JPH02140839U - - Google Patents
Info
- Publication number
- JPH02140839U JPH02140839U JP4933389U JP4933389U JPH02140839U JP H02140839 U JPH02140839 U JP H02140839U JP 4933389 U JP4933389 U JP 4933389U JP 4933389 U JP4933389 U JP 4933389U JP H02140839 U JPH02140839 U JP H02140839U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- support
- operating rod
- core tube
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4933389U JPH02140839U (OSRAM) | 1989-04-25 | 1989-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4933389U JPH02140839U (OSRAM) | 1989-04-25 | 1989-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140839U true JPH02140839U (OSRAM) | 1990-11-26 |
Family
ID=31566928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4933389U Pending JPH02140839U (OSRAM) | 1989-04-25 | 1989-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140839U (OSRAM) |
-
1989
- 1989-04-25 JP JP4933389U patent/JPH02140839U/ja active Pending