JPH02137283A - Ceramic piezoelectric element and polarization processing method of piezoelectric ceramic - Google Patents
Ceramic piezoelectric element and polarization processing method of piezoelectric ceramicInfo
- Publication number
- JPH02137283A JPH02137283A JP63291166A JP29116688A JPH02137283A JP H02137283 A JPH02137283 A JP H02137283A JP 63291166 A JP63291166 A JP 63291166A JP 29116688 A JP29116688 A JP 29116688A JP H02137283 A JPH02137283 A JP H02137283A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- curie point
- piezoelectric element
- piezoelectric
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 37
- 230000010287 polarization Effects 0.000 title claims abstract description 21
- 238000003672 processing method Methods 0.000 title 1
- 239000013078 crystal Substances 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000000203 mixture Substances 0.000 claims abstract description 4
- 239000002245 particle Substances 0.000 description 7
- 239000000843 powder Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、圧電セラミックスと電極からなるセラミック
圧電素子及び、その分極処理方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a ceramic piezoelectric element made of piezoelectric ceramics and electrodes, and a method for polarizing the same.
従来の技術
従来セラミック圧電素子は、結晶粒径数μＩの圧電セラ
ミックスの表面に銀、金、白金等の金属の導電体を数百
度で焼き付けて電極とし、これを１００℃程度のシリコ
ン・オイル中ｌこで３ｋｖ／ｍｍ程度の直流電界を両電
極間に印加して分極処理を行っている。Conventional technology A conventional ceramic piezoelectric element is made by baking a conductor of a metal such as silver, gold, or platinum at several hundred degrees onto the surface of a piezoelectric ceramic with a crystal grain size of several μI to form an electrode. A DC electric field of about 3 kV/mm is applied between both electrodes to perform polarization processing.
発明が解決しようとする問題点
分極処理温度が比較的低温で行われている為、高温時で
の特性の経時変化が大きく、また線形性が向上しない。Problems to be Solved by the Invention Since the polarization treatment is performed at a relatively low temperature, the characteristics change significantly over time at high temperatures, and the linearity does not improve.
従って高出力で使用できる安定した特性のセラミック圧
電素子を得ることが困難であった。Therefore, it has been difficult to obtain a ceramic piezoelectric element with stable characteristics that can be used at high output.
課題を解決するための手段
圧電セラミックスと電極からなるセラミック圧電素子に
於いて、圧電セラミックスを、結晶粒径が平均で１．Ｏ
μ議以下のペロブスカイト型構造材料により構成する。Means for Solving the Problems In a ceramic piezoelectric element consisting of a piezoelectric ceramic and an electrode, the piezoelectric ceramic has a crystal grain size of 1. O
It is constructed from a perovskite-type structural material of less than μm.
また、分極処理を行う際に、分極処理温度を摂氏でキュ
リー点の２１５以上でかつキュリー点以下の高温で行う
。Further, when performing the polarization treatment, the polarization treatment temperature is performed at a high temperature of 215 degrees Celsius or higher than the Curie point and lower than the Curie point.
作用
上記構成のペロブスカイト型セラミック圧電素子は、線
形性が著しく改善される。Function: The perovskite ceramic piezoelectric element having the above structure has significantly improved linearity.
また、上記の分極処理によれば、セラミック圧電素子の
高温時での経時変化が少な（、線形性の優れたものが容
易に得られることにより、高出力用・高機能のペロブス
カイト型セラミック圧電素子が得られる。In addition, according to the above polarization treatment, the ceramic piezoelectric element changes little over time at high temperatures (and it is easy to obtain a ceramic piezoelectric element with excellent linearity). is obtained.
実施例 以下実施例を示す。Example Examples are shown below.
