JPH02141640A - Light guide measuring apparatus - Google Patents

Abstract

PURPOSE:To make it possible to evaluate the characteristics of a light guide simply and quickly by providing a prism pushing means for facing and pushing prisms on a specimen which is arranged between a specimen holding stage and the first and second prisms. CONSTITUTION:A specimen 26 is held with a specimen holding stage 31. Prisms 15 and 16 are made to face and brought into contact with the surface of the specimen 26 through a prism pushing means 32. At this time, the gaps between the surface of the specimen and the prisms are adjusted with the means 32. When the prisms 15 and 16 are compressed and pushed to the surface of the specimen vertically all the time, excellent optical coupling efficiency can be obtained with good reproducibility.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical waveguide measuring device that can evaluate the characteristics of an optical waveguide with high accuracy.

[Summary of the invention]

The present invention provides an optical waveguide measuring device that includes a sample stage, first and second prisms, and a device for bringing samples placed between the sample stage and the first and second prisms into contact with each other. By having a prism pressing means, it is possible to easily and quickly evaluate the characteristics of an optical waveguide.

[Conventional technology]

In recent years, research and development of functional devices using optical waveguides has become active. There has been a strong need for an easy-to-use device that can evaluate the characteristics of these optical waveguides with high precision.
There was still no stable and reliable device. Moreover, there were no commercially available devices.

To evaluate waveguide characteristics, refractive index n1 film thickness and light absorption α
etc. are measured and calculated.

The measurement is performed using a prism coupling method using a prism that combines a laser beam and a waveguide.

As shown in the principle diagram of Fig. 25, the prism coupling method uses x
A prism, that is, a couple-in prism (3) and a couple-out prism (
4).

The light beam (man-powered beam) (5) is incident at a specific angle θ near the right angle corner of the bottom of the couple-in-prism (3),
A light beam is introduced into the sample (2) by optical coupling with a specific waveguide mode, and any waveguide mode can be excited by adjusting the incident angle θ. (8) is a polarizer, (9) is a focusing lens, and (10) is a sample stage.

To confirm that guided light has been obtained, the output beam (6) taken out from the couple-out prism (4)
is detected and confirmed by projecting it onto a light receiving element or screen (7). For example, a rutile prism or the like is used for the prisms (3) and (4). Good coupling cannot be obtained unless the gap between the prisms (3) (4) and the sample (2) is set to 1/2 or less of the wavelength, but a well-adjusted prism can achieve high coupling efficiency. The prism coupling method has the advantage of being simple and capable of selectively exciting modes with fairly good coupling efficiency, and is well suited for measuring waveguide characteristics.

[Problem to be solved by the invention]

By the way, the above sample (2) and prism (3) (4)
It is difficult to subtly adjust the gap between the It was difficult to establish this as a highly functional evaluation device.

On the other hand, in conventional experiments, in order to improve mutual contact between the prism and the sample, they were firmly fixed on a surface plate, etc., so the incident angle of the measurement laser beam to the couple-in prism could not be varied. It was simple, such as making the surface plate rotatable as it is (see Fig. 25) or making the laser optical system variable in angle. For this reason, a rotation mechanism with high precision and high repeatability has been desired.

At the same time, the angle of incidence θ of the laser beam on the couple-in prism was confirmed using a so-called protractor, such as an angle scale.

Therefore, reading errors, mistakes, individual differences, and insufficient reading accuracy (for example, 0,001° class) are undesirable, and as a result, there is uncertainty in the angle setting, problems, and accurate reproducibility is impossible.

Initial positioning settings and prism Due to changes in size, changes in the laser emitting device system, etc., it is not easy to match the mutual positioning levels using spacers or the like. At the same time, since it is difficult to fine-tune the optimum position of the prism for the laser beam, it is necessary to find the optimum position that allows for smooth level measurement.

When changing the angle of incidence of a couple-in prism, locating the center of rotation within the couple-in prism in order to always keep the coupling at the right-angled corner of the bottom of the couple-in prism is impossible with a simple moving table due to changes in prism shape and dimensions. Since it is slow to respond to sample sizes, is uncertain, and has poor reproducibility, a highly accurate mechanism with a precision moving length measuring device was desired.

Conventionally, the prism and sample were pressed together from the back with screws, for example, to improve their contact with each other. However, simply pressing the prism and sample blindly without holding them can cause the prism to lift up, become misaligned, or This caused the coupling to fall down, resulting in poor adhesion, and the more it was pressed with the screw, the more it twisted, which seriously hindered the coupling. Furthermore, the reliability and reproducibility of measurements are low, and a new and more reliable method for holding the prism has been desired.

In the prism coupling method, it is necessary to adjust the gap between the sample and the prism to obtain good coupling efficiency, but conventionally, the contact between the prism and the sample is simply made without considering the retention of the prism as described above. Since it was simply pressurized and pressed with a screw, it was difficult to make fine adjustments to achieve the optimal contact condition, and it was also impossible to control the gap size. Therefore, it is difficult just to cause coupling, and naturally the reproducibility of evaluation measurements is low. Similarly, when spring pressure was used for pressing, the contact condition could not be determined and good results could not be obtained. If the pressure is simply applied using a screw or the like, the direction of the pressure is not necessarily perpendicular to the contact surface between the prism and the sample, and this is thought to be the cause of the prism lifting or falling. As described above, in the past, there was no mechanism or means for applying pressure in a direction perpendicular to the contact surface, and there was also no means for gap adjustment and length measurement with high reliability and reproducibility. Therefore, due to the above-mentioned unreliable holding and pressing of the prism, problems with fine adjustment of the contact gap, etc., the success of the evaluation measurement is due to the accumulation of manual skill and know-how, and the workability and productivity are significantly reduced. It was bad.

In view of the above-mentioned points, the present invention provides an optical waveguide measuring device that enables highly accurate, simple, and quick evaluation of the characteristics of an optical waveguide.

[Means to solve the problem]

The optical waveguide measurement device of the present invention includes a sample holder (31) and first and second prisms (15) and (16). (15
) and (16), and includes prism pressing means (32) for bringing the prisms (15) and (16) into contact with the sample (26) of the optical waveguide to be measured, which is placed between the prisms (15) and (16), respectively.

These sample holding table (31), first and second prizes (15) (16), and prism pressing means (32) are arranged on a table (45), and the angle of the incident beam is adjusted under this table (45). A rotation device (17) for setting, a rotation center position adjustment device (18), a level adjustment table (33) for adjusting the position of the prisms (15) (16) to the laser beam height, etc. are provided.

