JPH02135836U

JPH02135836U -

Info

Publication number: JPH02135836U
Application number: JP4498489U
Authority: JP
Priority date: 1989-04-19
Filing date: 1989-04-19
Publication date: 1990-11-13

Description

[Brief explanation of the drawing]

第１図ないし第４図は第１考案の第１実施例を
示すものであつて、第１図は圧力センサの縦断正
面図、第２図は第１図のＡ−Ａ線断面図、第３図
は圧力センサにおけるマグネツトおよびホール素
子付近を示す縦断側面図、第４図はホール素子の
電圧増巾調整回路図、第５図は第１考案の第２実
施例に係る真空用圧力センサを示す縦断正面図、
第６図は第１考案の第３実施例に係る真空用圧力
センサを示す縦断正面図、第７図は２個のマグネ
ツトとホール素子を使用した場合の移動量・発生
電圧特性線図、第８図および第９図は第２考案の
実施例を示すものであつて、第８図は圧力センサ
の縦断正面図、第９図は第８図のＢ−Ｂ線断面図
である。第１０図および第１１図は従来の圧力セ
ンサを示すものであつて、第１０図はその縦断正
面図、第１１図はその平面図である。第１２図は
従来の圧力センサの検出回路を示す図、第１３図
は従来の１個のマグネツトとホール素子を使用し
た場合の移動量・発生電圧特性線図である。図において、１および２はマグネツト、３はホ
ール素子、４はダイヤフラム、５はベローズ、６
は一部切欠リング状マグネツト、２２はケース、
２３は流体導入孔、２４はダイヤフラム支承用環
状突条、２５は支持部材、２６は保持部材、２７
は円盤、２８および２９は突起、３０は保持部材
押下用ばね、ＩＣ_１はオペアンプ、ＶＲ１は０点
調整用可変抵抗器、ＶＲ２は増巾率調整用可変抵
抗器である。 1 to 4 show a first embodiment of the first invention, in which FIG. 1 is a longitudinal sectional front view of the pressure sensor, FIG. 2 is a sectional view taken along line A--A in FIG. Fig. 3 is a longitudinal side view showing the vicinity of the magnet and Hall element in the pressure sensor, Fig. 4 is a voltage amplification adjustment circuit diagram of the Hall element, and Fig. 5 is a vacuum pressure sensor according to the second embodiment of the first invention. A longitudinal front view showing,
FIG. 6 is a longitudinal sectional front view showing a vacuum pressure sensor according to the third embodiment of the first invention, FIG. 7 is a displacement/generated voltage characteristic diagram when two magnets and a Hall element are used, and FIG. 8 and 9 show an embodiment of the second invention, in which FIG. 8 is a longitudinal sectional front view of the pressure sensor, and FIG. 9 is a sectional view taken along the line B--B in FIG. 8. 10 and 11 show a conventional pressure sensor, with FIG. 10 being a longitudinal sectional front view thereof and FIG. 11 being a plan view thereof. FIG. 12 is a diagram showing a detection circuit of a conventional pressure sensor, and FIG. 13 is a diagram showing movement amount/generated voltage characteristics when a single conventional magnet and Hall element are used. In the figure, 1 and 2 are magnets, 3 is a Hall element, 4 is a diaphragm, 5 is a bellows, and 6
22 is a partially cut-out ring-shaped magnet, and 22 is a case.
23 is a fluid introduction hole, 24 is an annular protrusion for supporting the diaphragm, 25 is a support member, 26 is a holding member, 27
28 and 29 are disks, 28 and 29 are protrusions, 30 is a spring for pressing down the holding member, _IC1 is an operational amplifier, VR1 is a variable resistor for zero point adjustment, and VR2 is a variable resistor for amplification factor adjustment.

Claims

[Scope of claims for utility model registration] (1) Different poles N and S of two magnets 1 and 2
are arranged facing each other with a space between them, and a Hall element 3 is arranged in the magnetic field between the poles N and S of each magnet 1 and 2 so as to be orthogonal to the lines of magnetic force,
A pressure sensor in which one of the magnets 1 and 2 and the Hall element 3 is fixed to a support member, and the other is connected to a portion of a movable pressure receiving member such as a diaphragm 4 or a bellows 5 that moves in a direction perpendicular to the lines of magnetic force. . (2) The Hall element 3 is arranged perpendicularly to the lines of magnetic force in the magnetic field between the poles N and S of the partially cut-out ring-shaped magnet 6, and one of the magnet 6 and the Hall element 3 is attached to the support member. A pressure sensor that is fixed, and the other side is connected to a portion of a movable pressure receiving member such as a diaphragm 4 or a bellows 5 that moves in a direction perpendicular to the lines of magnetic force.