原料粉体としてＰ ｂ ｓ Ｏ４、Ｚ ｎ Ｏ、Ｓ ｎ
Ｏ２、Ｎｂ＊ Ｏｓ Ｎ Ｔｔ ０２ 、Ｚ ｒｏ２
、ＭｎＯ２の粉体をＰｂ （Ｚｎｘｚ３Ｎｂｓ＋ｚ３）
０，０９ （ＳｎｔｚｓＮｂａｔ Ｃ１） ｏ、ｏｓ７
ｉ ００，４２Ｚ ｒ ０ｏ−４０＋ ０．５ｗ ｔ
％ＭｎＯ２で表される組成の成分比に秤量（約２２０ｇ
）Ｌ、、たちのを、混合・乾燥の後８５０℃で２時間仮
焼した。これを粉砕し、粉砕時間をかえて平均粒子径１
．０ｐｍ、０．４μｍ、０．２μｍの３種の粉体を作製
した。これをプレス成形し、バインダーを除去後それぞ
れ粒子径１．０μｍのものは１２９０℃で２粒子径０．
４μ謡は１２３０℃で２粒子径０．２ｐｍは１１７０℃
で２時間本焼成を行った。その結果、１．０，０．４及
び０．２μｍの粉体からそれぞれ平均の結晶粒径が１．
０．０．６及び０．４μＩの焼成体を得た。P b s O4, Z n O, S n as raw material powder
O2, Nb* Os N Tt 02 , Z ro2
, MnO2 powder to Pb (Znxz3Nbs+z3)
0,09 (SntzsNbat C1) o, os7
i 00,42Z r 0o-40+ 0.5w t
The weight (approximately 220 g
)L,, after mixing and drying, calcined at 850°C for 2 hours. This was pulverized, and the average particle size was 1 by varying the pulverization time.
．． Three types of powder were produced: 0 pm, 0.4 μm, and 0.2 μm. This was press-molded, and after removing the binder, the particles with a particle size of 1.0 μm were heated to 1290°C and the particles with a particle size of 0.0 μm were heated.
4μ song is 1230℃, 2 particle size 0.2pm is 1170℃
Main firing was performed for 2 hours. As a result, the average crystal grain size was 1.0, 0.4, and 0.2 μm, respectively.
Fired bodies of 0.0.6 and 0.4 μI were obtained.
また比較のために１．０μ■の粉体を１２９０℃で５時
間焼成を行い平均の結晶粒径が１．３μｍの焼成体を得
た。この焼成体を誘電特性測定用に直径１０ｍｍ５厚さ
０．３ｍｍの円板と、線形性測定用に２Ｘ１２ｍｍ、厚
さ０．５ｍｍの棒状の試料に切断し、それぞれの両面に
Ｃｒ−Ａｕ電極を蒸着した。これを分極温度を１００，
１３０．１６０，２００℃の各温度で分極時間は３０分
間の分極処理を行った。（尚、このセラミ・、り圧電素
子のキュリー点は３３０℃であった。）分極の方法は、
温度を一定に保ったシリコン・オイル中に圧電セラミッ
クスを浸し、これに３ｋｖ／ｍｍの直流電界を印加して
行った。作製した圧電素子の誘電的、圧電的特性と線形
性を測定した。For comparison, a powder of 1.0 μm was fired at 1290° C. for 5 hours to obtain a fired product with an average crystal grain size of 1.3 μm. This fired body was cut into disks with a diameter of 10 mm and thickness of 0.3 mm for dielectric property measurement, and into rod-shaped samples of 2 x 12 mm and thickness of 0.5 mm for linearity measurement, and Cr-Au electrodes were placed on both sides of each. Deposited. Set the polarization temperature to 100,
Polarization was performed at temperatures of 130, 160, and 200° C. for 30 minutes. (The Curie point of this ceramic piezoelectric element was 330°C.) The polarization method is as follows:
Piezoelectric ceramics were immersed in silicone oil whose temperature was kept constant, and a DC electric field of 3 kv/mm was applied thereto. The dielectric and piezoelectric properties and linearity of the fabricated piezoelectric element were measured.
線形性は、ネットワークアナライザー（ＹＨＰ？Ｊ４１
９２Ａ）を使用して先１こ述べた棒状のセラミック圧電
素子に加える電圧を変化させた時の共振周波数の変動を
共振周波数が１％低下する時の電流密度（ｍ Ａ ｏ−
ｐ ／ ｍ ｍ２）で示した。測定の結果を表１に示す
。なお、電流密度は大きいほど大きな出力が得られる。Linearity was measured using a network analyzer (YHP?J41).
