JPH02142679U - - Google Patents
Info
- Publication number
- JPH02142679U JPH02142679U JP4929689U JP4929689U JPH02142679U JP H02142679 U JPH02142679 U JP H02142679U JP 4929689 U JP4929689 U JP 4929689U JP 4929689 U JP4929689 U JP 4929689U JP H02142679 U JPH02142679 U JP H02142679U
- Authority
- JP
- Japan
- Prior art keywords
- box
- shaped body
- separation device
- bottom plate
- metal separation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Combined Means For Separation Of Solids (AREA)
- Separating Particles In Gases By Inertia (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4929689U JPH02142679U (cs) | 1989-04-26 | 1989-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4929689U JPH02142679U (cs) | 1989-04-26 | 1989-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142679U true JPH02142679U (cs) | 1990-12-04 |
Family
ID=31566857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4929689U Pending JPH02142679U (cs) | 1989-04-26 | 1989-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142679U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008212927A (ja) * | 2007-03-06 | 2008-09-18 | Psk Inc | 排気装置及びこれを含む基板処理装置、そして排気方法 |
-
1989
- 1989-04-26 JP JP4929689U patent/JPH02142679U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008212927A (ja) * | 2007-03-06 | 2008-09-18 | Psk Inc | 排気装置及びこれを含む基板処理装置、そして排気方法 |