JPH02142051A - Life indicating device for mcp - Google Patents

Life indicating device for mcp

Info

Publication number
JPH02142051A
JPH02142051A JP63295617A JP29561788A JPH02142051A JP H02142051 A JPH02142051 A JP H02142051A JP 63295617 A JP63295617 A JP 63295617A JP 29561788 A JP29561788 A JP 29561788A JP H02142051 A JPH02142051 A JP H02142051A
Authority
JP
Japan
Prior art keywords
mcp
output
voltage
current
counter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63295617A
Other languages
Japanese (ja)
Inventor
Sadaaki Kohama
小浜 禎晃
Yutaka Sato
裕 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP63295617A priority Critical patent/JPH02142051A/en
Publication of JPH02142051A publication Critical patent/JPH02142051A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04Electron multipliers
    • H01J43/06Electrode arrangements
    • H01J43/18Electrode arrangements using essentially more than one dynode
    • H01J43/24Dynodes having potential gradient along their surfaces
    • H01J43/246Microchannel plates [MCP]

Landscapes

  • Measurement Of Radiation (AREA)

Abstract

PURPOSE:To make it possible to predict a time when a replacement of an MCP(micro-channel plate) is required by providing an output means for outputting a signal corresponding to an output current integration value of the MCP, and making an indication corresponding to its life based on the output signal. CONSTITUTION:For an MCP 1, a voltage of about 1KV is applied between electrodes 1a, 1b, and a charged particle 1d radiated to a microchannel 1c collides with a wall surface to be multiplied, and outputted from an anode 1e as a current. This output current is inputted to an amplifier which also performs current-voltage conversion, and a voltage outputted from the amplifier 2 is converted by a voltage/frequency converter 4 through a reduction filter 3 to be pulses of a corresponding number, which is counted by a counter 5. Since an output charge integration value of the MCP 1 corresponds to a relative advantage, the count value by the counter 5 is converted to a signal to indicate the relative advantage based on a predetermined expression by a data converter 6 and indicated at an indicator 7. Maintenance for replacement time, etc., can thus be achieved speedily and easily.

Description

【発明の詳細な説明】 〔産業上の利用分野) 本発明は、MCP (マイクロチャンネルプレート)の
寿命表示装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an MCP (microchannel plate) life display device.

〔従来の技術〕[Conventional technology]

映像増強装置や、紫外線や軟X線、又、電子、イオン、
その他の荷電粒子の検出にMCP (マイクロチャンネ
ルプレート)が用いられている。
Image intensifier, ultraviolet rays, soft X-rays, electrons, ions, etc.
MCP (microchannel plate) is used to detect other charged particles.

MCPは電子増倍管の一種で、その構造は、ガラスの薄
い板に十数μmの細かな貫通孔を多数形成し、この貫通
孔に電気量導度をもって物質をコーティングして形成さ
れ(この貫通孔はマイクロチャンネルプレートと呼ばれ
、それぞれ電子増倍器として機能する)、貫通孔の両端
にFe−Cr電橿を蒸着してなる。
MCP is a type of electron multiplier tube, and its structure is formed by forming many fine through holes of tens of micrometers in a thin plate of glass, and coating these through holes with a material that has electrical conductivity. The through holes are called microchannel plates (each of which functions as an electron multiplier), and Fe-Cr electrodes are deposited on both ends of the through holes.

従って、電極に電圧を印加してマイクロチャンネルの軸
方向へ電位勾配を与えておくと、マイクロチャンネルの
一端から入射した電子は、貫通孔の内壁に衝突して多数
の2次電子を放出させ、これら2次電子がさらに内壁に
衝突して2次電子を放出させる過程を数回繰り返して、
これらの電子が貫通孔の他端から出力されるのである。
Therefore, if a voltage is applied to the electrode to create a potential gradient in the axial direction of the microchannel, the electrons incident from one end of the microchannel will collide with the inner wall of the through hole and emit a large number of secondary electrons. These secondary electrons further collide with the inner wall and repeat the process of emitting secondary electrons several times,
These electrons are output from the other end of the through hole.

