JPH02137034U - - Google Patents

Info

Publication number
JPH02137034U
JPH02137034U JP4300189U JP4300189U JPH02137034U JP H02137034 U JPH02137034 U JP H02137034U JP 4300189 U JP4300189 U JP 4300189U JP 4300189 U JP4300189 U JP 4300189U JP H02137034 U JPH02137034 U JP H02137034U
Authority
JP
Japan
Prior art keywords
crystal growth
floor surface
chamber
raw material
material storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4300189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4300189U priority Critical patent/JPH02137034U/ja
Publication of JPH02137034U publication Critical patent/JPH02137034U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP4300189U 1989-04-14 1989-04-14 Pending JPH02137034U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4300189U JPH02137034U (OSRAM) 1989-04-14 1989-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4300189U JPH02137034U (OSRAM) 1989-04-14 1989-04-14

Publications (1)

Publication Number Publication Date
JPH02137034U true JPH02137034U (OSRAM) 1990-11-15

Family

ID=31555040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4300189U Pending JPH02137034U (OSRAM) 1989-04-14 1989-04-14

Country Status (1)

Country Link
JP (1) JPH02137034U (OSRAM)

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