JP 5580989U JP 5580989 U JP5580989 U JP 5580989U JP H02146366 U JPH02146366 U JP H02146366U

Authority

JP

Japan

Prior art keywords

sample

cooling

secondary ion

ion mass

vapor deposition

Prior art date

1989-05-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000001816 cooling Methods 0.000 claims description 7
• 238000007740 vapor deposition Methods 0.000 claims description 3
• 239000007788 liquid Substances 0.000 claims description 2
• 239000000523 sample Substances 0.000 claims 5
• 239000012472 biological sample Substances 0.000 claims 1
• 238000010884 ion-beam technique Methods 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 238000001004 secondary ion mass spectrometry Methods 0.000 claims 1
• 239000000126 substance Substances 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
• 238000001704 evaporation Methods 0.000 description 1
• 230000008020 evaporation Effects 0.000 description 1
• 238000000605 extraction Methods 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1