JPH02140969U - - Google Patents
Info
- Publication number
- JPH02140969U JPH02140969U JP4645589U JP4645589U JPH02140969U JP H02140969 U JPH02140969 U JP H02140969U JP 4645589 U JP4645589 U JP 4645589U JP 4645589 U JP4645589 U JP 4645589U JP H02140969 U JPH02140969 U JP H02140969U
- Authority
- JP
- Japan
- Prior art keywords
- center
- annular rail
- fixed
- around
- rotation shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4645589U JPH0718757Y2 (ja) | 1989-04-20 | 1989-04-20 | 蒸着装置用プラネタリ治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4645589U JPH0718757Y2 (ja) | 1989-04-20 | 1989-04-20 | 蒸着装置用プラネタリ治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02140969U true JPH02140969U (en, 2012) | 1990-11-26 |
| JPH0718757Y2 JPH0718757Y2 (ja) | 1995-05-01 |
Family
ID=31561550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4645589U Expired - Lifetime JPH0718757Y2 (ja) | 1989-04-20 | 1989-04-20 | 蒸着装置用プラネタリ治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0718757Y2 (en, 2012) |
-
1989
- 1989-04-20 JP JP4645589U patent/JPH0718757Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0718757Y2 (ja) | 1995-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |