JPH02137035U - - Google Patents

Info

Publication number

JPH02137035U

JPH02137035U JP4424089U JP4424089U JPH02137035U JP H02137035 U JPH02137035 U JP H02137035U JP 4424089 U JP4424089 U JP 4424089U JP 4424089 U JP4424089 U JP 4424089U JP H02137035 U JPH02137035 U JP H02137035U

Authority

JP

Japan

Prior art keywords

film

oxide film

insulating film

selectively formed

oxide

Prior art date

1989-04-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 2
• OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
• 239000011521 glass Substances 0.000 description 2
• 229910052698 phosphorus Inorganic materials 0.000 description 2
• 239000011574 phosphorus Substances 0.000 description 2
• 238000009792 diffusion process Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1

Cited By (1)