JPH02135795A - Resist coater of substrate for printed circuit - Google Patents

Resist coater of substrate for printed circuit

Info

Publication number
JPH02135795A
JPH02135795A JP29051488A JP29051488A JPH02135795A JP H02135795 A JPH02135795 A JP H02135795A JP 29051488 A JP29051488 A JP 29051488A JP 29051488 A JP29051488 A JP 29051488A JP H02135795 A JPH02135795 A JP H02135795A
Authority
JP
Japan
Prior art keywords
substrate
electrolyte
printed circuit
applying
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29051488A
Other languages
Japanese (ja)
Inventor
Hiroyuki Sawamura
沢村 広之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP29051488A priority Critical patent/JPH02135795A/en
Publication of JPH02135795A publication Critical patent/JPH02135795A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

PURPOSE:To improve the reliability of coating of a resist film by applying a magnetic field in a direction perpendicular to an electrolyte conveying tube axis for the film, supplying a current in a direction perpendicular to both the direction of the field and the axial direction, and applying a voltage between the electrolyte and a substrate for a printed circuit. CONSTITUTION:Magnetic field applying means 9 for applying a magnetic field in a direction perpendicular to the axial direction of an electrolyte conveying tube 8 for a resist film therein, conducting means 10 for supplying a current in a direction perpendicular to both the axial direction and the direction of the magnetic field to the electrolyte 2 for the film in the tube 8, and voltage applying means 6, 11 for applying a voltage between the electrolyte 2 and a substrate 3 for a printed circuit are provided. Accordingly, thrust is operated axially of the tube to the electrolyte 2, the electrolyte 2 is atomized in a spray state to the substrate 3 to guide the electrolyte into a through hole. Thus, the reliability of coating of the film can be improved.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、プリント配桿板の製造工程で使用するプリン
ト基板のレジスト塗布装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a resist coating apparatus for printed circuit boards used in the manufacturing process of printed distribution boards.

(従来の技術) 従来、印刷回路用基板のレジスト塗布装置は、第2図に
示すように構成されている。これを同図に基づいて説明
すると、同図において、符号1で示すものは感光性レジ
スト膜の電解液2がその内部に貯溜する処理槽、3はこ
の処理槽l内の電解液2中に臨む金属張積層板からなる
プリント回路用の基板、4および5はこの基板3を介し
て対向する電極板としての導体、6はこれら内導体4゜
5および前記基板3に接続されかつ前記処理槽1の外部
に設けられた電源である。また、7は前記処理槽1内の
底部に設けられた液撹拌用の吹出バイブである。
(Prior Art) Conventionally, a resist coating apparatus for a printed circuit board is configured as shown in FIG. To explain this based on the figure, in the figure, the reference numeral 1 indicates a processing tank in which the electrolyte 2 of the photosensitive resist film is stored, and 3 indicates the electrolyte 2 in the processing tank 1. A printed circuit board made of a facing metal-clad laminate, 4 and 5 are conductors serving as electrode plates facing each other via this board 3, and 6 is connected to these inner conductors 4.5 and the board 3 and connected to the processing tank. This is a power supply provided outside of 1. Further, 7 is a blowing vibrator provided at the bottom of the processing tank 1 for stirring the liquid.

次に、このように構成されたプリント回路用基板のレジ
スト塗布装置を用いる塗布方法について説明する。
Next, a coating method using the resist coating apparatus for a printed circuit board configured as described above will be described.

先ず、処理Ml内の電解液2中に基板3および導体4,
5を浸漬する。このとき、各導体4.5は基板3を介し
て互いに対向している。次に、電源6によって内導体4
,5および基板3に通電することにより導体4と基板3
問および導体5と基板3間に電圧を印加して感光性レジ
スト膜を基板3に電着させる。
First, a substrate 3 and a conductor 4,
Soak 5. At this time, each conductor 4.5 faces each other with the substrate 3 in between. Next, the inner conductor 4 is
, 5 and the substrate 3, the conductor 4 and the substrate 3 are connected.
A voltage is applied between the conductor 5 and the substrate 3 to electrodeposit a photosensitive resist film on the substrate 3.