It is desirable to provide a prism moving means (87) in order to make the distance between the prisms (15) and (16) variable. Further, a suppressing means (I) is provided for pressing the sample (26) against the prisms (15) and (16) from the back surface following the movement of the prism by the prism moving means (87).
OIA) (101B) can be provided. In this case, the pressing means (IOIA) (I
A slit <115) is provided through which the OIB) is inserted.

Moreover, as shown in FIG. 10, each prism (15) (1
6) and the back (116) of the prism pressing means (32) may be formed to be flush with each other.

In addition, the prism pressing means (32) and the prism (15) (
16) between the flexible member (81) or (83)
can be interposed.

Also, the prism (15) of the prism pressing means (32) (
It is also possible to provide a spherical part (121) in contact with the back surface of the part 16).

[Effect]

A sample (26) is held on a sample holding table (31), and prisms (15) and (16) are brought into contact with the surface of the sample (26) via a prism pressing means (32). At this time, the gap between the sample surface and the prism is adjusted by the prism suppressing means (32), and the prism (15) (1
6) is pressed against the sample surface perpendicularly to the surface of the sample, so that good optical coupling efficiency can be obtained with good reproducibility.

Further, by providing the prism moving means (87), the distance between the two prisms (15) and (16) can be arbitrarily changed, making it possible to measure light absorption.

Further, the sample (26) cooperates with the prism pressing means (32).
) from the back side of the pressing means (IOIA) and (101B)
By pressing through the prism, good contact can be obtained even with small undulations on the sample surface, for example, where good contact cannot be obtained just by pressing the prism, and reliable optical coupling is possible. Optical coupling efficiency also increases.

In addition, by forming each prism (15) (16) and the back (116) of the prism pressing means (32) to be flush with each other, the distance between the prisms (15) and (16) can be adjusted from 0 to a predetermined distance. The distance can be varied.

Furthermore, the prism pressing means (32) and the prism (15)
(16) between the flexible member (81) or (83)
), when both surfaces of the sample (26) in the thickness direction are non-parallel, the prism pressing means (32) or the prism (15) (16) can be pressed against the sample holding table (31). Even when the contact surfaces of the prisms (15) and (16) are non-parallel, the prisms (15) and (16) fit well with the sample (26), resulting in a good contact state and improved optical coupling efficiency.

In addition, a spherical portion (121) is provided on the prism pressing means (32).
is provided, and this spherical part (121) connects the prism (15
) By pressing approximately the center of the back of (16),
Furthermore, stable, reliable, and optimal optical coupling becomes possible.

〔Example〕

Embodiments of the optical waveguide measuring device according to the present invention will be described below with reference to the drawings.

FIG. 1 shows the schematic configuration of the optical waveguide measuring device of this example, which includes a measuring device main body (11), a laser beam emitting device (12), an optical system (13), and a photodetector (14).
The entire structure is placed on a horizontal surface plate.

The measuring device main body (11) will be explained in detail in Figure 2 and below, but it includes a couple-in prism (15), a couple-out prism (16), and a rotating device (11) for setting the incident beam angle to the couple-in prism (15). 17), a rotation center position adjustment device (18), etc. Couple-in prism (15) and couple-out prism (16)
), for example, a rutile prism is used.

A laser beam emitting device (12) includes a plurality of laser irradiation means necessary for measurement, for example, HeNe with a wavelength of 1.52 μm.
Laser (12A), He-N with a wavelength of 1.152 μm
e-laser (12B) and visible light wavelength 0.6328
A te-Ne laser (12C) is provided.

As the optical system (13), since the laser power is small at 5 mW or less, an Au mirror (19) is used to reduce loss.
and a wavelength separation mirror (20> (21). First
The wavelength separation mirror (20) is composed of a dichroic mirror that has a transmittance of 98.5% for a laser beam with a wavelength of 1.52 μm and a reflectance of 99% for a laser beam with a wavelength of 1.152 μm. Mirror (21) has a wavelength of 1.152
Transmittance of laser light of μm and wavelength 1.52 μm is 98%
, a dichroic mirror with a reflectance of 99% for laser light with a wavelength of 0.6328 μm. Laser beams (22A) (22B) (22C) from each laser irradiation means (12A) (12B> (12C)
0) (via 21>, Grantson prism (23)
The light passes through a pinhole (24), is converged by a plano-convex lens (25), and is incident on a sample (26) of an optical waveguide to be measured through a couple-in prism of the measuring device main body (11). Here, the plano-convex lens (25) is 1 mm to 2 mm.
Test the laser beam with a diameter of several hundred micrometers (26).
f = 250mm0 to make the incidence with a spot diameter of m
A plano-convex lens is used. The output light beam extracted from the couple-out prism (16) is sent to the photodetector (
14), for example, it is detected by a CCD line sensor. Note that in the case of light of 1.52 μm, a germanium photodiode is used as a photodetector.

2 to 4 show examples of the measuring device main body (11). In this example, the optical waveguide sample (26) to be measured is
A sample holding table (31) supporting the sample (31), a pair of prisms facing the sample (26), namely a couple-in prism (15) and a couple-out prism (16), a prism (15)
) (16) and a gap adjustment device (32) that adjusts the gap between the sample (26) [(32A) (32B))
, a level adjustment table (33), a rotating bag ff1 (17) that rotates in a horizontal plane, a rotation center position adjustment device (18), and the like.

That is, a level adjustment stand 33) for supporting the upper part of the apparatus main body is provided on the horizontal surface plate (34). This level adjustment table (3
3) corresponds to the laser beam height determined by the laser beam emitting device (12) and optical system (13) fixed to the other part of the surface plate (34), and the laser beam (22A)
The cup-in prism (15) is arranged so that ~(22C) easily enters the optimal position of the cup-in prism (15)
5) has the function of finely raising and lowering the horizontal surface plate (
A pillar (35) with a guide fixed to the pillar (34) and a slider (35) arranged to be able to rise and fall guided by the pillar (35)
36) and a micrometer head (37) for raising and lowering the slider (36).

The guide mechanism between the support column (35) and the slider (36) is composed of various so-called linear guides in which rollers or balls are inserted in, for example, dovetail grooves or V-grooves. This linear guide allows the slider (36) to move up and down with high precision and smoothness with little backlash, and also allows the micrometer head (37) to move up and down smoothly.
) While confirming the height of the vertical adjustment using the scale, the micrometer head (37) allows fine adjustment of the slider and hence the prisms (15) and (16).

