JPH0214360U - - Google Patents
Info
- Publication number
- JPH0214360U JPH0214360U JP9240788U JP9240788U JPH0214360U JP H0214360 U JPH0214360 U JP H0214360U JP 9240788 U JP9240788 U JP 9240788U JP 9240788 U JP9240788 U JP 9240788U JP H0214360 U JPH0214360 U JP H0214360U
- Authority
- JP
- Japan
- Prior art keywords
- fine powder
- target
- inert gas
- exhaust port
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Powder Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の全体を示す正面図、第２図は
回転羽根の一実施例を示す斜視図である。
１……真空チヤンバー、２……パツキンプレー
ト、３……ターゲツト、４……冷却水入口、５…
…冷却水出口、６……粉末試料容器、７……回転
羽根、８……モーター、９……粉末、１０……ヒ
ーター、１１……真空排気口、１２……不活性ガ
ス導入口。
FIG. 1 is a front view showing the entirety of the present invention, and FIG. 2 is a perspective view showing one embodiment of the rotating blade. 1... Vacuum chamber, 2... Packing plate, 3... Target, 4... Cooling water inlet, 5...
... Cooling water outlet, 6 ... Powder sample container, 7 ... Rotating vane, 8 ... Motor, 9 ... Powder, 10 ... Heater, 11 ... Vacuum exhaust port, 12 ... Inert gas inlet.
Claims (1)
備えた真空チヤンバー１内部に、上側にターゲツ
ト３を配置し、下側に脱着可能なモーター８によ
り駆動される回転羽根７と微細粉末を入れる試料
容器６を備え、微細粉末を回転し、流動させなが
らスパツタリング被覆させることを特徴とするス
パツタリング被覆装置。 Inside a vacuum chamber 1 equipped with a vacuum exhaust port 11 and an inert gas inlet 12, a target 3 is arranged on the upper side, and a rotating blade 7 driven by a detachable motor 8 and a sample container containing fine powder are placed on the lower side. 6, a sputtering coating device is characterized in that the fine powder is sputtered and coated while being rotated and fluidized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9240788U JPH0214360U (en) | 1988-07-14 | 1988-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9240788U JPH0214360U (en) | 1988-07-14 | 1988-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214360U true JPH0214360U (en) | 1990-01-29 |
Family
ID=31316843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9240788U Pending JPH0214360U (en) | 1988-07-14 | 1988-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214360U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5054674U (en) * | 1973-09-14 | 1975-05-24 | ||
| JPS50109937U (en) * | 1974-02-15 | 1975-09-08 | ||
| JPS5125176U (en) * | 1974-08-14 | 1976-02-24 | ||
| WO2004059031A1 (en) * | 2002-12-25 | 2004-07-15 | Youtec Co.,Ltd. | Polygonal barrel spattering device, polygonal barrel spattering method, coated particle formed by the device and method, microcapsule, and method of manufacturing the microcapsule |
| JP2005264297A (en) * | 2004-03-22 | 2005-09-29 | Takayuki Abe | Fine particle |
| KR101272844B1 (en) * | 2011-01-31 | 2013-06-11 | 한국기초과학지원연구원 | Device and mothod for SiC coating on graphite pebble |
-
1988
- 1988-07-14 JP JP9240788U patent/JPH0214360U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5054674U (en) * | 1973-09-14 | 1975-05-24 | ||
| JPS50109937U (en) * | 1974-02-15 | 1975-09-08 | ||
| JPS5125176U (en) * | 1974-08-14 | 1976-02-24 | ||
| WO2004059031A1 (en) * | 2002-12-25 | 2004-07-15 | Youtec Co.,Ltd. | Polygonal barrel spattering device, polygonal barrel spattering method, coated particle formed by the device and method, microcapsule, and method of manufacturing the microcapsule |
| JP2005264297A (en) * | 2004-03-22 | 2005-09-29 | Takayuki Abe | Fine particle |
| WO2005090630A1 (en) * | 2004-03-22 | 2005-09-29 | Youtec Co., Ltd | Fine particle |
| KR101272844B1 (en) * | 2011-01-31 | 2013-06-11 | 한국기초과학지원연구원 | Device and mothod for SiC coating on graphite pebble |