JPH0213733U - - Google Patents
Info
- Publication number
- JPH0213733U JPH0213733U JP9070488U JP9070488U JPH0213733U JP H0213733 U JPH0213733 U JP H0213733U JP 9070488 U JP9070488 U JP 9070488U JP 9070488 U JP9070488 U JP 9070488U JP H0213733 U JPH0213733 U JP H0213733U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- attract
- evaluating
- fix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9070488U JPH0213733U (da) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9070488U JPH0213733U (da) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0213733U true JPH0213733U (da) | 1990-01-29 |
Family
ID=31315218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9070488U Pending JPH0213733U (da) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213733U (da) |
-
1988
- 1988-07-08 JP JP9070488U patent/JPH0213733U/ja active Pending