JPS61171730U - - Google Patents

Info

Publication number
JPS61171730U
JPS61171730U JP5273785U JP5273785U JPS61171730U JP S61171730 U JPS61171730 U JP S61171730U JP 5273785 U JP5273785 U JP 5273785U JP 5273785 U JP5273785 U JP 5273785U JP S61171730 U JPS61171730 U JP S61171730U
Authority
JP
Japan
Prior art keywords
drive mechanism
support member
chamber
clean
longitudinal direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5273785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5273785U priority Critical patent/JPS61171730U/ja
Publication of JPS61171730U publication Critical patent/JPS61171730U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP5273785U 1985-04-11 1985-04-11 Pending JPS61171730U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5273785U JPS61171730U (enrdf_load_stackoverflow) 1985-04-11 1985-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5273785U JPS61171730U (enrdf_load_stackoverflow) 1985-04-11 1985-04-11

Publications (1)

Publication Number Publication Date
JPS61171730U true JPS61171730U (enrdf_load_stackoverflow) 1986-10-24

Family

ID=30572953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5273785U Pending JPS61171730U (enrdf_load_stackoverflow) 1985-04-11 1985-04-11

Country Status (1)

Country Link
JP (1) JPS61171730U (enrdf_load_stackoverflow)

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