JPH02135527U - - Google Patents

Info

Publication number
JPH02135527U
JPH02135527U JP4365989U JP4365989U JPH02135527U JP H02135527 U JPH02135527 U JP H02135527U JP 4365989 U JP4365989 U JP 4365989U JP 4365989 U JP4365989 U JP 4365989U JP H02135527 U JPH02135527 U JP H02135527U
Authority
JP
Japan
Prior art keywords
drive mechanism
casing
slit
housing
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4365989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4365989U priority Critical patent/JPH02135527U/ja
Publication of JPH02135527U publication Critical patent/JPH02135527U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP4365989U 1989-04-14 1989-04-14 Pending JPH02135527U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4365989U JPH02135527U (enrdf_load_stackoverflow) 1989-04-14 1989-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4365989U JPH02135527U (enrdf_load_stackoverflow) 1989-04-14 1989-04-14

Publications (1)

Publication Number Publication Date
JPH02135527U true JPH02135527U (enrdf_load_stackoverflow) 1990-11-09

Family

ID=31556260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4365989U Pending JPH02135527U (enrdf_load_stackoverflow) 1989-04-14 1989-04-14

Country Status (1)

Country Link
JP (1) JPH02135527U (enrdf_load_stackoverflow)

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