ところで、このようなMCPは、出力電荷積算値(C/
 c+1 )の増加に応じて相対利得(%)・・・・・
・MCPの初期値を1としたもので、初めは100%で
ある。・・・・・・の減少する特性を有する。すなわち
、例えば出力電荷積算値が10−’C/cdで相対利得
が50%程度になる。
By the way, such an MCP has an output charge integrated value (C/
relative gain (%) according to the increase in c+1)...
- The initial value of MCP is 1, which is 100% at first. It has the characteristic of decreasing... That is, for example, when the output charge integrated value is 10-'C/cd, the relative gain is about 50%.

(発明が解決しようとする課題〕 ところが従来は、MCPの寿命の目安となるものは特に
用意されていないため、必要なときに利得の測定を行な
う等しなければならなかった。比較的高価が、その保管
も真空中等で行なわなければならず簡単ではないMCP
の管理、不必要な手間と費用がかかってしまうという問
題点があった。
(Problem to be Solved by the Invention) However, in the past, there was no particular guide to the lifespan of an MCP, so it was necessary to measure the gain when necessary. , MCP must be stored in a vacuum, etc., which is not easy.
There was a problem in that management required unnecessary effort and cost.

〔課題を解決する為の手段〕[Means to solve problems]

上記課題の解決のために、本発明は、MCP(1)の出
力電流積算値に応じた信号を出力する出力手段(2,3
,4,5,6)と、前記出力手段の出力信号に基づいて
前記MCP (1)の寿命に応じた表示を行なう表示手
段(7)と、を有することを特徴とするMCPの寿命表
示装置である。
In order to solve the above problems, the present invention provides output means (2, 3
, 4, 5, 6), and display means (7) for displaying a display according to the life of the MCP (1) based on the output signal of the output means. It is.

〔作  用〕[For production]

本発明によれば、必要なときに、MCPの寿命を使用者
が瞬時に把握できるので、MCPの交換に必要な時期を
予測することが容易にできる。
According to the present invention, since a user can instantly grasp the lifespan of an MCP when necessary, it is possible to easily predict when it is necessary to replace the MCP.

〔実 施 例〕〔Example〕

第1図は本発明の実施例のブロック図であって、MCP
Iは、電ff1la、lb間にIKV程度の電圧か印加
され、マイクロチャンネルICに入射した荷電粒子1d
は、壁面に衝突して増殖され、アノードleから電流と
して出力される。このようにして得られるMCPIの出
力電流は、電流−電圧変換をも行なう増幅器2に入力さ
れ、アノード1eから出力されるft流に対応した電圧
として出力される。増幅器2から出力された電圧は低周
波成分抽出用の低減フィルタ3に入力され、その平均電
圧が低減フィルタ3から出力される。低減フィルタ3か
ら出力された平均電圧は、電圧/周波数変換器4によっ
て対応する数のパルスに変換される。!圧/周波数変換
器4にて変換されたパルスは、カウンタ5にて計数され
る。
FIG. 1 is a block diagram of an embodiment of the present invention, in which an MCP
I is a charged particle 1d that is incident on the microchannel IC when a voltage of about IKV is applied between the electric currents ff1la and lb.
collides with the wall surface, multiplies, and is output as a current from the anode le. The output current of the MCPI thus obtained is input to an amplifier 2 that also performs current-voltage conversion, and is output as a voltage corresponding to the ft current output from the anode 1e. The voltage output from the amplifier 2 is input to a reduction filter 3 for extracting low frequency components, and the average voltage is output from the reduction filter 3. The average voltage output from the reduction filter 3 is converted by a voltage/frequency converter 4 into a corresponding number of pulses. ! The pulses converted by the pressure/frequency converter 4 are counted by the counter 5.