A rotating device (17) for setting the incident angle of the laser beam is provided above the slider (36) of the level adjustment table (33). This rotating device (17) is constructed by supporting the shaft (not shown) of a rotating board (39) in a bearing side tube (38) with double angular contact ball bearings, thereby achieving high precision rotation with little backlash. is possible. There is a scale (
40) is used as a rough guide for setting or reading the incident angle of the laser beam to the couple-in-prism (15), but for more accuracy and convenience,
A rotary encoder (for example, optical type) is built into the rotating device (17), and a digital display device is connected to the outside to eliminate misreading of angles and errors, and to achieve high accuracy (0.
, 0016 class) can be configured so that reading and setting can be performed with good reproducibility.

By the way, regarding the incident beam position of the couple-in prism (15), the coupling efficiency is such that the incident laser beam (22) always comes near the right angle corner C of the bottom surface of the prism (15) as shown in FIG. It is important to improve the Therefore, in order to obtain an arbitrary angle setting of the incident beam, the couple-in prism (15) is connected to the sample (2).
The center of rotation so that the incident beam always comes near the right angle corner C of the bottom surface of the prism (15) even when the prism (15) rotates while being in contact with the prism (15) is as follows.

The angle α1 of the corner C of the laser beam that enters the prism (15) at an arbitrary angle α2 and is refracted is n, sin α, where the refractive index of the prism (15) is n2.
=n2si aperture α2, and a laser with a spot diameter of several hundred μm at an arbitrary angle α has a refractive index of n2=2.
7321, and since it uses a 5mmmm reprism, the center of the circle of =1.29 is set as the rotation center 0, as shown in FIG. 5B. This value varies depending on the size of the prism (15), the material and the refractive index which varies depending on the wavelength of the light. Therefore, in this example, a rotation center position adjustment device (18) is provided on the rotation device (17) in order to accurately and easily align the rotation center with the optimal point of the couple-in-prism determined by various conditions.

The rotation midpoint position adjustment device (18) includes a Y moving table (41) movable in the Y direction (the direction of the gap between the prisms (15) (16) and the sample (26)), and a Y moving table (41) disposed thereon.
It has an X-moving stage (42) movable in the X-direction (long plane direction of the sample (26)) perpendicular to the Y-direction, and each Y-moving stage (42) is movable by micrometer heads (43) and (44).
1) and the X moving table (42) are driven and measured.

The Y moving table (41) and the X moving table (42) employ a so-called linear guide mechanism that allows smooth minute movements and does not cause play in the operation. Also, the micrometer head (
43) and (44), it becomes possible to perform Ri adjustment and minute length measurement for reading the center of rotation with high reproducibility.

The sample holding table (31) has a rotation center positioning adjustment device (1
8) The table (4) attached integrally to the X moving table (42)
5) Provided on top. As shown in Fig. 6, the sample holding table (31) is a vertical surface with a step (46) that supports the couple-in prism (1, 5) and the couple-out prism (16) vertically and at an appropriate height. (31a) This vertical surface (31a) is a prism (15)
When sample (26) is pressurized by (16), sample (2
6,) is supported from the back side and is formed with rigidity to prevent bending or distortion of the sample (26) and to ensure pressurized contact.

The sample holding table (31) is equipped with a clamp (
47) is installed, and the stage of the holding stand (31)! When the sample (26) is placed on the sample (46), the clamp (47) holds the sample I=l(26). Depending on the shape of the sample (26), if necessary, an elastic clip (78) may be fitted from the upper end of the sample (26).
).

The couple-in prism (15) and the couple-out prism (16) each have a right triangular shape, and the apex on the opposite side to the sample contact surface (46) is cut out parallel to the sample contact surface (46) to form a flat surface (47). It is formed into a shape.

The couple-in prism (15) and the couple-out prism (16) are placed on a support (45).
48).

The supporter (48) has a flat surface (48a) that supports and pushes the prisms (15) (16) on the back, and a prism that prevents the prisms (15) (16) from rising or falling when they come into contact with the sample (26). Support surface (48b) that provides the upper and lower surfaces
) (48c), a surface (48d) surrounding the prism sides and slopes to prevent the prisms (15) and (16) from shifting laterally.
(48e). That is, prism (15)
(16) is embedded in a support (48) except for just the contact surface (46) with the sample (26). In addition, supports (48
) from the top surface of the prism (15) (
16) to further ensure prism retention and improve reproducibility.

In addition, there is a support (
48) is provided with a slit (50) having a width of, for example, 3 mm for inputting and outputting a light beam. Further, the surface of the support (48) in contact with the prism is painted matte black in order to suppress harmful reflected light and scattered light.

Supports (4) corresponding to each prism (15) and (16)
8), a prism pressing means or gap adjusting device (32) is provided. Gap adjustment device (32)
is movably engaged with a guide part (52) fixedly disposed on the table (45) perpendicular to the sample holder (31), and is integrated with the supporter (48). A slider (53) configured in
) with a lead screw with a pitch of 9.5 mm, which is equivalent to a micrometer head.
(55). Furthermore, it is possible to use a differential screw for minute feeds. A dovetail groove structure with high precision and smoothness and with minimal play is adopted for engagement between the guide portion (52) and the slider (53). Lead screw (5
5) is a holder (56) planted on the guide part (52).
) and a flanged bearing (57), and the knob (5
8) and a snap ring (59) are attached.

The knob (58) and holder (56) are equipped with scales and verniers, making it possible to read minute feed amounts. Furthermore, a combination of Magnescale and a digital display is also effective for even more minute length measurements. In addition, to judge the degree of contact between the prism and the sample during gap adjustment based on the pressure level, use the sample holder (31) or the slider (
53) and a pressure sensor etc. on the guide side to consider reproducibility. The gap adjustment device (32) of the couple-in prism (15) and the gap adjustment device (32) of the couple-out prism (16) are mounted on the mounting bases (60) and (61) on the table (45) so that they are symmetrical, respectively. mounted on. Here, the mounting base (61) on the couple-out prism (16) side is attached to the elongated hole (62) with respect to the table (45).
) and a tightening screw (63) so as to be variable in the longitudinal direction of the sample (26). This makes it possible to vary the spacing between the couple-in prism (15) and the couple-out prism (16) in order to measure the light absorption α.

On the other hand, a detector (14) is placed on the table (45) to detect the output beam from the couple-out prism (16).
For example, a CCD line sensor or a photodiode is arranged. That is, a photodetector (14) such as a photodiode (in the case shown) is placed at a position corresponding to the output angle range of the output beam.
The substrate (65) on which the CCD line sensor is attached or the substrate on which the CCD line sensor is attached are selectively attached to the support (64) in a pinching manner depending on the measurement.

