JPH02137039U - - Google Patents
Info
- Publication number
- JPH02137039U JPH02137039U JP4376189U JP4376189U JPH02137039U JP H02137039 U JPH02137039 U JP H02137039U JP 4376189 U JP4376189 U JP 4376189U JP 4376189 U JP4376189 U JP 4376189U JP H02137039 U JPH02137039 U JP H02137039U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vapor
- hot air
- transport mechanism
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims 3
- 230000007723 transport mechanism Effects 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 2
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4376189U JPH02137039U (cs) | 1989-04-14 | 1989-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4376189U JPH02137039U (cs) | 1989-04-14 | 1989-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137039U true JPH02137039U (cs) | 1990-11-15 |
Family
ID=31556450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4376189U Pending JPH02137039U (cs) | 1989-04-14 | 1989-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137039U (cs) |
-
1989
- 1989-04-14 JP JP4376189U patent/JPH02137039U/ja active Pending