JPH02144710U - - Google Patents

Info

Publication number
JPH02144710U
JPH02144710U JP5405989U JP5405989U JPH02144710U JP H02144710 U JPH02144710 U JP H02144710U JP 5405989 U JP5405989 U JP 5405989U JP 5405989 U JP5405989 U JP 5405989U JP H02144710 U JPH02144710 U JP H02144710U
Authority
JP
Japan
Prior art keywords
surface roughness
attached
measured
contact
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5405989U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5405989U priority Critical patent/JPH02144710U/ja
Publication of JPH02144710U publication Critical patent/JPH02144710U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例を示す斜視図、第
２図は被測定物（製品）の斜視図、第３図は被測
定物の平面図、第４図は測定位置を示した拡大図
、第５図は被測定物のキズ測定部結果の測定値を
示す図、第６図は従来装置の斜視図である。 図中、１０……顕微鏡、１１……フレキシブル
支柱である。なお、各図中同一符号は同一又は相
当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 測定台の上に乗つた調整台に被測定物を乗せ、
    ピツクアツプに取付けられた測定子を測定面に接
    触させ表面粗さを測定する表面粗さ形状測定装置
    において、装置本体にフレキシブル支柱を介して
    顕微鏡を装着したことを特徴とする表面粗さ形状
    測定装置。
JP5405989U 1989-05-11 1989-05-11 Pending JPH02144710U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5405989U JPH02144710U (ja) 1989-05-11 1989-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5405989U JPH02144710U (ja) 1989-05-11 1989-05-11

Publications (1)

Publication Number Publication Date
JPH02144710U true JPH02144710U (ja) 1990-12-07

Family

ID=31575783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5405989U Pending JPH02144710U (ja) 1989-05-11 1989-05-11

Country Status (1)

Country Link
JP (1) JPH02144710U (ja)

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