The support body (64) is supported by a movable adjustment table that is movably adjusted in the height direction, the X direction, and the Y direction. That is, (69) is a height adjusting means consisting of a guide part (66), a slider (67), and a lead screw (68), and (70> is a guide part (71) and a slider (72) using a rack and pinion mechanism, for example. (73) is a Y-direction adjustment means consisting of a guide part (74) and a slider (75). (76) is an unnecessary direction when the CCD line sensor is arranged. A shielding part provided with a pickpocket 7) (77) that blocks light from the photodiode, and is removed when the photodiode is used.

In the optical waveguide measuring device having such a configuration, the optical waveguide sample (26) to be measured is placed on the step (46) of the sample holder (31) in contact with the vertical surface (48). At this time, it is temporarily fixed with a clamp (47). Also, the sample (
26), it may be temporarily fixed with an elastic clip (78) as shown in FIG.

Then, the respective gap adjustment devices (32) are driven to bring the couple-in prism (15) and the couple-out prism (16) into contact with the sample (26). On the other hand, by operating the micrometer head (37) of the level adjustment table (33), the heights of the prisms (15) (16) are matched to the laser beam height. In addition, the Y moving table (41) and the X moving table (
42), the center of rotation is positioned, and by rotating the rotating substrate (39) of the rotating device (17), the angle of incidence of the laser beam on the couple-in prism (15) is set.

The optical waveguide measuring device described above has the following advantages.

The prism (15) (16) is adjusted by the level adjustment table (33).
> The level (height) of the laser beam position can be easily adjusted, and the positioning of the optimal incident spot on the couple-in prism (15) can be finely adjusted. It also becomes possible to measure the length.

By configuring the rotating device (17) by combining a highly accurate shaft and a bearing, functional, stable, and highly accurate measurement becomes possible.

By combining a rotary encoder and a digital display to read the rotation angle, it is possible to eliminate misreading and errors in the incident angle of the measurement beam, making it possible to read the incident angle with high precision and improve its reproducibility.

The rotation center position adjustment device (18) uses a linear guide mechanism and a micrometer head to perform fine adjustment of the rotation center position and length measurement smoothly and reliably without play. Therefore, by this fine adjustment and length measurement, it is possible to accurately set the rotation center that keeps the incident beam constant at the bottom right angle corner C of the couple-in prism (15), and to improve the optical coupling efficiency. .

The entire back side of the prisms (15) and (1G) are firmly fixed by the supports (48), so the sample (2
6), the prisms (15) and (16) are prevented from lifting, falling, lateral shifting, twisting, etc., and the contact accuracy, its reproducibility, and coupling efficiency are improved.

The prism (15) is always adjusted by the gap adjustment device (32).
(16) are pressed perpendicularly to the surface of the sample (26), thereby achieving good coupling efficiency and reproducibility.

The scaled knob improves the reproducibility of gap adjustment.

Therefore, this apparatus allows highly accurate evaluation of optical waveguide characteristics (refractive index, thickness, propagation loss, etc.) necessary for the development of functional devices using optical waveguides.

8 to 13 show other embodiments of the invention.

Note that parts corresponding to those in FIGS. 2 to 7 are designated by the same reference numerals, and redundant explanation will be omitted. In the measurement apparatus shown in FIGS. 2 to 4, the prisms (15) and (16) in contact with the sample (26) are connected to the sample (26) in order to increase the coupling efficiency between the laser beam and the sample (26), that is, the waveguide. ) and in order to ensure reliable bonding and high reproducibility without causing lifting, falling, sideways shifting, twisting, etc., each of prisms (15) and (16) should be placed in a position other than the front surface of the prism (the surface in contact with the sample). It is firmly supported by a supporter (48) that envelops it. That is, the vertical surface (48a) of the supporter (48) that supports and presses the rear surface of the prism, and the surfaces (4811) and (48C) that support the upper and lower surfaces of the prism prevent the prism from floating or falling, and the surface that surrounds the side surfaces and slopes of the prism (48d) and (48e) cause strike slip,
It prevents twisting and is further clamped from the top with a set screw (49). By the way, such a solid support (
In the prisms (15) and (16) supported by the prisms (15) and (16), there is a table (45) with good flatness accuracy, a sample holder (31) perpendicular to this, and a sample holder (31) parallel to the table (45) and on the holder (31). The prism (15) is fixed by the sliding mechanism of the vertical gap adjustment device (32) and the support (48) having a back surface parallel to the holding table (31) and a vertical lower surface.
) (16) and the holding table (31) are completely parallel, and when the sample (26) is parallel, firm support by the supporter (48) can easily realize a coupling with high coupling efficiency. Therefore, the reproducibility is high.

Now, in the measuring devices shown in FIGS. 2 to 4, each part is manufactured with a tolerance in shape. Therefore, it can be said that it is relatively difficult to achieve parallel accuracy between the prisms (15) (16) and the sample holder (31) by controlling and maintaining the final accuracy of the assembly of these parts.

The thickness of the front and back of sample (26).

If the horizontal direction is not parallel, use the prism (15
) (16) is regulated by the supporter (48), this non-parallel condition causes non-parallel contact between the prisms (15) and (16) and the sample surface, resulting in a bonding problem. This results in reduced efficiency or inability to combine. This can be said to occur relatively easily. Also, if you force the prism (15) in this state,
(16) or the sample (26) may be damaged. Therefore, even in such a situation, a prism support is required that improves the fit between the prism and the sample surface and ensures optical coupling.

A sulin (50) is provided on a part of the support (48) on the upper side for the input and output of the measurement radar beam, but since the prism is almost covered, unnecessary reflections may occur inside the prism. There is a paddle that causes noise in the return measurement.

On the other hand, light absorption in an optical waveguide is achieved by couple-in-prism (15
) and the couple-out prism (16) little by little and detect the intensity of the couple-out light. In the example shown in Figure 3, the gap adjustment device (32B) on the couple-out prism (16) side has a long (6
2) and the couple-in prism (15
), the couple-out prism (16) is movable and fixed with a tightening screw (63). The mounting base (61) must be fixed with screws each time the measurement position is moved.
6) Parallelism with the surface of the sample holding table (31) and the sample (2)
The optimal position of the perpendicularity of the prism (16), support (48) and gap adjustment device (32) with respect to the plane of (6) must be readjusted and set for each measurement. Therefore, changes in the gap slope, etc. are difficult to be constant, and the reproducibility of measurements is poor. In addition, in the case of measurement using the prism interval as a parameter, adjustment is required every time, which hinders continuous and smooth measurement, resulting in a large burden of time and effort. Furthermore, although the distance between the couple-in prism (15) and the couple-out prism (16) was measured using a scale or the like and fixed with screws, the accuracy of the measured data may have poor reproducibility because the length measurement of the distance is uncertain.