このようにして、プリント回路用基板に感光性レジスト
膜を塗布することができる。
In this way, the photosensitive resist film can be applied to the printed circuit board.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、上記従来のプリント回路用基板のレジス
ト膜塗布装置においては、電解液2中に基板3および導
体4,5を浸漬するものであるため、処理槽1内に多量
の電解液2を必要とし、5ストが嵩むという問題があっ
た。また、プリント回路用基板としてのスルーホール等
の貫通孔(図示せず)を有する基板である場合には貫通
孔に電解液2が流入しないことがあり、レジスト膜塗布
上の信頼性が低下するという問題があワた。
However, in the above-mentioned conventional resist film coating apparatus for printed circuit boards, since the substrate 3 and the conductors 4 and 5 are immersed in the electrolytic solution 2, a large amount of the electrolytic solution 2 is required in the processing tank 1. , there was a problem that the 5-stroke was bulky. Furthermore, if the substrate has through holes (not shown) such as through holes for printed circuit boards, the electrolyte 2 may not flow into the through holes, reducing the reliability of resist film application. That problem arose.

本発明は、上記のような問題点を解消するためになされ
たもので、基板に対してレジストを塗布するに際し、特
にスルーホール付の基板に対してもレジスト膜塗布上の
信頼性を向上し、かつ効率的に塗布できる装置を提供す
ることを目的とする。
The present invention has been made to solve the above-mentioned problems, and improves the reliability of resist film application when applying resist to a substrate, especially to a substrate with through holes. It is an object of the present invention to provide an apparatus that can perform coating in an efficient manner.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するため、本発明ではプリント回路用基
板のレジスト塗布装置をつぎのように構成するものであ
る。
In order to achieve the above object, the present invention provides a resist coating apparatus for a printed circuit board having the following configuration.

即ち、一端かプリント回路用基板側に開口しているレジ
スト膜用電解液の搬送管と、該搬送管内にその軸方向と
直交する方向に磁界を付加する磁界付加手段と、該搬送
管内の上記レジスト膜用型を 解凍に、詠軸方向と直交しかつ該磁界の方向とも直交す
る方向に電流を流す通電手段と、該レジスト膜用電解液
と上記プリント回路用基板との間に電圧を印加する電圧
印加手段とを備えるようにする。
In other words, a resist film electrolyte conveying tube having one end open toward the printed circuit board side, a magnetic field applying means for applying a magnetic field within the conveying tube in a direction perpendicular to the axial direction thereof, and the above-mentioned To thaw the resist film mold, a voltage is applied between an energizing means for passing a current in a direction perpendicular to the ink axis direction and perpendicular to the direction of the magnetic field, and the resist film electrolyte and the printed circuit board. and a voltage applying means.

〔作用〕[Effect]

上記構成により、レジスト膜用電解液に、搬送管の軸方
向に推力が働き、該電解液が動きプリント回路用基板に
吹き付けられる。
With the above configuration, a thrust is applied to the resist film electrolytic solution in the axial direction of the conveying tube, and the electrolytic solution moves and is sprayed onto the printed circuit board.

〔実施例) 以下本発明を実施例により説明する。〔Example) The present invention will be explained below with reference to Examples.