カウンタ5の計数値は、MCPIから出力される電流の
積算したものに対応するから、カウンタ5の計数値はM
CPIの出力電荷積算値に対応する。そして、MCPI
の出力電荷積算値は相対的利得に対応するから、カウン
タ5の計数値は、データ変換器6にて、あらかじめ定め
た演算式に基づいて相対利得を表す信号に変換される。
Since the count value of counter 5 corresponds to the integrated current output from MCPI, the count value of counter 5 is M
Corresponds to the output charge integrated value of CPI. And M.C.P.I.
Since the output charge integrated value corresponds to the relative gain, the count value of the counter 5 is converted by the data converter 6 into a signal representing the relative gain based on a predetermined arithmetic expression.

データ変換器6の出力は表示部7を駆動し、その結果、
表示器7には相対利得が表示される。使用#は表示器7
の相対利得を見るだけで、MCPIの寿命を瞬時に知る
ことができる。
The output of the data converter 6 drives the display 7, so that
The relative gain is displayed on the display 7. Use # is indicator 7
You can instantly know the lifespan of MCPI just by looking at the relative gain of .

なお、表示器7の表示は、相対利得をそのまま表示する
ことを必ずしも必要としておらず、相対利得に応じた表
示であればよい。すなわち、例えば使い初めを10とし
、寿命がつきるまでを0とし、その間を10等分して1
から9までの数値を割り振り、それらの数値を表示する
ようにしても良い。
Note that the display on the display 7 does not necessarily need to display the relative gain as it is, but may be a display that corresponds to the relative gain. In other words, for example, the first use is set as 10, the period until the end of the life is set as 0, and the period between them is divided into 10 equal parts.
It is also possible to allocate numerical values from 9 to 9 and display those numerical values.

また、表示器7による相対利得に応じた表示は、常時行
なっても良いし、スイッチ等の切替えによって必要なと
きにのみ行なうようにしてもよい。
Moreover, the display according to the relative gain on the display 7 may be performed all the time, or may be performed only when necessary by switching a switch or the like.

さらに、データ変換器6は、MCPIが検出器として使
用されている電子顕微鏡等の本体装置の制御用コンピュ
ータに、その機能部分として設けても良い、この場合に
は、データ変換器6はソフト的にデータ変換作業を行な
うようになる。この場合のデータ変換作業は、あらかじ
めメモリに出力電荷積算値(カウンタ5の計数値)と相
対利得との関係を記憶させておき、カウンタ5の計数値
をメモリの番地指令とすれば、対応する相対利得を得る
ことができる。
Furthermore, the data converter 6 may be installed as a functional part in a computer for controlling a main unit such as an electron microscope in which the MCPI is used as a detector. data conversion work began. In this case, the data conversion work can be done by storing the relationship between the output charge integrated value (counter 5 count value) and relative gain in the memory in advance, and using the count value of counter 5 as the memory address command. relative gains can be obtained.

勿論、単に相対利得を表示するだけでなく、例えば相対
利得が50%を割り込んだときに、そろそろMCPIの
交換の準備をするように警告し、20%割り込むような
場合に、MCPIに交換を促す警報を発するようにして
もよい。
Of course, it not only simply displays the relative gain, but also warns you to prepare for MCPI exchange when the relative gain falls below 50%, and prompts MCPI to exchange when it falls below 20%. An alarm may be issued.

さらにまた、上記説明では相対利得をMCPIの寿命に
応じた値とし、この値を表示することで、MCPIの寿
命に応じた表示としていたが、データ変換器6を省いて
、カウンタ5の計数値(出力電流積算値)をそのままM
CPIの寿命に対応する値として表示しても積わない。
Furthermore, in the above explanation, the relative gain is set as a value according to the lifespan of the MCPI, and by displaying this value, the display is made according to the lifespan of the MCPI. (output current integrated value) as is
Even if it is displayed as a value corresponding to the CPI lifespan, it will not accumulate.