Therefore, it is desired to have a movable stage and a distance measurement in which the parallelism and perpendicularity between the sample and the prism do not change even if the distance is changed.

The embodiments shown in FIGS. 8 to 13 are improvements in the above-mentioned points. First, in this example, a degree of freedom (flexibility) is added to the system in order to accommodate non-parallelism in the thickness direction of the sample, or non-parallelism in the contact surface of the prism using a gap adjustment device or support for the sample holder. Interpose an element that has. Due to this degree of freedom, when the prism is pressed by a non-parallel specimen, the prism surface and the specimen surface are rotated by force or its reaction force using the mutual contact point as a fulcrum or a point of force, so that the prism surface and the specimen surface become compatible.

FIG. 8 shows an embodiment in which a flexible member is interposed between the supporter (48) shown in FIG. 7 and the prisms (15) and (16). In this example, the prism (15) (1
A supporter (48) that wraps around the entire rear part of the sample (21) other than the contact surface (46) of 6) is provided, each inner surface of which is a prism (1).
5) Form so as to have a gap of, for example, 0.5 mm with (16). On the other hand, the prisms (15) and (16) are each fitted into a supporter (48) with the entire rear part of the prism wrapped in a cushioning material (81) made of cork material or the like having a thickness of 0.5 ml Tl.

In this way, the cushion material (81) is attached to the prism (15) (
16) and the supporter (48),
The surface (46) of the prism (15) (16) and the sample (26)
) makes good contact with the surface. In the case of FIG. 8, although it is possible to firmly hold the prisms (15) and (16), the reaction force received from the entire cushion material (81) is large and the degree of freedom is relatively small. Further, although the cushion material (81) is naturally provided with a slit for inputting and outputting the measurement beam, there is a concern about unnecessary reflections other than that, and it is also difficult to manufacture.

FIGS. 9 and 10 show other embodiments that improve this point. In this example, the table (45) is used as the prism supporter (48) that constitutes the negative part of the gap adjustment device (32).
A support having only a prism support surface (82a) that is horizontal to the surface and perpendicular to the sample holder (31), and a prism back pressing surface (82b) that is parallel to the holding surface of the sample holder (31). establish. Then, press the back pressing surface (8
2b) and the rear surfaces of the prisms (15) and (16), the thickness of the cushion material is Q,
The prisms (15) and (16) are placed on the supporter (48) with a 5 mm Si rubber (83) interposed therebetween. Furthermore, in order to hold the prisms (15) and (16), respectively, phosphor bronze plate spring clamps (84) are attached to the supports (
48) and the top surfaces of the prisms (15) and (16), and one end of the clamp (84) is connected to the supporter (
48) via a set screw (85), and the plate spring clamp (84) relatively lightly holds the prism (
15) Press (16). Further, a positioning piece (86) having a small contact surface of 0.5 to 1, Qmm for the prism set is provided.

It is also conceivable to insert a similar cushioning material into the supporting surface (82a), but in that case, there is a possibility that twisting may occur due to the component force caused by the pressure.

In the examples shown in Figs. 9 and 10, when the specimen is non-parallel, the prism tilt adjustment in the horizontal and vertical directions is performed using a relatively small cushioning material (83), and the pressing of the back surface of the prism, which has a small area, is Since it is done using only the surface (82b), it blends in smoothly. At this time, use the leaf spring clamp (
84) always lightly suppresses the prisms (15) and (16), following these series of tilting movements, and also preventing unnecessary floating. Furthermore, since rubber is used as the cushion material (83), friction is relatively large and lateral slippage is small. Furthermore, since most of the prisms (15) and (16) are open, the contact with the sample (26) can be observed, making it easy to measure and handle. Furthermore, since the sides of the prisms (15) and (16) are open, unnecessary reflections are reduced and the quality of measurement is improved. According to this embodiment, without compromising positional accuracy, problems such as a decrease in coupling efficiency and inability to couple due to the parallelism precision of the sample (26) and the quality precision of the equipment are almost eliminated, and productivity is improved.

As another example, a sample holding table (31), not shown, is used.
A cushion material is interposed between the sample (26) and the sample (26) held. This example is the simplest, but typically a small prism (
For example, if a relatively large sample (26) is placed on a 5 mm square (5 mm square), the amount of tilting required to adjust to the small non-parallel contact surface created by this is large, and if the applied pressure is large, the sample will bend. , distortion, and even damage.

Figures 11 to 13 show both prisms (15) and (16).
) is an improved example of the interval variable adjustment means, ie, the prism moving means, for variably adjusting the interval between the prisms. This prism moving means moves the couple-out prism (16) side relative to the fixed couple-in prism (15), and when moving to an arbitrary position, the couple-out prism (16) and the sample (26) adjusted in advance are moved. 16) and the perpendicularity of the gap adjustment device with respect to the sample (26). This is why the table (45)
Above, parallel to the table (45) and sample holding stage (3
1) Prism moving means (87) for variable interval adjustment parallel to the longitudinal direction of the sample (26) is provided. This prism moving means (87) has a guide part (88) and a slider (89) that engage with each other through a dovetail groove structure. A so-called rack (90) is attached to the guide part (88), and the slider (89) A pinion (not shown) that engages with the rack (90) is arranged in the section, and by rotating a knob (91) directly connected to this pinion, the slider (89) moves on the guide part (88). It is configured as follows. Of course, the guide portion (88) is parallel to the table (45) and parallel to the longitudinal direction of the sample holder (31). Couple out prism (1
6) side gap adjustment device (32B>) is integrally arranged.

Therefore, by turning the knob (91), the couple-out prism (16) can be moved parallel to the sample surface, and the gap adjustment device (32B) on the couple-out prism (16) side can be moved at any desired movement position. Ensure perpendicularity to the surface of the sample holder (31).

In addition, a scale (reading scale) is provided on the end surface of the table (45) that is flush with the side surface of the slider that is almost in contact with the table (45), and a vernier is provided on the slider (89) side, making it possible to measure the distance traveled by minute intervals. It is configured so that In order to make this length measurement more precise, to prevent measurement errors and reading errors, and to improve the efficiency of length measurement, for example, this length measurement can be carried out using a micro length measuring device such as a magnescale or an optical scale, and a counter. The combination of as well as the angle of incidence rotation is particularly efficient.