第1図は、本発明の一実施例であるプリント回路用基板
のレジスト塗布装置を示す概略図である。図において、
2は感光レジスト膜の電解液、3はプリント回路用基板
、6は電着のための電源である。8は、レジスト膜用電
解液2を搬送し基板3に向かい吹き付ける搬送管で、磁
界による誘導加熱の影響を防止するため非金属、すなわ
ちプラスチックが用いられ斜め上方を向いた先端(開口
)から基板3へ電解液を吹き付ける。9は、この搬送管
8の外側面に固定された電磁コイルで、上下対をなして
配置されている。10は、この電磁コイル9が取付けら
れた箇所の搬送管8の断面で見た時、電磁コイル9の取
付位置に対して90°回転した位置で、かつ搬送管8内
に対向して設けられた一対の電極で、搬送管8の軸方向
に直交しかつ磁界の方向とも直交する方向に電流を流す
通電手段の一部を構成する。また、搬送管8と基板3間
には電源6により電圧が印加されている。搬送管8内の
固定電極11はこの電圧印加のためのものである。
FIG. 1 is a schematic diagram showing a resist coating apparatus for a printed circuit board, which is an embodiment of the present invention. In the figure,
2 is an electrolytic solution for the photosensitive resist film, 3 is a printed circuit board, and 6 is a power source for electrodeposition. Reference numeral 8 denotes a conveying tube that conveys the electrolytic solution 2 for the resist film and sprays it toward the substrate 3. In order to prevent the influence of induction heating caused by the magnetic field, a nonmetallic material, that is, plastic, is used, and the tube 8 conveys the electrolytic solution 2 for the resist film and sprays it toward the substrate 3 from the tip (opening) facing diagonally upward. Spray electrolyte onto 3. Reference numeral 9 denotes electromagnetic coils fixed to the outer surface of the conveying pipe 8, which are arranged in an upper and lower pair. 10 is located at a position rotated by 90 degrees with respect to the mounting position of the electromagnetic coil 9 when viewed from the cross section of the transport pipe 8 where the electromagnetic coil 9 is installed, and is provided facing inside the transport pipe 8. The pair of electrodes constitutes part of a current-carrying means for passing a current in a direction perpendicular to the axial direction of the conveying tube 8 and perpendicular to the direction of the magnetic field. Further, a voltage is applied between the transport tube 8 and the substrate 3 by a power source 6. A fixed electrode 11 within the transport tube 8 is for applying this voltage.

次に本実施例の動作を説明する。Next, the operation of this embodiment will be explained.

搬送管8内の電解液2はM、極lOにより電流を流し、
一方この?「流の流れる方向と直角方向に磁界を付加す
ることにより、フレミングの左手の法則に従い、電解液
2へは矢印の方向へ移動する力か作用し、基板3に向か
い電解液を吹き出すことができる。この時、固定電極1
1と基板3間に電源6によって電圧が印加され感光性レ
ジスト膜を基板3に電着させる。
The electrolytic solution 2 in the transport tube 8 passes current by M, pole lO,
On the other hand, this? "By applying a magnetic field in a direction perpendicular to the direction of flow, a force acting on the electrolyte 2 moves in the direction of the arrow, according to Fleming's left-hand rule, and the electrolyte can be blown out toward the substrate 3. At this time, fixed electrode 1
A voltage is applied between the photoresist 1 and the substrate 3 by a power source 6 to electrodeposit a photosensitive resist film on the substrate 3.

この装置では、基板3に対して電解液2をスプレー状に
吹き付けることができ、また上記磁界又は電流の強さを
調節することにより、電着に使用する電解液量を適量に
調節でき、電解液を少世で済ませることができると共に
、基板の表裏面のみならず、スルーホール等の貫通穴内
にも電解液を導くことができる。
With this device, the electrolytic solution 2 can be sprayed onto the substrate 3, and by adjusting the strength of the magnetic field or current, the amount of electrolytic solution used for electrodeposition can be adjusted to an appropriate amount. In addition to being able to use only a small amount of liquid, the electrolyte can be introduced not only to the front and back surfaces of the substrate but also into through-holes such as through-holes.

なお、上記磁界の発生、電極1oによる通電は、直流、
脈流、交流のいづれでもよく、要は電解液に基板向けの
推力が発生ずればよく、その波形は塗布状況に応じて適
宜選択される。また、レジスト塗布装置に対し基板を相
対的に移動するか否かは基板の形状、塗布状況に応じて
選択される。
Note that the generation of the magnetic field and the energization by the electrode 1o are conducted using direct current,
Either a pulsating flow or an alternating current may be used, as long as a thrust is generated in the electrolyte toward the substrate, and the waveform thereof is appropriately selected depending on the coating situation. Further, whether or not to move the substrate relative to the resist coating device is selected depending on the shape of the substrate and the coating situation.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、基板に対してレ
ジスト膜の電解液をスプレー状に吹き付けるので、電解
液の使用量を少々<シ、コストの低廉化を図ることがで
きる。
As described above, according to the present invention, since the electrolytic solution for the resist film is sprayed onto the substrate, the amount of electrolytic solution used can be reduced to a small extent, and costs can be reduced.