The current density when the resonant frequency decreases by 1% (m A o-
p/m m2). The measurement results are shown in Table 1. Note that the larger the current density, the greater the output.
電流密度が２倍になれば、同じ大きさのセラミック圧電
素子で４倍の出力を得ることが可能になる。If the current density is doubled, it becomes possible to obtain four times the output with the same size ceramic piezoelectric element.
（以下余白〉
表
＊ ｍ ＡＯ−ｐ／ｎ＋ｉｎ
上記の実施例で明らかな様に、本発明の方法によって作
成したセラミック圧電素子は、１．０μ冒以下の粒子径
の場合では分極温度が１３０’Ｃ（約キュリー点の２７
５）以上で線形性が良い。更に、１６０℃（キュリー点
の約１／２）〜２００℃（キュリー点の約３１５）の範
囲で特に線形性が良い。また、結晶粒径が１．０μｍの
ものと１．３μｍのものを比較すると、従来の分極処理
温度（１００℃）では１．４倍、１６０℃（キュリー点
の約１／２）では１．６倍、結晶粒径が１．０μ閣のほ
うが線形性で良い特性が得られた。(Margin below) Table * m AO-p/n+in As is clear from the above examples, the ceramic piezoelectric element produced by the method of the present invention has a polarization temperature of 130' when the particle size is 1.0μ or less. C (approximately 27 of the Curie point
5) The above results indicate good linearity. Furthermore, linearity is particularly good in the range of 160°C (about 1/2 of the Curie point) to 200°C (about 315°C of the Curie point). Also, when comparing crystal grain sizes of 1.0 μm and 1.3 μm, it is 1.4 times as large at the conventional polarization temperature (100°C) and 1. When the crystal grain size was 6 times larger and the crystal grain size was 1.0μ, better linearity characteristics were obtained.
さらに、結晶粒径は１．０μｍより小さいほうがより良
好な線形性が得られた。Furthermore, better linearity was obtained when the crystal grain size was smaller than 1.0 μm.
また、ε、ＫｐとＱは分極処理温度によっては大きな変
化がなかったが、高温で分極処理したものほど高温く１
６０〜２００℃）での経時変化が少なかった。In addition, ε, Kp and Q did not change significantly depending on the polarization temperature, but the higher the temperature, the higher the temperature.
60 to 200°C), there was little change over time.
なお、本発明の範囲は、実施例に限定されるものではな
く、他の組成であっても良い。また分極処理の印加電圧
及び分極処理時間も実施例に限定されるものではない。Note that the scope of the present invention is not limited to the examples, and other compositions may be used. Furthermore, the applied voltage and polarization treatment time for polarization treatment are not limited to the examples.
発明の効果
発明によれば、結晶粒子径が、１．０μ■以下であるこ
と及び組成がペロブスカイト型構造のセラミック圧電素
子とし、また、分極処理温度をキュリー点の２１５以上
でかつキュリー点以下とすることにより、セラミック圧
電素子の線形性が著しく向上する。この結果１、高温で
の経時変化の少ない安定した高出力・高強度のセラミッ
ク圧電素子の製造が可能となった。Effects of the Invention According to the invention, the ceramic piezoelectric element has a crystal grain size of 1.0μ or less and a composition of perovskite structure, and the polarization temperature is set to 215 or above the Curie point and below the Curie point. By doing so, the linearity of the ceramic piezoelectric element is significantly improved. As a result 1, it has become possible to manufacture a stable, high-output, high-strength ceramic piezoelectric element with little change over time at high temperatures.
Claims (7)
素子に於いて、前記圧電セラミックスが、結晶粒径が平
均で１．０μｍ以下のペロブスカイト型構造材料からな
ることを特徴とするセラミック圧電素子。(1) A ceramic piezoelectric element consisting of a piezoelectric ceramic and an electrode, wherein the piezoelectric ceramic is made of a perovskite-type structure material with an average crystal grain size of 1.0 μm or less.
