JPH02142470U - - Google Patents

Info

Publication number
JPH02142470U
JPH02142470U JP4978789U JP4978789U JPH02142470U JP H02142470 U JPH02142470 U JP H02142470U JP 4978789 U JP4978789 U JP 4978789U JP 4978789 U JP4978789 U JP 4978789U JP H02142470 U JPH02142470 U JP H02142470U
Authority
JP
Japan
Prior art keywords
disc
shaped storage
storage part
cells
exchange mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4978789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4978789U priority Critical patent/JPH02142470U/ja
Publication of JPH02142470U publication Critical patent/JPH02142470U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4978789U 1989-04-27 1989-04-27 Pending JPH02142470U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4978789U JPH02142470U (en, 2012) 1989-04-27 1989-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4978789U JPH02142470U (en, 2012) 1989-04-27 1989-04-27

Publications (1)

Publication Number Publication Date
JPH02142470U true JPH02142470U (en, 2012) 1990-12-03

Family

ID=31567775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4978789U Pending JPH02142470U (en, 2012) 1989-04-27 1989-04-27

Country Status (1)

Country Link
JP (1) JPH02142470U (en, 2012)

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