JPH02137749U - - Google Patents
Info
- Publication number
- JPH02137749U JPH02137749U JP4633189U JP4633189U JPH02137749U JP H02137749 U JPH02137749 U JP H02137749U JP 4633189 U JP4633189 U JP 4633189U JP 4633189 U JP4633189 U JP 4633189U JP H02137749 U JPH02137749 U JP H02137749U
- Authority
- JP
- Japan
- Prior art keywords
- head
- vacuum chamber
- heating
- inlet
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 claims description 3
- 239000002274 desiccant Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 3
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000010926 purge Methods 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4633189U JPH02137749U (sv) | 1989-04-20 | 1989-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4633189U JPH02137749U (sv) | 1989-04-20 | 1989-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137749U true JPH02137749U (sv) | 1990-11-16 |
Family
ID=31561320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4633189U Pending JPH02137749U (sv) | 1989-04-20 | 1989-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137749U (sv) |
-
1989
- 1989-04-20 JP JP4633189U patent/JPH02137749U/ja active Pending