JPH02138428U - - Google Patents
Info
- Publication number
- JPH02138428U JPH02138428U JP4668389U JP4668389U JPH02138428U JP H02138428 U JPH02138428 U JP H02138428U JP 4668389 U JP4668389 U JP 4668389U JP 4668389 U JP4668389 U JP 4668389U JP H02138428 U JPH02138428 U JP H02138428U
- Authority
- JP
- Japan
- Prior art keywords
- drain port
- chemical
- nozzle
- chemical solution
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 9
- 238000011084 recovery Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 2
- 238000001039 wet etching Methods 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000002699 waste material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4668389U JPH02138428U (es) | 1989-04-20 | 1989-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4668389U JPH02138428U (es) | 1989-04-20 | 1989-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138428U true JPH02138428U (es) | 1990-11-19 |
Family
ID=31561975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4668389U Pending JPH02138428U (es) | 1989-04-20 | 1989-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138428U (es) |
-
1989
- 1989-04-20 JP JP4668389U patent/JPH02138428U/ja active Pending