JPH02140840U - - Google Patents
Info
- Publication number
- JPH02140840U JPH02140840U JP4983389U JP4983389U JPH02140840U JP H02140840 U JPH02140840 U JP H02140840U JP 4983389 U JP4983389 U JP 4983389U JP 4983389 U JP4983389 U JP 4983389U JP H02140840 U JPH02140840 U JP H02140840U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- setting
- groove
- diffusion source
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4983389U JPH02140840U (cs) | 1989-04-27 | 1989-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4983389U JPH02140840U (cs) | 1989-04-27 | 1989-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140840U true JPH02140840U (cs) | 1990-11-26 |
Family
ID=31567862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4983389U Pending JPH02140840U (cs) | 1989-04-27 | 1989-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140840U (cs) |
-
1989
- 1989-04-27 JP JP4983389U patent/JPH02140840U/ja active Pending