また、基板の表裏面のみならず、貫通孔内に電解液を導
くことができるから、レジスト1摸塗布′上の信頼性を
向上させ効率的に塗布することができる。
Further, since the electrolytic solution can be introduced not only to the front and back surfaces of the substrate but also into the through holes, reliability in coating one resist can be improved and coating can be performed efficiently.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す概略図、第2図は従来
装置を示す概略図である。 図中、2は電解液、3は基板、6は電源、8は搬送管、
9は電磁コイル、10は一対の′rr1極、11は固定
電極である。 なお、図中、同一符号は同−又は相当部分を示す。
FIG. 1 is a schematic diagram showing an embodiment of the present invention, and FIG. 2 is a schematic diagram showing a conventional device. In the figure, 2 is an electrolytic solution, 3 is a substrate, 6 is a power supply, 8 is a transport pipe,
9 is an electromagnetic coil, 10 is a pair of 'rr1 poles, and 11 is a fixed electrode. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims]  一端がプリント回路用基板側に開口しているレジスト
膜用電解液の搬送管と、該搬送管内にその軸方向と直交
する方向に磁界を付加する磁界付加手段と、該搬送管内
の上記レジスト膜用電解液に、該軸方向と直交しかつ該
磁界の方向とも直交する方向に電流を流す通電手段と、
該レジスト膜用電解液と上記プリント回路用基板との間
に電圧を印加する電圧印加手段とを備えていることを特
徴とするプリント回路用基板のレジスト塗布装置。
A transport tube for resist film electrolyte having one end opened toward the printed circuit board side, a magnetic field applying means for applying a magnetic field within the transport pipe in a direction perpendicular to the axial direction thereof, and the resist film within the transport pipe. energizing means for passing a current through the electrolytic solution in a direction perpendicular to the axial direction and perpendicular to the direction of the magnetic field;
A resist coating apparatus for a printed circuit board, comprising a voltage applying means for applying a voltage between the resist film electrolyte and the printed circuit board.
JP29051488A 1988-11-17 1988-11-17 Resist coater of substrate for printed circuit Pending JPH02135795A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29051488A JPH02135795A (en) 1988-11-17 1988-11-17 Resist coater of substrate for printed circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29051488A JPH02135795A (en) 1988-11-17 1988-11-17 Resist coater of substrate for printed circuit

Publications (1)

Publication Number Publication Date
JPH02135795A true JPH02135795A (en) 1990-05-24

Family

ID=17757008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29051488A Pending JPH02135795A (en) 1988-11-17 1988-11-17 Resist coater of substrate for printed circuit

Country Status (1)

Country Link
JP (1) JPH02135795A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100645630B1 (en) * 2005-09-16 2006-11-14 삼성전기주식회사 Method for electrolytic plating on printed circuit board using a periodic directional magnetic field

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100645630B1 (en) * 2005-09-16 2006-11-14 삼성전기주식회사 Method for electrolytic plating on printed circuit board using a periodic directional magnetic field

Similar Documents

Publication Publication Date Title
US6746578B2 (en) Selective shield/material flow mechanism
GB2336161B (en) Method of providing conductive tracks on a printed circuit and apparatus for use in carrying out the method
JPH02135795A (en) Resist coater of substrate for printed circuit
JP4504362B2 (en) Electrophoretic immersion coating equipment
KR970016509A (en) Arc controller
US20070144896A1 (en) Plating process enhanced by squeegee roller apparatus
JPH09274997A (en) Compact type atmospheric pressure plasma generating device and surface treatment device using the device
JP3443712B2 (en) Electrodeposition equipment for workpieces
KR102438116B1 (en) Pcb plating apparatus
JPS5893894A (en) Method and apparatus for electrodeposition painting
JP2000199099A (en) Jig for electroplating printed board
JPH0578885A (en) Electroplating apparatus
JP3375008B2 (en) Electrodeposition method
TWM381635U (en) Electroplate apparatus for plating copper on a printed circuit board
JPH0222497A (en) Multistage current supply-type electrodeposition coating device
JPS5521528A (en) Plating apparatus
JPH1168293A (en) Horizontal carriage electric plating device
JP2882897B2 (en) Water or water-containing treatment equipment
JPH01263300A (en) Electroplating device
WO2000018200A1 (en) Method for applying conductive lines on the casing of mobile phone
JPS636159B2 (en)
JPS60187700A (en) Power source system for plating
JPH09249994A (en) Electrodeposition coating device
JPH04246200A (en) Method for electroplating substrate
JPH03285098A (en) Electroplating device