JPH02142529U - - Google Patents
Info
- Publication number
- JPH02142529U JPH02142529U JP5066389U JP5066389U JPH02142529U JP H02142529 U JPH02142529 U JP H02142529U JP 5066389 U JP5066389 U JP 5066389U JP 5066389 U JP5066389 U JP 5066389U JP H02142529 U JPH02142529 U JP H02142529U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- electrode plates
- measurement unit
- liquid tank
- discrimination section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Weting (AREA)
Description
第１図は本考案に係る薬液自動交換装置の一実
施例を示すブロツク構成図、第２図は第１図の薬
液自動交換装置の測定部を構成するホイートスト
ンブリツジを示す回路図である。
１，２……電極板、３……薬液、４……液槽、
５……測定部、６……ブリツジ回路、７……判別
部、１１，１２……電磁弁。
FIG. 1 is a block diagram showing an embodiment of an automatic chemical exchange device according to the present invention, and FIG. 2 is a circuit diagram showing a Wheatstone bridge that constitutes a measuring section of the automatic chemical exchange device of FIG. 1, 2...electrode plate, 3...chemical solution, 4...liquid tank,
5... Measuring section, 6... Bridge circuit, 7... Discrimination section, 11, 12... Solenoid valve.
Claims (1)
一対の電極板と、 上記両電極板間に接続したブリツジ回路で両電
極板間の抵抗値を測定し、これに基づいて得られ
た比電導度の測定データを出力する測定部と、 上記測定部からの測定データに基づいて薬液濃
度が所定位置に達したか否かを判別して出力信号
を送出する判別部と、 上記液槽と連通する管路に配設され、判別部の
出力に基づいて開閉して薬液を排出或いは供給し
て交換する電磁弁とを具備したことを特徴とする
薬液自動交換装置。[Scope of Claim for Utility Model Registration] A pair of electrode plates immersed in a liquid tank containing a chemical solution and arranged facing each other, and a bridge circuit connected between the two electrode plates to measure the resistance value between the two electrode plates, A measurement unit that outputs specific conductivity measurement data obtained based on this, and a measurement unit that determines whether the concentration of the chemical solution has reached a predetermined position based on the measurement data from the measurement unit and sends an output signal. A chemical solution automatic exchange characterized by comprising: a discrimination section; and a solenoid valve disposed in a conduit communicating with the liquid tank, which opens and closes based on the output of the discrimination section to discharge or supply the chemical solution for exchange. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5066389U JPH02142529U (en) | 1989-04-28 | 1989-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5066389U JPH02142529U (en) | 1989-04-28 | 1989-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142529U true JPH02142529U (en) | 1990-12-04 |
Family
ID=31569404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5066389U Pending JPH02142529U (en) | 1989-04-28 | 1989-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142529U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000208471A (en) * | 1999-01-11 | 2000-07-28 | Kurita Water Ind Ltd | Device for preparing cleaning water for electronic materials |
-
1989
- 1989-04-28 JP JP5066389U patent/JPH02142529U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000208471A (en) * | 1999-01-11 | 2000-07-28 | Kurita Water Ind Ltd | Device for preparing cleaning water for electronic materials |
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