The embodiments shown in FIGS. 8 to 13 have the following advantages.

By interposing the cushioning material (81) or (83) between the prism (15) (16) and the supporter (48),
The surface of the sample (26) and the surface of the prism (15) and (16) are now well spaced, and in addition to the prism and the device, the sample H (2)
The decrease in coupling efficiency and poor coupling due to the non-parallelism of the prism and sample surface caused by the sample (26) side are resolved.
) breakage is prevented and a reliable bond is obtained. Therefore,
Measurement becomes easier, and the strict precision of the device can be relaxed, making optical fabrication easier. Also sample (26)
It is possible to easily create the parallelism of the objects, or to widen the accuracy range of measurement sample adoption. Furthermore, since the support (48) can be formed into an open type, in this case, it is easier to observe the state of the connection during measurement, and the quality of measurement is improved with fewer unnecessary reflections.

The prism moving means (87) makes it possible to move the couple-out prism (16) relative to the couple-in prism (15), that is, to move the couple-out prism (16) by small distances with little backlash, and to move parallel to the sample surface, and also to adjust the gap with respect to the sample. It is possible to maintain verticality. In particular, the reproducibility of measurements is improved since it is no longer necessary to readjust the coupling condition every time the distance between the measurement positions changes. In addition, measurement time such as light absorption measurement can be significantly shortened.

Equipped with a means for measuring minute dimensions of the spacing distance between couple-in prisms and couple-out prisms, anyone can quickly and precisely set the required spacing, improving measurement accuracy and improving reproducibility. It also has high performance and enables efficient measurement.

FIGS. 14 to 17 show still other embodiments of the present invention. Note that parts corresponding to FIGS. 11 to 13 are given the same reference numerals, and weights and descriptions are omitted.

Since the optical coupling efficiency is determined by the contact between the prism and the sample, a certain improvement has been achieved by using the gap adjustment device and the flexible support. However, more precisely, it is desirable to be able to deal with surface precision (unevenness) within the area of the sample corresponding to the prism surface. This embodiment further improves this point.

In FIGS. 14 to 17, the sample holding table (31)
Place the sample (26) on the back side of the prism (15) from the back side.
(16) A device (101) [(101,A) (
IOIB) ] is provided.

The push rod (100) that presses the sample (26) from the back to the optimal point of the prisms (15) (16) may be, for example, a push rod with a diameter of 2 mm and a spherical R2 tip as shown in FIG. As shown in FIGS. 19A and 19B, a push rod can be used in which the tip of the rod is wedge-shaped at 120° and the contact surface is approximately vertical.

The push rod (100) shown in FIG. 18, which has a smooth spherical surface and is a point of gentle pressing, can obtain a concentrated load of contact at a relatively strictly optimum point.

Also, the push rod (100) shown in FIGS. 19A and 19B can provide a contact line over the entire height of the prism. These push rods (100) are attached to a push rod holder (102) so that they can be replaced depending on the situation of the sample (26). The push rod (100) is a push rod holder (
The push rod (102) is fitted into the V groove formed in the push rod (102).
0) and the clamp rod inserted into the through hole in the V groove (
103) from the opposite side with a nut.

The V groove of the push rod holder (102) is the push rod (100).
This is to maintain the height of the prism center (laser beam level) at all times. The mechanism for pressing the back of the sample is the gap adjustment device (32) except for the push rod holder (102).
) has the same configuration. That is, a slider (104) is provided which is integrally configured with a push rod holder (102), and this slider (104) is parallel to the table (45) and in contact with the sample (26) and prisms (15) and (16). It is slidably engaged with a guide portion (105) extending perpendicularly to the plane. The engagement between the slider (104) and the guide portion (105) employs a dovetail groove structure that is highly precisely and smoothly adjusted. A precision nut is formed on the slider (104), and a lead screw 5-(IOT) is screwed into this precision nut. This lead script!
- (107) is rotatably held by a holder (108) set up on the guide part (105). (1
09) is a knob provided at the end of the lead screw (107). Therefore, this knob (109)
By turning the lead screw (107), the slider (104) is moved in the direction toward the sample (26). The knob (109) of the lead screw (107) has a scale, and the holder (10
8) is equipped with a vernier, and the minute feed amount can be determined by this scale and the vernier.

The sample back pressing devices (IOIA) and (101B) are provided for the couple-in prism (15) and the couple-out prism (16), respectively. In this case, the prism moving means (87) of the couple-out prism (16)
In order to enable pressing even when the distance between both prisms (15) and (16) is narrowed by
) are attached to opposite sides of the corresponding holder (108). That is, the back pressing of both samples is carried out using the device (IOIA
)<101B) are formed in a mutually symmetrical structure.

Then, the back side of both samples is pressed using a device (IOIA) (10
1B) is provided with a movement adjustment means (IIOA) (110B) so that the movement can be adjusted according to the variable distance between the prisms (15) and (16), that is, following the movement of the prisms. Here, the couple-in-prism (15) is fixed to serve as a reference, but the couple-in-prism (15) is fixed.
) The first sample back pressing device (IOIA) corresponding to
The push rod (100) is movable because it is necessary to adjust it to an optimal position near the right angle corner C of the bottom surface of the prism where the coupling efficiency is high. The first back pressing of the sample is performed by the movement adjusting means (11) of the apparatus (IOIA).
0^) and a couple-out prism with variable spacing (16
) The second sample back pressing device (IOIB
The movement adjustment means (110B) of ) have the same functions as the couple-out prism (16) and the prism movement means (87), respectively. That is, a common guide part (111) is provided on the table (45), which is parallel to the table (45) and parallel to the longitudinal direction of the sample (26). For pressing, a slider (112) to which the devices (IOIA) and (IOIB) are each integrally attached is engaged. The guide portion (111) and slider (112) are constructed with a dovetail groove structure that allows them to slide reliably and smoothly with high precision. The guide part (111) has a rack (113)
are arranged, and each slider (112) has a pinion (114) that engages with a rack (113,).
is arranged, and the knob (115) of the pinion (114)
) is configured to be moved by turning. Note that a scale is attached to the end face of the table (45), and a slider (
112) is equipped with a vernier and a prism moving means (
87). On the other hand, the sample holding table (31) has a long hole (for example, 2.5 mm) into which a push rod (100) of, for example, 2 mmφ is inserted over the maximum movement interval of the couple-out prism (16) from the couple-in prism (15). x25mm) (115) is provided.

