JPH02140840U - - Google Patents

Info

Publication number
JPH02140840U
JPH02140840U JP4983389U JP4983389U JPH02140840U JP H02140840 U JPH02140840 U JP H02140840U JP 4983389 U JP4983389 U JP 4983389U JP 4983389 U JP4983389 U JP 4983389U JP H02140840 U JPH02140840 U JP H02140840U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
setting
groove
diffusion source
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4983389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4983389U priority Critical patent/JPH02140840U/ja
Publication of JPH02140840U publication Critical patent/JPH02140840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP4983389U 1989-04-27 1989-04-27 Pending JPH02140840U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4983389U JPH02140840U (enrdf_load_html_response) 1989-04-27 1989-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4983389U JPH02140840U (enrdf_load_html_response) 1989-04-27 1989-04-27

Publications (1)

Publication Number Publication Date
JPH02140840U true JPH02140840U (enrdf_load_html_response) 1990-11-26

Family

ID=31567862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4983389U Pending JPH02140840U (enrdf_load_html_response) 1989-04-27 1989-04-27

Country Status (1)

Country Link
JP (1) JPH02140840U (enrdf_load_html_response)

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