JPH02137053U - - Google Patents
Info
- Publication number
- JPH02137053U JPH02137053U JP1989043098U JP4309889U JPH02137053U JP H02137053 U JPH02137053 U JP H02137053U JP 1989043098 U JP1989043098 U JP 1989043098U JP 4309889 U JP4309889 U JP 4309889U JP H02137053 U JPH02137053 U JP H02137053U
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- electrode
- gate insulating
- gate
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Thin Film Transistor (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989043098U JPH02137053U (US20030204162A1-20031030-M00001.png) | 1989-04-14 | 1989-04-14 | |
DE89120014T DE68912071T2 (de) | 1988-10-28 | 1989-10-27 | Dünnfilm-Transistor mit einer Speicherfunktion und Verfahren zur Verwendung eines Dünnfilmtransistors als Speicherelement. |
CA002001682A CA2001682C (en) | 1988-10-28 | 1989-10-27 | Thin film transistor having memory function and method for using thin film transistor as memory element |
EP89120014A EP0366146B1 (en) | 1988-10-28 | 1989-10-27 | Thin film transistor having memory function and method for using thin film transistor as memory element |
KR1019890015604A KR930003556B1 (ko) | 1988-10-28 | 1989-10-28 | 메모리 트랜지스터 시스템 |
US07/668,741 US5196912A (en) | 1988-10-28 | 1991-03-13 | Thin film transistor having memory function and method for using thin film transistor as memory element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989043098U JPH02137053U (US20030204162A1-20031030-M00001.png) | 1989-04-14 | 1989-04-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02137053U true JPH02137053U (US20030204162A1-20031030-M00001.png) | 1990-11-15 |
Family
ID=31555224
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989043098U Pending JPH02137053U (US20030204162A1-20031030-M00001.png) | 1988-10-28 | 1989-04-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02137053U (US20030204162A1-20031030-M00001.png) |
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1989
- 1989-04-14 JP JP1989043098U patent/JPH02137053U/ja active Pending