Moreover, in the couple-in prism (15) and the couple-out prism (16), as shown in FIG.
) is constructed so that its back (116) is flush with the other.

According to the embodiments shown in FIGS. 14 to 17, the rear surface of the sample is pressed by the device (IOIA) (IOIB).
) by pressing the prisms (15) and (16) from the back side, it is possible to ensure optical coupling even with small undulations on the surface of the sample (26) that impede contact, and further increase the coupling efficiency. .

Furthermore, the push rod holder (102)' allows selection and replacement of the push rod (100) most suitable for measurement, widening the range of conditions under which the sample (26) can be measured.

The rear pressing mechanism ensures vertical pressing of the specimen (26) and prisms (15) and (16), preventing lateral displacement and
Good contact can be easily adjusted without causing any other distortion.

Furthermore, reproducibility is improved by reading the movement length of the movement adjustment means (IIOA) (110B).

The sample (
At any position parallel to 26), vertical pushing of the device (IOIA) (101B) is guaranteed when pressing the back of the sample, and the pressing position must be adjusted to the optimum position for high coupling efficiency with the double-in prism. becomes possible.

Further, it can similarly follow the couple-out prism (16) that is moved by the movement adjustment means (IIOB).

Additionally, the length measuring means allows for faster alignment (and improved reproducibility).

Furthermore, as shown in FIG. 20, the prism (15) (1
6) and the back (116) of the supporter (48) are flush with each other, so by bringing the couple-in prism (15) and couple-out prism (16) into contact with their backs (116), the distance between them can be set to zero. , the distance between the couple-out prisms (16) can be varied up to a predetermined distance from the mouth.

Incidentally, the incident beam and the output beam (130) are the 23rd beam.
In the case shown in the figure, the end on the output beam side may be bent to form a sample holder (31) having a long hole (62), or the sample holder may be formed as a sample holder (31) with a long hole (62) as shown in Fig. 24. (31
) is made of a rigid material, and the long hole (62) is made of a sample holding table (
31) may be formed so as to reach the end on the emission side. If such a sample holder (31) is used, the photodetector (14) can be properly irradiated with the output beam.

On the upper side, the prisms (15) and (16) are attached to the sample (2).
By providing a so-called flexible support in which a cushioning material (81) or (83) that is well adapted to 6) is inserted, it is possible to improve the coupling efficiency to a certain extent. However, strictly speaking, when fitting the prism to the sample, there is an inclination between the back surface of the prism and the prism support surface of the supporter with the cushioning material in between, so of course when pressing vertically, the force component is the cushioning material. This deflection causes lateral displacement and twisting of the prism, as well as causing distortion. In addition, the flexible support provided with the cushioning material still has some insufficiencies, such as the ability of the flexible support to perform its function when the cushioning material is pressed down with sufficient force.

On the other hand, the sample (26) has certain measurement conditions (e.g. temperature, etc.)
When adding a push rod <1 to the sample holding table (31)
10) It may be inappropriate to provide the elongated through hole (115) and it may not be possible to press the sample from the back with the push rod (100). At this time, a support is required that has a mechanism that allows the prism to fit well on the sample surface, and that can concentrate the load on the optimal position for pressing, since pressing is not influenced by component forces.

FIG. 21 and FIG. 22 are examples in which these points have been improved.

In this example, a couple-in
A prism lower support surface (<120a) that is horizontal to the table (45) and perpendicular to the sample holding part (31) serves as a support (48) that supports both out prisms (15) and (16), respectively.
The prism rear surface pressing approximately parallel to the sample holding table (31) forms a support having a surface (120b), and the prism rear surface pressing is at a predetermined position of the surface (120b), that is, the pressing of the prism rear surface is not used. A so-called spherical part (121) is provided with a relatively small-diameter spherical protrusion at a position corresponding to approximately the center of the plane (47), or a relatively small-diameter metal ball is fixed thereto.
will be established.

In both examples, since the back surface of the prism is directly pressed, the surface accuracy of the spherical surface must be high. In the example, a high-precision steel ball (121A) with a diameter of 1 to 2 mm was pressed against the back surface (121A).
0b) recess (122), 0.25m
I made only m stick out its head. (123) is a through hole, and when adhesively fixing the steel ball (121A), for example, a needle or the like is inserted into this through hole (123) to control the protruding dimension of the steel ball (121A). Or steel ball (121
When replacing A), the steel ball (121A) can be removed by inserting a needle or the like into the through hole (123). In this way, by pushing the back surface of the prism with the spherical surface, the non-parallel contact between the prism (15) (16) and the surface of the sample (26) is corrected, and the tilting movement is performed using the point of contact with the spherical surface as a fulcrum. Eggplant.

In addition, in order to hold the prism, a thin leaf spring clamp (84) is provided at the upper end of the supporter (18) to relatively lightly press the prisms (15) (16), and the supporter (48)
) is provided with a positioning piece (86) for the prism set. This allows for flexible retention of the prism (15
) This is a holding mechanism that is safe for movement of the gap adjustment device (32) without adversely affecting the movement of the (16) in contact with the sample (26).

In this way, by pressing the back of the prism approximately at the center of the working plane (47), stable, reliable, and optimal optical coupling can be achieved.

Since the surface of the prism supporter (48) is a metal spherical surface, the metal sphere (121A) will not be crushed even if sufficient force is applied to the prism (15) (16), and the surface will be large. Prism (15) (1) is pressed even if force is applied.
The function of converting 6) into a sample (26) can be fully demonstrated. Therefore, when applying certain measurement conditions (such as temperature) to the sample (26), it is inappropriate to provide the sample holder (31) with a long hole 62) that passes through the push rod. Even if pressing is not possible, place a prism (
15) (16) can be blended well. Furthermore, since the support (48) is configured in a so-called open type in which the side surfaces of the prism are released, it is easy to observe the state of optical coupling. Furthermore, unnecessary reflections are reduced and measurement quality is improved.

