JPH02135140U - - Google Patents

Info

Publication number
JPH02135140U
JPH02135140U JP4348189U JP4348189U JPH02135140U JP H02135140 U JPH02135140 U JP H02135140U JP 4348189 U JP4348189 U JP 4348189U JP 4348189 U JP4348189 U JP 4348189U JP H02135140 U JPH02135140 U JP H02135140U
Authority
JP
Japan
Prior art keywords
adsorption surface
processed
sealing material
board
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4348189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4348189U priority Critical patent/JPH02135140U/ja
Publication of JPH02135140U publication Critical patent/JPH02135140U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Drying Of Semiconductors (AREA)
JP4348189U 1989-04-12 1989-04-12 Pending JPH02135140U (US20080293856A1-20081127-C00127.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4348189U JPH02135140U (US20080293856A1-20081127-C00127.png) 1989-04-12 1989-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4348189U JPH02135140U (US20080293856A1-20081127-C00127.png) 1989-04-12 1989-04-12

Publications (1)

Publication Number Publication Date
JPH02135140U true JPH02135140U (US20080293856A1-20081127-C00127.png) 1990-11-09

Family

ID=31555924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4348189U Pending JPH02135140U (US20080293856A1-20081127-C00127.png) 1989-04-12 1989-04-12

Country Status (1)

Country Link
JP (1) JPH02135140U (US20080293856A1-20081127-C00127.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647642A (ja) * 1992-01-21 1994-02-22 Applied Materials Inc 絶縁型静電チャックと励起方法
JP2005101505A (ja) * 2003-03-13 2005-04-14 Ventec-Ges Fuer Venturekapital & Unternehmensberatung Mbh 可動可搬型静電式基板保持器
JP2009249662A (ja) * 2008-04-03 2009-10-29 Ulvac Japan Ltd 真空処理装置
JP2016051836A (ja) * 2014-09-01 2016-04-11 株式会社ディスコ 静電支持プレート及び静電支持プレートの製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647642A (ja) * 1992-01-21 1994-02-22 Applied Materials Inc 絶縁型静電チャックと励起方法
JP2005101505A (ja) * 2003-03-13 2005-04-14 Ventec-Ges Fuer Venturekapital & Unternehmensberatung Mbh 可動可搬型静電式基板保持器
JP2009249662A (ja) * 2008-04-03 2009-10-29 Ulvac Japan Ltd 真空処理装置
JP2016051836A (ja) * 2014-09-01 2016-04-11 株式会社ディスコ 静電支持プレート及び静電支持プレートの製造方法

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