JPH0214362U - - Google Patents
Info
- Publication number
- JPH0214362U JPH0214362U JP9086688U JP9086688U JPH0214362U JP H0214362 U JPH0214362 U JP H0214362U JP 9086688 U JP9086688 U JP 9086688U JP 9086688 U JP9086688 U JP 9086688U JP H0214362 U JPH0214362 U JP H0214362U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- support part
- outer tube
- inner tube
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9086688U JPH0214362U (sv) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9086688U JPH0214362U (sv) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214362U true JPH0214362U (sv) | 1990-01-29 |
Family
ID=31315375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9086688U Pending JPH0214362U (sv) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214362U (sv) |
-
1988
- 1988-07-08 JP JP9086688U patent/JPH0214362U/ja active Pending