JPH02138419U - - Google Patents

Info

Publication number
JPH02138419U
JPH02138419U JP4630789U JP4630789U JPH02138419U JP H02138419 U JPH02138419 U JP H02138419U JP 4630789 U JP4630789 U JP 4630789U JP 4630789 U JP4630789 U JP 4630789U JP H02138419 U JPH02138419 U JP H02138419U
Authority
JP
Japan
Prior art keywords
thin film
tube
semiconductor thin
forming apparatus
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4630789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0715133Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989046307U priority Critical patent/JPH0715133Y2/ja
Publication of JPH02138419U publication Critical patent/JPH02138419U/ja
Application granted granted Critical
Publication of JPH0715133Y2 publication Critical patent/JPH0715133Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989046307U 1989-04-21 1989-04-21 半導体薄膜形成装置の反応管 Expired - Lifetime JPH0715133Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989046307U JPH0715133Y2 (ja) 1989-04-21 1989-04-21 半導体薄膜形成装置の反応管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989046307U JPH0715133Y2 (ja) 1989-04-21 1989-04-21 半導体薄膜形成装置の反応管

Publications (2)

Publication Number Publication Date
JPH02138419U true JPH02138419U (US20020051482A1-20020502-M00012.png) 1990-11-19
JPH0715133Y2 JPH0715133Y2 (ja) 1995-04-10

Family

ID=31561276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989046307U Expired - Lifetime JPH0715133Y2 (ja) 1989-04-21 1989-04-21 半導体薄膜形成装置の反応管

Country Status (1)

Country Link
JP (1) JPH0715133Y2 (US20020051482A1-20020502-M00012.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60119743U (ja) * 1984-01-23 1985-08-13 サンケン電気株式会社 化学的気相付着装置
JPS63226919A (ja) * 1987-03-16 1988-09-21 Nec Corp 気相成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60119743U (ja) * 1984-01-23 1985-08-13 サンケン電気株式会社 化学的気相付着装置
JPS63226919A (ja) * 1987-03-16 1988-09-21 Nec Corp 気相成長装置

Also Published As

Publication number Publication date
JPH0715133Y2 (ja) 1995-04-10

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