JPH02142679U - - Google Patents

Info

Publication number
JPH02142679U
JPH02142679U JP4929689U JP4929689U JPH02142679U JP H02142679 U JPH02142679 U JP H02142679U JP 4929689 U JP4929689 U JP 4929689U JP 4929689 U JP4929689 U JP 4929689U JP H02142679 U JPH02142679 U JP H02142679U
Authority
JP
Japan
Prior art keywords
box
shaped body
separation device
bottom plate
metal separation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4929689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4929689U priority Critical patent/JPH02142679U/ja
Publication of JPH02142679U publication Critical patent/JPH02142679U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Combined Means For Separation Of Solids (AREA)
  • Separating Particles In Gases By Inertia (AREA)
JP4929689U 1989-04-26 1989-04-26 Pending JPH02142679U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4929689U JPH02142679U (enrdf_load_stackoverflow) 1989-04-26 1989-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4929689U JPH02142679U (enrdf_load_stackoverflow) 1989-04-26 1989-04-26

Publications (1)

Publication Number Publication Date
JPH02142679U true JPH02142679U (enrdf_load_stackoverflow) 1990-12-04

Family

ID=31566857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4929689U Pending JPH02142679U (enrdf_load_stackoverflow) 1989-04-26 1989-04-26

Country Status (1)

Country Link
JP (1) JPH02142679U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008212927A (ja) * 2007-03-06 2008-09-18 Psk Inc 排気装置及びこれを含む基板処理装置、そして排気方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008212927A (ja) * 2007-03-06 2008-09-18 Psk Inc 排気装置及びこれを含む基板処理装置、そして排気方法

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