JPS61186231U - - Google Patents

Info

Publication number
JPS61186231U
JPS61186231U JP7168985U JP7168985U JPS61186231U JP S61186231 U JPS61186231 U JP S61186231U JP 7168985 U JP7168985 U JP 7168985U JP 7168985 U JP7168985 U JP 7168985U JP S61186231 U JPS61186231 U JP S61186231U
Authority
JP
Japan
Prior art keywords
wafer
hole
utility
scope
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7168985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7168985U priority Critical patent/JPS61186231U/ja
Publication of JPS61186231U publication Critical patent/JPS61186231U/ja
Pending legal-status Critical Current

Links

JP7168985U 1985-05-13 1985-05-13 Pending JPS61186231U (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7168985U JPS61186231U (da) 1985-05-13 1985-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7168985U JPS61186231U (da) 1985-05-13 1985-05-13

Publications (1)

Publication Number Publication Date
JPS61186231U true JPS61186231U (da) 1986-11-20

Family

ID=30609409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7168985U Pending JPS61186231U (da) 1985-05-13 1985-05-13

Country Status (1)

Country Link
JP (1) JPS61186231U (da)

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