JPH02145696U - - Google Patents
Info
- Publication number
- JPH02145696U JPH02145696U JP5660889U JP5660889U JPH02145696U JP H02145696 U JPH02145696 U JP H02145696U JP 5660889 U JP5660889 U JP 5660889U JP 5660889 U JP5660889 U JP 5660889U JP H02145696 U JPH02145696 U JP H02145696U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- rotation
- turbo
- issuing
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の第１の実施例の構成図、第２
図は本考案の第２の実施例の構成図である。
１……ターボ分子ポンプ、２……振動検出セン
サー、３……センサー表示コントローラー、４…
…ケーブル、５……ターボ回転表示コントローラ
ー、６……回転検出センサー。
Figure 1 is a configuration diagram of the first embodiment of the present invention;
The figure is a configuration diagram of a second embodiment of the present invention. 1...Turbo molecular pump, 2...Vibration detection sensor, 3...Sensor display controller, 4...
...Cable, 5...Turbo rotation display controller, 6...Rotation detection sensor.
Claims (1)
付けられ回転による機械的損傷を検知する振動セ
ンサーと、このセンサーからの信号に基づき警報
を発する手段及びポンプの回転を停止せしめる手
段とを備えたことを特徴とするターボ分子ポンプ
。 A turbo-molecular pump, characterized in that it is equipped with a vibration sensor installed inside the pump to detect mechanical damage due to rotation, and means for issuing an alarm based on a signal from the sensor and means for stopping rotation of the pump. Turbomolecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5660889U JPH02145696U (en) | 1989-05-16 | 1989-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5660889U JPH02145696U (en) | 1989-05-16 | 1989-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02145696U true JPH02145696U (en) | 1990-12-11 |
Family
ID=31580588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5660889U Pending JPH02145696U (en) | 1989-05-16 | 1989-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02145696U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20110028259A (en) * | 2008-07-14 | 2011-03-17 | 에드워즈 가부시키가이샤 | Vacuum pump |
| WO2014192356A1 (en) * | 2013-05-31 | 2014-12-04 | エドワーズ株式会社 | Maintenance prediction device and prediction method therefor |
-
1989
- 1989-05-16 JP JP5660889U patent/JPH02145696U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20110028259A (en) * | 2008-07-14 | 2011-03-17 | 에드워즈 가부시키가이샤 | Vacuum pump |
| JPWO2010007975A1 (en) * | 2008-07-14 | 2012-01-05 | エドワーズ株式会社 | Vacuum pump |
| JP5719592B2 (en) * | 2008-07-14 | 2015-05-20 | エドワーズ株式会社 | Vacuum pump |
| WO2014192356A1 (en) * | 2013-05-31 | 2014-12-04 | エドワーズ株式会社 | Maintenance prediction device and prediction method therefor |