JPH02142526U - - Google Patents
Info
- Publication number
- JPH02142526U JPH02142526U JP5140289U JP5140289U JPH02142526U JP H02142526 U JPH02142526 U JP H02142526U JP 5140289 U JP5140289 U JP 5140289U JP 5140289 U JP5140289 U JP 5140289U JP H02142526 U JPH02142526 U JP H02142526U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- insulator
- contact
- groove portion
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 8
- 239000002826 coolant Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5140289U JPH02142526U (nl) | 1989-04-28 | 1989-04-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5140289U JPH02142526U (nl) | 1989-04-28 | 1989-04-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02142526U true JPH02142526U (nl) | 1990-12-04 |
Family
ID=31570816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5140289U Pending JPH02142526U (nl) | 1989-04-28 | 1989-04-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02142526U (nl) |
-
1989
- 1989-04-28 JP JP5140289U patent/JPH02142526U/ja active Pending