JPH02143189U - - Google Patents

Info

Publication number
JPH02143189U
JPH02143189U JP1989050798U JP5079889U JPH02143189U JP H02143189 U JPH02143189 U JP H02143189U JP 1989050798 U JP1989050798 U JP 1989050798U JP 5079889 U JP5079889 U JP 5079889U JP H02143189 U JPH02143189 U JP H02143189U
Authority
JP
Japan
Prior art keywords
piezoelectric vibrators
piezoelectric
main body
opposite
tips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989050798U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989050798U priority Critical patent/JPH02143189U/ja
Publication of JPH02143189U publication Critical patent/JPH02143189U/ja
Pending legal-status Critical Current

Links

JP1989050798U 1989-04-28 1989-04-28 Pending JPH02143189U (US20020051482A1-20020502-M00057.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989050798U JPH02143189U (US20020051482A1-20020502-M00057.png) 1989-04-28 1989-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989050798U JPH02143189U (US20020051482A1-20020502-M00057.png) 1989-04-28 1989-04-28

Publications (1)

Publication Number Publication Date
JPH02143189U true JPH02143189U (US20020051482A1-20020502-M00057.png) 1990-12-05

Family

ID=31569661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989050798U Pending JPH02143189U (US20020051482A1-20020502-M00057.png) 1989-04-28 1989-04-28

Country Status (1)

Country Link
JP (1) JPH02143189U (US20020051482A1-20020502-M00057.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005342846A (ja) * 2004-06-03 2005-12-15 Nisca Corp マイクロマニュピュレータ
WO2023276041A1 (ja) * 2021-06-30 2023-01-05 株式会社Fuji 張り付き解消装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62235747A (ja) * 1986-04-07 1987-10-15 Nec Corp シリコンウエハ用ハンド
JPH0197583A (ja) * 1987-10-09 1989-04-17 Sumio Miyamoto 圧電セラミック把握装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62235747A (ja) * 1986-04-07 1987-10-15 Nec Corp シリコンウエハ用ハンド
JPH0197583A (ja) * 1987-10-09 1989-04-17 Sumio Miyamoto 圧電セラミック把握装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005342846A (ja) * 2004-06-03 2005-12-15 Nisca Corp マイクロマニュピュレータ
WO2023276041A1 (ja) * 2021-06-30 2023-01-05 株式会社Fuji 張り付き解消装置

Similar Documents

Publication Publication Date Title
JPH02143189U (US20020051482A1-20020502-M00057.png)
JPS63131498U (US20020051482A1-20020502-M00057.png)
JPS648979U (US20020051482A1-20020502-M00057.png)
JPH0279196U (US20020051482A1-20020502-M00057.png)
JPH02100335U (US20020051482A1-20020502-M00057.png)
JPS6332786U (US20020051482A1-20020502-M00057.png)
JPS6452313U (US20020051482A1-20020502-M00057.png)
JPS6388311U (US20020051482A1-20020502-M00057.png)
JPH0167768U (US20020051482A1-20020502-M00057.png)
JPH02139490U (US20020051482A1-20020502-M00057.png)
JPS61145900U (US20020051482A1-20020502-M00057.png)
JPH01113068U (US20020051482A1-20020502-M00057.png)
JPH01128133U (US20020051482A1-20020502-M00057.png)
JPH01113497U (US20020051482A1-20020502-M00057.png)
JPH0338187U (US20020051482A1-20020502-M00057.png)
JPS62134036U (US20020051482A1-20020502-M00057.png)
JPS6435767U (US20020051482A1-20020502-M00057.png)
JPS623893U (US20020051482A1-20020502-M00057.png)
JPS61155700U (US20020051482A1-20020502-M00057.png)
JPS61194468U (US20020051482A1-20020502-M00057.png)
JPS6293199U (US20020051482A1-20020502-M00057.png)
JPS6313685U (US20020051482A1-20020502-M00057.png)
JPS63138722U (US20020051482A1-20020502-M00057.png)
JPS6280423U (US20020051482A1-20020502-M00057.png)
JPS62119018U (US20020051482A1-20020502-M00057.png)