(発明の効果〕 以上の様に本発明によれば、MCP使用者はMCPを使
用しながらこれを本体からはずして利得を計測しなおす
ような煩わしい作業をすることな(、MCPの寿命を知
ることができ、交換時期等のメンテナンスを迅速かつ簡
単に行なえる。
(Effects of the Invention) As described above, according to the present invention, an MCP user does not have to do the troublesome work of removing the MCP from the main body and remeasuring the gain while using the MCP. This allows maintenance such as replacement timing to be performed quickly and easily.

【図面の簡単な説明】[Brief explanation of the drawing]

図は、本発明による装置の実施例を示すブロック図であ
る。
The figure is a block diagram showing an embodiment of the device according to the invention.

Claims (1)

【特許請求の範囲】[Claims] マイクロチャンネルプレートの出力電流積算値に応じた
信号を出力する出力手段と、前記出力手段の出力信号に
基づいて前記マイクロチャンネルプレートの寿命に応じ
た表示を行なう表示手段と、を有することを特徴とする
マイクロチャンネルプレートの寿命表示装置。
It is characterized by having an output means for outputting a signal according to the integrated value of the output current of the microchannel plate, and a display means for performing a display according to the lifespan of the microchannel plate based on the output signal of the output means. A lifespan display device for microchannel plates.
JP63295617A 1988-11-22 1988-11-22 Life indicating device for mcp Pending JPH02142051A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63295617A JPH02142051A (en) 1988-11-22 1988-11-22 Life indicating device for mcp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63295617A JPH02142051A (en) 1988-11-22 1988-11-22 Life indicating device for mcp

Publications (1)

Publication Number Publication Date
JPH02142051A true JPH02142051A (en) 1990-05-31

Family

ID=17822950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63295617A Pending JPH02142051A (en) 1988-11-22 1988-11-22 Life indicating device for mcp

Country Status (1)

Country Link
JP (1) JPH02142051A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007245466A (en) * 2006-03-15 2007-09-27 Toshiba Tec Corp Portable printer
JP2008140723A (en) * 2006-12-05 2008-06-19 Horiba Ltd Analyzer
JP2008162091A (en) * 2006-12-27 2008-07-17 Toshiba Tec Corp Printer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007245466A (en) * 2006-03-15 2007-09-27 Toshiba Tec Corp Portable printer
JP2008140723A (en) * 2006-12-05 2008-06-19 Horiba Ltd Analyzer
JP2008162091A (en) * 2006-12-27 2008-07-17 Toshiba Tec Corp Printer

Similar Documents

Publication Publication Date Title
Bouclier et al. The gas electron multiplier (GEM)
Bellazzini et al. The WELL detector
US2408230A (en) Measuring apparatus
US9529099B2 (en) Microcavity plasma panel radiation detector
US2340967A (en) Electron discharge device
Bellazzini et al. What is the real gas gain of a standard GEM?
JP2005019635A (en) Time-resolved measurement apparatus, and position detecting electron multiplier tube
US4034283A (en) Compensated voltage divider
JPH02142051A (en) Life indicating device for mcp
US2375280A (en) Manometer circuits
US2899582A (en) Geiger-muller detector
US2917647A (en) Geiger-muller type counter tube
US2590925A (en) Proportional counter
US2657315A (en) High-energy radiation counter
Farahmand et al. Gas electron multiplier (GEM) operation with tissue-equivalent gases at various pressures
Altwegg et al. Modified Millikan capacitor for photoemission studies
US2485516A (en) Shallow plane proportional counter
US3230372A (en) Nuclear radiation detector with control grid
US2442314A (en) Geiger counter improvement
Tarle et al. Relative Abundances of Positive and Negative Muons in the Atmosphere
Hull Electronic Devices as Aids to Research
Mir et al. Further studies on the gain properties of a Gas Electron Multiplier with a Micro-Induction Gap Amplifying Structure (GEM-MIGAS) aimed at low-energy X-ray detection
US1884464A (en) Light-sensitive device
JP3300775B2 (en) Field emission vacuum gauge with constant current operation
Smith et al. A study of microchannel plate intensifiers