JPH02138087U - - Google Patents
Info
- Publication number
- JPH02138087U JPH02138087U JP1989047102U JP4710289U JPH02138087U JP H02138087 U JPH02138087 U JP H02138087U JP 1989047102 U JP1989047102 U JP 1989047102U JP 4710289 U JP4710289 U JP 4710289U JP H02138087 U JPH02138087 U JP H02138087U
- Authority
- JP
- Japan
- Prior art keywords
- galvanometer
- condensing lens
- sealed structure
- beam expander
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989047102U JPH02138087U (zh) | 1989-04-20 | 1989-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989047102U JPH02138087U (zh) | 1989-04-20 | 1989-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138087U true JPH02138087U (zh) | 1990-11-19 |
Family
ID=31562743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989047102U Pending JPH02138087U (zh) | 1989-04-20 | 1989-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138087U (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002316277A (ja) * | 2001-04-20 | 2002-10-29 | Sunx Ltd | レーザマーキング装置 |
| JP2014054671A (ja) * | 2007-06-25 | 2014-03-27 | Electro Scientific Industries Inc | レーザベースのウェハ加工の間にスループットを高めるようにパラメータを適応化するシステム及び方法 |
| JP2017196639A (ja) * | 2016-04-27 | 2017-11-02 | ビアメカニクス株式会社 | レーザ加工装置及びレーザ加工方法 |
-
1989
- 1989-04-20 JP JP1989047102U patent/JPH02138087U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002316277A (ja) * | 2001-04-20 | 2002-10-29 | Sunx Ltd | レーザマーキング装置 |
| JP4672173B2 (ja) * | 2001-04-20 | 2011-04-20 | パナソニック電工Ｓｕｎｘ株式会社 | レーザマーキング装置 |
| JP2014054671A (ja) * | 2007-06-25 | 2014-03-27 | Electro Scientific Industries Inc | レーザベースのウェハ加工の間にスループットを高めるようにパラメータを適応化するシステム及び方法 |
| JP2017196639A (ja) * | 2016-04-27 | 2017-11-02 | ビアメカニクス株式会社 | レーザ加工装置及びレーザ加工方法 |