JPH02138416U - - Google Patents
Info
- Publication number
- JPH02138416U JPH02138416U JP4869789U JP4869789U JPH02138416U JP H02138416 U JPH02138416 U JP H02138416U JP 4869789 U JP4869789 U JP 4869789U JP 4869789 U JP4869789 U JP 4869789U JP H02138416 U JPH02138416 U JP H02138416U
- Authority
- JP
- Japan
- Prior art keywords
- light
- exposure
- mask
- transmitting material
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4869789U JPH02138416U (en, 2012) | 1989-04-24 | 1989-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4869789U JPH02138416U (en, 2012) | 1989-04-24 | 1989-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138416U true JPH02138416U (en, 2012) | 1990-11-19 |
Family
ID=31565744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4869789U Pending JPH02138416U (en, 2012) | 1989-04-24 | 1989-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138416U (en, 2012) |
-
1989
- 1989-04-24 JP JP4869789U patent/JPH02138416U/ja active Pending