以下であることを特徴とする請求項１記載のセラミック
圧電素子。(2) The average crystal grain size of piezoelectric ceramics is 0.6 μm
The ceramic piezoelectric element according to claim 1, characterized in that:
でキュリー点の２／５以上でかつキュリー点以下の温度
で分極することを特徴とする圧電セラミックスの分極処
理方法。(3) A method for polarizing piezoelectric ceramics, characterized in that polarization is performed at a temperature of 2/5 or more of the Curie point and below the Curie point in degrees Celsius.
の３／５以下の温度で分極処理することを特徴とする請
求項３記載の圧電セラミックスの分極処理方法。(4) The method for polarizing piezoelectric ceramics according to claim 3, characterized in that the polarization treatment is carried out at a temperature of 2/5 or more of the Curie point and 3/5 or less of the Curie point in degrees Celsius.
の３／５以下であることを特徴とする請求項３記載の圧
電セラミックスの分極処理方法。(5) The method for polarizing piezoelectric ceramics according to claim 3, characterized in that the temperature is 1/2 or more of the Curie point and 3/5 or less of the Curie point in degrees Celsius.
以下であることを特徴とする請求項３記載の圧電セラミ
ックスの分極処理方法。(6) The average crystal grain size of piezoelectric ceramics is 1.0 μm
The method for polarizing piezoelectric ceramics according to claim 3, characterized in that:
かつ３／５以下であり、さらに圧電セラミックスがＰｂ
（Ｚｎ＿１＿／＿３Ｎｂ＿２＿／＿３）Ｏ＿３−Ｐｂ（
Ｓｎ＿１＿／＿３Ｎｂ＿２＿／＿３）Ｏ＿３−ＰｂＴｉ
Ｏ＿３−ＰｂＺｒＯ＿３系の組成からなるペロブスカイ
ト型構造材料であることを特徴とする請求項３記載の圧
電セラミックスの分極処理方法。(7) The polarization temperature is 1/2 or more and 3/5 or less of the Curie point in degrees Celsius, and the piezoelectric ceramic is Pb
(Zn_1_/_3Nb_2_/_3)O_3-Pb(
Sn_1_/_3Nb_2_/_3)O_3-PbTi
4. The method for polarizing piezoelectric ceramics according to claim 3, wherein the material is a perovskite structure material having a composition of O_3-PbZrO_3 system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63291166A JPH02137283A (en) | 1988-11-17 | 1988-11-17 | Ceramic piezoelectric element and polarization processing method of piezoelectric ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63291166A JPH02137283A (en) | 1988-11-17 | 1988-11-17 | Ceramic piezoelectric element and polarization processing method of piezoelectric ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137283A true JPH02137283A (en) | 1990-05-25 |
Family
ID=17765301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63291166A Pending JPH02137283A (en) | 1988-11-17 | 1988-11-17 | Ceramic piezoelectric element and polarization processing method of piezoelectric ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137283A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04149059A (en) * | 1990-10-09 | 1992-05-22 | Shizuoka Univ | Ceramic piezoelectric body |
| JPH04349164A (en) * | 1991-05-23 | 1992-12-03 | Matsushita Electric Ind Co Ltd | Piezoelectric ceramics and production thereof |
| JPH06112542A (en) * | 1992-08-12 | 1994-04-22 | Daishinku Co | Piezoelectric ceramic, its manufacture, ceramic vibrator, and piezoelectric transformer |
-
1988
- 1988-11-17 JP JP63291166A patent/JPH02137283A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04149059A (en) * | 1990-10-09 | 1992-05-22 | Shizuoka Univ | Ceramic piezoelectric body |
| JPH04349164A (en) * | 1991-05-23 | 1992-12-03 | Matsushita Electric Ind Co Ltd | Piezoelectric ceramics and production thereof |
| JPH06112542A (en) * | 1992-08-12 | 1994-04-22 | Daishinku Co | Piezoelectric ceramic, its manufacture, ceramic vibrator, and piezoelectric transformer |
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