〔Effect of the invention〕

According to the apparatus of the present invention described above, the characteristics (refractive index, thickness, propagation loss, etc.) of an optical waveguide can be evaluated simply, quickly, and with high precision. Therefore, it is suitable for application to characteristic evaluation of optical waveguides necessary for the development of functional devices using optical waveguides.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of an optical waveguide measuring device according to the present invention, and FIGS. 2, 3, and 4 are a front view, a plan view, and main parts showing an example of the main body of the measuring device according to the present invention. side view,
Figures 5A and B are explanatory diagrams showing the relationship between the prism and the incident beam, Figure 6 is a perspective view showing an example of a sample holding table, and Figure 7A.
and B are sectional views seen from the plane and side views showing one example of the prism supporter, FIG. 8 is a sectional view seen from the plane showing another example of the prism supporter, and FIGS. 9 and 10 are the prism supports. A plan view and a side view showing still another example of the vessel,
Figures 11, 12, and 13 are front views, plan views, and side views of the main parts showing other examples of the measuring device main body, and Figures 14, 15, 16, and 17 are the measuring device. A front view, a top view, a side view, and a rear view of main parts showing still other examples of the main body,
Figure 18 is a front view showing an example of a push rod, Figure 19 and B
20 is a plan view showing still another example of the prism supporter, and FIGS. 21 and 22 are side views and front views showing still another example of the prism supporter. A plan view, FIG. 23, and FIG. 24 are a sectional view and a front view showing other examples of the sample holding table, respectively, and FIG. 25 is a diagram showing the principle configuration of the prism bonding method. (11) is the measurement device main body, (12) is the laser beam emitting device, (13) is the optical system, (14) is the photodetector, (15)
) (16) is a prism, (26) is an optical waveguide sample, (
31) is the sample holding stage, (32) is the gap adjustment device, (
48) is a prism supporter, (87) is a prism moving means, (IOIA) and (101B) is a sample back pressing device. 1t-Oki 194 main body! 2-・Conclusion- Boo Beam Shiga Ai 1 16 ・Carp Out Psosism 1q...Au Mirror! 5. Force...lFinAriz A 25-4E% scattering sample charge Masato Ito Makoto Makoto Hidetaka Kuma 1〒1〒Front view showing one row of E. Figure 18f/)/) 1S Figure 7° List 4 Showing the branch and special columns 1
4 Figure 21 Figure 15 - Power/Shi7 Rarein γ Lis A 16--Katsudel End Udo 7' Nose A116--Back 1! Nos. 14 Moxibustion master 11 ``f
(Ishireko Figure 20 15C16)・-Force・Narin Bliss' Sea (j Tour Out Alice An 26, -・'L Guide: /li Each Word 123・-Through Hole Bliss 4 Katsu Main Co ζ0 Iroita・1 Shiba Show-1-11
Figure 1 Figure 22 L... Listener Lrj Gone SIT Seiten 2 January 23, 1999, 1986 Patent 1-1 No. 296606 2, Name of the invention Optical waveguide measuring device 3, Relationship with the amended person case Patent 1 Address: 6-7-35, Kitashinyo, Tokyo Parts Ward Name (2
18) The number of inventions will increase due to Sony Corporation Representative Director Norio Oga 4, Representative 6.7ili (1) In the specification, the 9th true 7th line "Suri-nt (115) J" is replaced by "slit" (62)”. (2) On the same page, line 8, “Figure 10” was replaced with “Figure 20.”
Correct. (3) Same, p. 10, line 9 r. Correct "J" to "jointly". (4) Same page, line 14, "Reliable optical coupling" should be corrected to "Reliable optical coupling." (5) Same page, lines 4-5 “Grantson prism (2
3) It says “Glan Thompson Prism (23)”
Correct to J. (6) Same, line 16113, “Angle α2” is corrected to “angle α1J.” (7) Same page, line 14, “The angle α1 at which corner C enters is.”
Correct the statement to ``The angle α2 of entering corner C is''. (8) Ibid., p. 18, lines 9-10 [Correct "Couple-in prism (15)" and "Couple-out prism (16) J" to "Sample (26) J]. (9) Ibid., Doshin line 10. ~ Line 11 [Supporting step (46)
) Correct J to "Supporting step (36) J." (10) Same page, lines 17-18 "Clamp (47)
Correct the text J to "clamp (79) J."
Correct the stepped part (36) to J. (12) Ibid., page 23, line 19, "Clamp (47) J" is corrected to "clamp (79) J." (13) Ibid., page 23, line 3, "A vertical surface (
48) Place J on the vertical surface (31a) above the first step (36)
Correct to J. (14) Same page, line 4 [Clamp (47) J is corrected to “Clamp (79) J.” (15) Same page, page 27, line 7 “Tama,” is changed to “Also,
” is corrected. (16) Same, 30th true 6th line “Sample (21) J” [
Sample (26) Corrected to J. (17) Same, page 33, line 8, "Small non-parallel" should be corrected to "Small non-parallel." (18) Same, page 40, line 3, "Holder (108) J" is corrected to "holder (102) J." (19) Same, page 41, line 2 [It says "table (45) in parallel" is corrected to "parallel to table (45)". (20) Same page, lines 10-11 “Pinion (114)
Correct "J" to "binion (not shown)". (21) Same page, line 11, ``Knob of the pinion (114)'' is corrected to ``knob of the pinion.'' (22) Same page, line 12, correct the phrase "Turn r (115)" to "Turn r (114)." (23) Same page, line 19 r (115) is provided. ”
A certain r (62) is provided. ” is corrected. (24) Same, p. 43, lines 19-20 “Sample holding cylinder (3
1) Correct J to ``Specimen holding table (31) J.'' (25) Correct ``Can perform, etc.'' to ``Unable to perform, etc.,'' in line 44, true 16. (26) Ibid., page 48, line 20 [Correct the text ``Long through hole (115) J'' to ``Long through hole (62) J.'' (27) Ibid., page 48, line 20, ``Side and rear views. ," should be corrected to "rear view and side view." (28) In the drawings, Figures 3 and 15 will be corrected in red as shown in the attached sheet. (29) Figures 6 and 21 are corrected as shown in the attached sheet (correction of signs). Figure 6 shows the 7° sous 4 branch and tiX s idari (J!1+
f+m Fig. 21

Claims (1)

[Claims] 1. A sample having a sample stage and first and second prisms, each of which is arranged to face a sample disposed between the sample stage and the first and second prisms. An optical waveguide measuring device comprising a prism pressing means. 2. The optical waveguide measuring device according to claim 1, comprising a prism moving means and a pressing means that follows the movement of the prism and presses the sample against the prism from the back side. 3. The optical waveguide measuring device according to claim 2, wherein the sample holding table has a slit through which the pressing means is inserted. 4. The optical waveguide measuring device according to claim 1, wherein the backs of each prism and the prism pressing means are formed flush with each other. 5. The optical waveguide measuring device according to claim 1, wherein the prism pressing means has a spherical portion in contact with the prism. 6. The optical waveguide measuring device according to claim 1, wherein a flexible member is interposed between the prism pressing means and the prism.